Bruker QUANTAX EDS, User Manual, Page: 70 / 119

User Manual 5 Step-by-Step Guides
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5.10 System Factor Calibration/ Beam Current Setting
For standard-based quantification, a probe current-dependent system factor has to be determined.
There are two ways to proceed depending on sample type and whether a picoamperemeter /
beam current monitor is available or not. The system factor value is stored in the ESPRIT software
and saved along with the following measurements until the software is closed. The quantification
of electron transparent samples with the Zeta-factor method requires the knowledge of
beam/probe current.
System Factor Calibration
Step Example/hints
1 Move the calibration sample into the
analytical position and adjust microscope
parameters.
Use a single element calibration sample (Co,
Mn, Cu). Select a homogeneous area for
spectrum acquisition.
2 Load or create a standards library. Follow section 5.11.1.
3
Click the Standards configurator ’s
calibration icon to open the
SYSTEM FACTOR CALIBRATION
dialog.
4 Select the material of the Calibration
sample from the
Select the sample to
use for calibration
drop-down list.
5
Set
Acquisition time
parameters.
6
Click to calibrate the
system factor.
After the calibration is finished the message
System is now calibrated appears. Do not
change microscope parameters afterwards.
7
the SYSTEM FACTOR
CALIBRATION dialog.
Spectra that are obtained after this calibration
will contain the measured system factor.
8 Proceed with measurement of standard
samples.
Continue with 5.12.3 for standard-based
measurement using a temporary reference.
Continue with 5.12.4 for standard-based
measurement using a standards library.