Bruker QUANTAX EDS, User Manual, Page: 51 / 119

5.1 Preparatory Steps QUANTAX EDS
51
This chapter gives the analyst an overview of the most important tools of the ESPRIT
software, permitting a quick start to perform analyses with the QUANTAX EDS system.
The procedures described here assume standard (default) ESPRIT settings. They also
refer to the use of a scanning electron microscope (SEM) or a scanning transmission
electron microscope (STEM) or similar. Differences in the analysis of bulk samples
(mainly SEM and FIB) and electron transparent samples (TEM, STEM, sometimes SEM or
FIB) are pointed out.
5.1 Preparatory Steps
This section describes the actions needed prior to starting the analytical work with the QUANTAX
EDS system.
Step
Examples/hints
1 Prepare the sample and place it in the
microscope
e.g., embedding, polishing and carbon
coating, TEM sample preparation
2 Adjust high voltage and working distance
(SEM) or eucentric height (TEM) on the
microscope. Switch on the beam. Adjust
magnification.
Choose high voltage (HV) based on
overvoltage of elements to analyze.
3 Start ESPRIT and log in. Refer to section 4.1.
4
Use the icon in the bottom left
corner of the Microscope configurator to
open the MICROSCOPE
CONFIGURATION dialog and check the
settings.
WD, Magnification, HV values must match
values set on the microscope (see section
4.5.3). Device status indicator should be
green.
5
Use the icon in the bottom left
corner of the EDS configurator to open
the EDS CONFIGURATION dialog and
a) Set Pulse throughput and Maximum
energy
Normal operation mode should be selected.
For Pulse throughput and Maximum
energy use Automatic settings. Change it on
demand.
b) Check
Detector temperature.
Check operation temperature. Device status
indicator should be green (see section 4.5.5).
6 Check input count rate and dead time for
the analysis.
The input count rate should be chosen
according to the analytical task.
7
Use the icon in the bottom left
corner of the
Sample
configurator to
open the
SAMPLE PROPERTIES
dialog
and set sample name and description.
The sample name applies for all further
measurements.
8
Proceed with required analysis. Refer to section 5.7, 5.14, 5.15 or 5.17.