Bruker QUANTAX EDS, User Manual, Page: 78 / 119

User Manual 5 Step-by-Step Guides
78
5.11.3 Maintain Standards Library for Electron Transparent Samples –
Zeta Factors
This guide describes how to set up the Zeta factor standards library. Quantification of electron
transparent samples with the Zeta factor method requires knowledge of the beam current in [pA]
for standard and “unknown” sample and sample thickness of the standard sample.
Experimental Zeta Factors
Follow this guide to update Zeta factors for the elements contained in the standard sample.
Step Example/hints
1 Set up a Cliff-Lorimer standards library. Follow step 1-4 in section 5.11.2 since the
geometry setup for Cliff-Lorimer and Zeta
factors is the same.
2
Select the or the
workspace and
Acquire or open a spectrum of the
reference/standard sample. The composition
and thickness of the sample has to be known.
The beam current during measurement also
has to be known and has to be entered as
described in 5.13.3 or, if offline, as spectrum
parameter: double click on the highlighted line
of the active spectrum in the spectrum list
(below the spectrum) to open the
SPECTRUM PROPERTIES dialog and enter
the beam current in pA as system factor in
the
Parameter tab.
a) a spectrum
b) Use the Spectrum chart icon to
open a spectrum.
3
Follow the standardless quantification
steps 6 to 13 to identify elements, set
background regions and deconvolution.
Refer to section 5.12.2. Set quantification
method mode to (interactive) to access
the QUANTIFICATION dialog.
4 Select Zeta factor method under
Quantification model.
5
Click .
The EDIT STANDARD PROPERTIES dialog
pops up.
6 Enter reference element concentration
values and sample thickness for standard
sample.
Review Beam current. If missing or incorrect,
enter the correct value and also enter the
correct value in the spectrum Parameter tab
(see step 2).
The density will be calculated internally using
the sample composition, if changed manually,
the thickness will change, respectively.
7
Click .
The
VALIDATION
dialog pops up with new
and old Zeta factors. Initial Zeta factors have
the same values as theoretical Cliff-Lorimer
factors (and are considerably smaller).