GB 00466 - Edition 01 - March 97
Pumping curves
G 10
3/4
Alcatel - High Vacuum Technology - ATP User’s Manual
0
Inlet pressure (Pa)
Inlet pressure (mbar)
Pumping
speed (l/s)
0
500
400
300
200
100
1000
900
800
700
600
10
-4
10
-3
10
-2
10
-6
10
-5
10
-1
1
10
-3
10
-4
10
-2
10
-1
1
10
10
2
Pumping speed versus inlet pressure
ATP900 HPC
ATP400 HPC
Upper limits
for continuous operation
Gas : N
2
Ar/SF6
Ar/SF6
N
2
N
2
