Alcatel Vacuum Technology Adixen ATP 100 User Manual Download Page 74

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B 140

Alcatel Vacuum Technology France - ATP User’s Manual

Functions of integrable controller
OEM Board type

3/3

GB 00422 - Edition 02 - March 00

The faults are indicated by red light indicator which signals:
- controller temperature increasing;
- pump temperature increasing;
- incorrect connection between pump and PC Board.

When it is “ON”, the motor is not supplied and the pump
doesn’t run.

Fault monitoring

Summary of Contents for Adixen ATP 100

Page 1: ...SERIES POMPES TURBOMOLECULAIRES TURBOMOLECULAR PUMPS Manuel utilisateur User s manual R alisation Publication Alcatel Vacuum Technology France Manuel Utilisateur Ed 11 Date 03 2007 R f rence 102710 10...

Page 2: ...xperienced subsidiaries distributors and agents The first step was the founding of Alcatel Vacuum Products Hingham MA in the United States thirty years ago reinforced today by 2 others US subsidiaries...

Page 3: ...in using it we advise you to read this manual carefully before any intervention on your pump and to pay particular attention to the equipment installation and start up section APPLICATIONS INDUSTRY C...

Page 4: ...versions A 30 ACT controllers control modes A 40 Accessories A 50 Integrable controllers A 60 Technical characteristics of pumps A 70 Dimensions of pumps A 80 Controller technical characteristics A 90...

Page 5: ...ical connections B 50 ACT 200 T and 600 T Remote Control connector wiring B 60 ACT 200 T and 600 T controller start up B 70 ACT 1000 T electrical connections B 80 ACT 1000 T Remote Control connector w...

Page 6: ...the pump using the controller front panel C 30 Displaying the data concerning ACT 200 T and 600 T pumping C 40 ACT 200 T and 600 T Remote Control connector Ext safety contact operation C 50 Controllin...

Page 7: ...aring replacement E 40 ATP 150 400 900 bearing replacement E 50 Cleaning parts E 60 Pump running in for ATP 80 100 150 400 E 70 Maintenance counters for ACT 200 T and 600 T controllers E 80 ATP 900 pu...

Page 8: ...omolecular pump operating principle A 20 The differents versions A 30 ACT controllers control modes A 40 Accessories A 50 Integrable controllers A 60 Technical characteristics of pumps A 70 Dimensions...

Page 9: ...ation with nitrogen purge HPC high pressure version for semiconductor applications ATP turbomolecular pumps ACT Controllers Main characteristics Alphanumeric display Membran keyboard Monitoring of tes...

Page 10: ...ange DN 63 ISO K DN 100 ISO K DN 100 ISO K DN 160 ISO K DN 200 ISO K DN 63 CF F DN 100 CF F DN 100 CF F DN 160 CF F DN 200 CF F natural convection x x Cooling type air x x x x x water x x x x x The pu...

Page 11: ...ctional diagram In molecular operation the gas molecules of the vacuum system arrive at the pump intake They are trapped between the rotating disks of the rotor and the stationary disks of the stator...

Page 12: ...rent types of speed the nominal speed which corresponds to the maximum rotation speed of the pump or 27000 rpm the reduced speed or STANDBY speed adjustable between 6000 and 27000 rpm The inverted dyn...

Page 13: ...provide increased bearing protection effective bearing protection when the purge is stopped during equipment calibration a reduction in the purge gas flow rate a long bearing service life in the prese...

Page 14: ...replicate the monitoring parameters available in the form of dry contacts The RS232 serial link is used to control and monitor the pump using a computer The RS485 serial link allows many pump install...

Page 15: ...control modes Alcatel Vacuum Technology France ATP User s Manual GB 00400 Edition 02 February 99 2 2 The ACT 600 T and ACT 1000 T controllers are 1 2 rack units START STOP STATUS STAND BY ENTER PREVI...

Page 16: ...r supply cut GB 00401 Edition 02 February 99 1 2 Pump accessories Exhaust Venting valves DN 25 DN 40 Powered and controlled by the ACT 101923 Powered by the mains and controlled by the ACT 240V 50 60H...

Page 17: ...T 1000 T Flange DN 1 DN 2 P N S S ALU Material 063268 063269 063270 063267 062900 068912 062901 068911 062902 062904 062905 062906 062903 062725 062907 062909 062908 062910 066659 066660 63 ISO K 25 I...

Page 18: ...gic control controlled by serial link or dry contacts and power supply ACT 200 T Brick only and all the necessary securities The Board version must be supplied with DC ACT 200 T Board ACT 200 T Brick...

Page 19: ...TP 80 and ATP 100 pumps in local or by remote control OEM Board P N P0022E4 Power supply cable OEM Board ATP 80 100 To connect the PC Board it is necessary to separately order specific connection cabl...

Page 20: ...haust flange ISO KF DN 25 DN 25 DN 25 DN 40 DN 40 Standard version characteristics ATP 80 ATP 100 ATP 150 ATP 400 ATP 900 Limit pressure measured acc to Pneurop standard mbar 5x10 9 5x10 9 5x10 10 8x1...

Page 21: ...osives versions Characteristics ATP 80 C ATP 100 C ATP 150 C ATP 400 C ATP 900 C Limit pressure without purge meas according to Pneurop standard mbar 5x10 9 5x10 9 5x10 10 8x10 10 5x10 10 Limit pressu...

Page 22: ...ard mbar 5x10 8 5x10 8 Limit pressure with purge meas according to Pneurop standard mbar 8x10 6 5x10 5 N2 purge flow rate SCCM 50 Maximum pressure at inlet in continuous operation mbar 1x10 1 2x10 2 M...

Page 23: ...5 4 12 1 13 119 9 1 8 24 1 118 102 H 55 8 49 5 C 6 7 7 77 3 C 73 6 113 45 3 F 113 12 R 2 6 2 F Inlet flange R H C F N D A DN 63 ISO K 130 151 5 102 95 DN 63 CF F 145 166 5 117 113 5 8 92 1 7 5 DN 100...

Page 24: ...23 210 7 28 132 49 8 87 4 85 4 91 5 12 1 26 2 1 8 7 5 175 9 97 122 1 16 116 35 5 13 4 103 2 134 15 5 221 7 132 148 5 130 12 17 2 20 4 5 Grease DN 25 ISO KF N2 PURGE DN 16 ISO KF DN 25 ISO KF DN 100 IS...

Page 25: ...17 2 189 5 F F Inlet flange R H C F E N T D A DN 100 ISO K 181 6 247 4 146 9 130 12 DN 100 CF F 183 1 248 9 148 4 148 5 16 16 8 6 130 2 3 75 DN 160 ISO K 151 1 216 9 116 4 180 12 DN 160 CF F 168 1 233...

Page 26: ...83 6 81 3 13 4 168 17 8 15 5 H 240 Inlet flange R H C F E N T D A DN 200 ISO K 145 8 211 5 118 5 240 12 DN 200 CF F 165 8 231 5 138 5 253 2 20 24 8 6 231 9 7 5 ASA 6 177 8 243 5 150 4 279 4 19 8 20 6...

Page 27: ...00 ISO K 181 6 247 4 148 4 130 12 DN 100 CF F 183 1 248 9 148 4 148 5 16 16 8 6 130 2 3 75 DN 160 ISO K 151 1 216 9 116 4 180 12 DN 160 CF F 168 1 233 9 133 4 198 16 20 8 6 181 1 6 ASA 6 161 1 225 9 1...

Page 28: ...8 2 15 5 81 3 8 6 6 1 4 9 6 Inlet flange R H C F E N T D A DN 200 ISO K 145 8 211 5 118 5 240 12 DN 200 CF F 165 8 231 5 138 5 253 2 20 24 8 6 231 9 7 5 ASA 6 177 8 243 5 150 4 279 4 19 8 20 6 241 3 2...

Page 29: ...122 4 128 4 ACT 600T PREVIOUS ENTER STAND BY STATUS STOP FAULT START 112 5 3 Electrical characteristics ACT 200T and ACT 600T Dimensions ACT 200T ACT 600T Characteristics ACT 200T ACT 600T Weight kg...

Page 30: ...Characteristics ACT 1000T Weight kg 8 5 Dimensions HxLxP mm 132 5x219x453 Power supply 100 120 V 200 240 V 50 60 Hz Maximum power W 800 Ambient operating temperature T 50 C Customer mains circuit bre...

Page 31: ...imensions Board Power supplying Nominal voltage 115 230 V 48 63 Hz Maximum current 5 8 A 3 A Maximum power 100 W Power supplying of ACT 200 T Brick 83 40 64 97 103 TURBO PUMP CABLE RS232 485 Marche Ar...

Page 32: ...ristics Power supplying of ACT 200 T Board ACT 200 T Board Dimensions Connector type Molex Series 30 69 P N 09 91 0700 equipped with 7 contacts P N 08 050 0106 DC voltage necessary to supply the board...

Page 33: ...RS485 SUBD 9pts m le Marche Arr t Entr e secteur Fusibles T250 6 3A 5x20 Integrable Brick Board controller technical characteristics ACT 600 T Brick Dimensions Board Power supplying ON OFF Fuses T250V...

Page 34: ...ristics Power supplying of ACT 600 T Board ACT 600 T Board Dimensions Connector type Molex Series 30 69 P N 09 91 0700 equipped with 7 contacts P N 08 050 0106 Voltages delivered by the board 72 V 4 A...

Page 35: ...ecure the power line with an external time delay fuse depending on the power supply 1 A for 100 115 V 0 5 A for 200 220 240 V Functions of these integrable controllers see B 140 Installed with M3 scre...

Page 36: ...trical connections B 50 ACT 200 T and 600 T Remote Control connector wiring B 60 ACT 200 T and 600 T controller start up B 70 ACT 1000 T electrical connections B 80 ACT 1000 T Remote Control connector...

Page 37: ...ned to comply with current EEC regulations Any modification of the product made by the user is liable to lead to non compliance with the regulations or even to put into doubt the EMC electromagnetic c...

Page 38: ...stance of 3 m from the product inlet The units containing control circuits are designed to guarantee normal safety conditions taking their normal operating environment into account use in rack In spec...

Page 39: ...ns The vacuum pump is also a compressor incorrect use may be dangerous Study the user manual before starting up the pump The access to the rotor of a turbomolecular pump with an unconnected intake is...

Page 40: ...the pump and its anchor point The equipment attachment devices should be sufficiently rigid to prevent potential risks in the event of failure of a rotary component or a violent shock on the pump exce...

Page 41: ...DN16 purge fitting A built in safety valve controls the pressure and guarantees a flow rate of 50 SCCM Install the screen filter or compact filter accessory on the pump connect the pump to the install...

Page 42: ...eel or copper pipe int diam 4 mm ext diam 6 mm supplied by customer The water flow rate is 0 2 to 1 l min for water at 15 C at an ambient temperature of 25 C It is recommended to use cooling water wit...

Page 43: ...tor Connector plug delivered with the controller Connect the RS232 485 serial link cable to the connector cable supplied by customer Fuse access 15 1 30 16 44 41 39 31 REMOTE CONTROL connector plug fa...

Page 44: ...the input controlled by voltage When a voltage is applied on these inputs the pump is running see terminal plug wiring The wiring of an external contact allows to signal an external safety when the co...

Page 45: ...2 41 40 39 OV OV 15 V Max 50 mA 10V 44 43 Used to monitor the selected parameter in the Set Analog output menu see B 70 A 0 10V analog output is used to monitor variations in certain pump parameters s...

Page 46: ...rs for the application using the various menus Parameter setting access Selection Validation used to access the parameter setting mode used to exit the various menus without validating the functions u...

Page 47: ...maximum operating time before regreasing the bearings Ball bearings life time counter Modify the access code Enter the access code and validate SPEED 6 75V 27000rpm I motor ATP 80 100 2 5A 10V ATP 15...

Page 48: ...erval Parity Data length Number of STOP bits Data separating character Number of controller in a multiple link None None Even Odd 8 bits 7 or 8 1 bit 1 or 2 44 comma 0 to 255 0 0 to 255 SPEED PARITY D...

Page 49: ...cuum Technology France ATP User s Manual 4 4 GB 00415 Edition 02 Feburary 99 Serial link setting continued Number of controller in a sequence in the case of the multiple link 0 0 to 255 ADDRESS RS 232...

Page 50: ...rial link cable to the connector cable supplied by customer Connect the venting valve accessory see B 90 If the unit is remote controlled make the various connections on the REMOTE CONTROL terminal bl...

Page 51: ...d for the pump to operate When the contact is closed the pump is started up and accelerates to reach its nominal or reduced speed depending on parameter settings If the contact is open the pump is no...

Page 52: ...tart 19 20 The contact is opened when a functional fault appears or when the STOP control is activated In the latter case the pump is reset to atmospheric pressure The contact can be used to control a...

Page 53: ...nfigure the parameters for the application using the various menus Parameter setting access Selection Validation used to access the parameter setting mode used to exit the various menus without valida...

Page 54: ...ctory configuration Alcatel reserved Modify the time before opening the air inlet valve Modify the air inlet valve opening time Change to storage mode the timer is blocked 6000 to 27000 tr mn 0 to 59m...

Page 55: ...nk Authorizes or does not authorize the echo of characters received on the link Data separating character Authorizes transmission at pre set intervals on the serial link 300 600 1200 2400 4800 9600 7...

Page 56: ...98 Configuring the display screen DISPLAY in revolutions minute in mA of the pump C of the controller C of the bearings hours of the controller hours The date and time The rotation speed The motor cur...

Page 57: ...1 2 3 4 5 GND Ground V RS 485 DTR Data terminal ready TD Transmission data Reception data RD Data set ready DSR V RS 485 6 7 8 9 Connection examples RS232 type serial link with a single controller Mu...

Page 58: ...r error e g non hexadecimal character Err3 context error Err4 checksum error Specifies the address of the device for networking adrADRaaa CR LF adr address of the device before the command aaa new add...

Page 59: ...a reply string S is a character whose ascii value is the checksum on 7 bits of all the character ascii values from the beginning of the reply string to the character before S The 8th bit of S MSB Mos...

Page 60: ...ored in user memory Enables DataLogger operation only with RS232 adrDLR CR LF adr sssss nnnnn iiii ttttt uuuu o www ppp vvv Returns current values sssss current speed in tr mn nnnnn speed set point in...

Page 61: ...g character with leading zeros condition 020 nnn 255 adr ok is the desired character adr ErrX if error Allows the user to distinguish between the first character in a command string for which cannot b...

Page 62: ...ssss hhhhh g ccccc eeeee ddddd pppp qqqq Returns current values nnnnn nominal speed set point in rpm sssss stand by speed set point in rpm hhhhh alert level for pump bearing maintenance in hours g reg...

Page 63: ...e use of the RPM command Used to select possible user choices adrOPT1 n CR LF choice of parameters on the analog output n 0 real pump speed n 1 pump current n 2 temperature of pump body n 3 temperatur...

Page 64: ...ally stored in user memory Saves the internal parameters in user s memory adrSAV CR LF adr ok Saves the current context except for running in cycles If this command is sent when the pump is being supp...

Page 65: ...s on the analog output a 0 real pump speed a 1 pump current a 2 temperature of pump body a 3 temperature of internal electronics u Returns the choice of temperature unit u 0 degrees Centigrade u 1 deg...

Page 66: ...time in hours adrSET11 eeeee CR LF electronic working time in hours adrSET12 g CR LF regreasing counter 0 to 2 max adrSET13 ddddd CR LF start delay max 14459s that is 240mn 59s adrSET14 pppp CR LF ti...

Page 67: ...not connected 0 running in 1 zzzzzz alert bits sssss current speed value in rpm 5 reserved future use iiii current value in mA 4 reserved future use www reserved pwm value 3 variable drive temperatur...

Page 68: ...2 1 ON 1 2 3 4 5 GND Screen Connect 7 to 8 if load impedance necessary between A et B B or V A or V 6 7 8 9 RS 485 Link 1 2 3 4 5 GND RS 232 Link Screen TD Terminal or computer RD Terminal or compute...

Page 69: ...resistor LED diode or indicator 5 to 30 V ON Fault Stand by Reserved GND Ext safety Mode Stand by ON OFF Analogical output Outputs Inputs Not used Output contacts signalisation They are open collecto...

Page 70: ...cessary for pump s starting High Status mode selected Low Impulse mode selected This mode is valid for the two following commands External safety 10 Mode 11 Stand by 12 Start Stop 13 Analog output 14...

Page 71: ...ication software which allows pump control and monitoring using a micro computer see C 61 Refer to Diagnosis and Troubleshooting of the manual Faults monitoring The potentiometer R 15 allows to set th...

Page 72: ...mode operation Detection of rotation Warning Electronic boards have been designed to comply with the electrical safety and electromagnetic compatibility rules but they cannot be the purpose of a certi...

Page 73: ...on Standard wiring A4 A5 output by contact ON OFF Without remote control outer safeties Buttons command The buttons of the front of panel are operational Pump Start Stop remote control by impulse cont...

Page 74: ...Board type 3 3 GB 00422 Edition 02 March 00 The faults are indicated by red light indicator which signals controller temperature increasing pump temperature increasing incorrect connection between pum...

Page 75: ...up Safety instructions C 10 Turbomolecular pump operation in a pumping application C 20 Controlling the pump using the controller front panel C 30 Displaying the data concerning ACT 200 T and 600 T pu...

Page 76: ...on There is a risk of seizing if the pump rotates in an axis perpendicular to its axis of rotation First pump start up Safety instruction for use When the pump is new or after a prolonged shut down of...

Page 77: ...top close E1 stop the primary pump stop the ATP stop the cooling system ATP PPM E1 Enceinte vider The chamber and pipes are at atmospheric pressure the pumps are switched off the valves are closed Cha...

Page 78: ...r start up the PPM primary pump start up the ATP water cooling system open the E2 valve The pressure in the chamber 1mbar the secondary pumping can be started up close E2 open E1 and E3 start up the n...

Page 79: ...0 C Bake out collar accessory operation Refill the chamber with air Shut off the pumps by closing the E3 valve E1 remains open and open an air inlet on the chamber Stop pumping The pumps are shut off...

Page 80: ...100 The rotation speed monitoring indicator lights go off The pump motor is no longer powered the pump decelerates FAULT FAULT FAULT Red lit The pump is faulty This fault is accompanied by an audible...

Page 81: ...f air the pump can be started up but the valve will be closed beforehand In the event of a power cut the valve is opened immediately without delay even if it has been programmed at a value other than...

Page 82: ...or replacing the bearings Displaying the data concerning the pumping 400H FAULT 1 D01 EXTERNAL SAFETY 420H WARNING 1 W01 ATH MAINTENANCE ENTER ENTER DISPLAY DISPLAY SETUP RUNNING IN STATUS VER FAULT...

Page 83: ...the red fault indicator light and inhibits the pump start up The output contact 7 8 is kept open Before pressing on START the external safety input is not controlled After pressing on START and during...

Page 84: ...ote Control connector Ext safety input operation Alcatel Vacuum Technology France ATP User s Manual GB 00428 Edition 02 February 99 2 2 Wiring example to control a roughing pump 31 39 8 7 41 32 Remote...

Page 85: ...ons are validated for ACT 200 200T 600T cabinet Board and Brick version Realize the necessary connections see B 110 RS 232 485 0 1 RS 232 485 TURBO PUMP CABLE REMOTE CONTROL Communication software is...

Page 86: ...Vacuum Technology France ATP User s Manual ATP User s Manual Maintenance Diagnosis and troubleshooting ACT 200 T and 600 T D 10 Diagnosis and troubleshooting ACT 1000 T D 20 ATP 80 100 150 400 Mainten...

Page 87: ...pump can be used without indicators No message Check the pump status 200T Imax 1 2 A 600T Imax 0 8 A Rotation speed 0 rpm The controller tempera ture is increasing and the warning ACT TEMP can appear...

Page 88: ...p maintenance time will be reached The controller temperature is high between 60 and 70 C for ACT 600 T 65 and 75 C for ACT 200 T but does not exceed the authorized limit Pump temperature is between 7...

Page 89: ...overcurrent or Hall sensor default Pump not connected Not used The controller stops the motor The pump can t restart Starting current too high The pump can t start up Test the external safety devices...

Page 90: ...wered sensor in the unit Overheat signal by the dimmer switch sensor in the unit Hall sensor default Motor out of order Pump no connected The controller is not powered Check the pump status 0RPM The c...

Page 91: ...ps the motor Valves are affected and pump can t restart The controller stops the motor Valves are not affected The controller stops the motor Valves are not affected Fault is displayed message The fau...

Page 92: ...incorrect The controller supplies power to the pump but the data are not saved The pump is not powered and generate power to the controller The defect appears briefly before the power cut The control...

Page 93: ...rd is not working The controller is help up The controller is blocked The controller is not working Momentaneaously the controller is not working Call the ALCATEL Customer Service Call the ALCATEL Cus...

Page 94: ...0 6000 4000 Relubrication schedule hours 2000 10 20 30 40 50 Housing temperature C In continuous operation at ultimate pressure no process In cycle less than 1 hour at maximum inlet pressure no proces...

Page 95: ...ation schedule hours 2000 10 20 30 40 50 Housing temperature C ATP 900 Example For use at 20 C housing temperature in continuous operation at ultimate pressure the maintenance frequency is 8000h t Use...

Page 96: ...900 Pumps lubrication E 30 ATP 80 100 bearing replacement E 40 ATP 150 400 900 bearing replacement E 50 Cleaning parts E 60 Pump running in for ATP 80 100 150 400 E 70 Maintenance counters for ACT 200...

Page 97: ...check the pumping conditions of the installation toxicity possible corrosion of the pumped gases Depending on the case we recommend to purge the pumping installation with dry nitrogen before any inte...

Page 98: ...ubrication syringe refer to the maintenance component references F 10 Avoid introducing foreign matter into the pump during these operations Lubrication must be performed with the pump switched off PU...

Page 99: ...ts until the syringe plunger comes to a stop against the black jumper Introduce the lubrication syringe needle into the drilled screw located at the center of the rotor until it comes to a stop agains...

Page 100: ...in the lubrication syringe refer to the maintenance component references F 10 Avoid introducing foreign matter into the pump during these operations Lubrication must be performed with the pump switch...

Page 101: ...replacing its o ring contained in the syringe packaging Unfasten the lubricating plug on the pumping cell side Repeat the same operations this time removing the black jumper from the syringe keep the...

Page 102: ...operation is used to fine tune the distribution of the grease in the bearings It consists of pump operation cycles at different speeds to distribute gradually and regularly the grease through the ball...

Page 103: ...e succes sive running in sequences The standby indicator flashes ENTER ENTER Selection of start stop running in program Orange lit Orange flashing Twice Let the pump operate 10 minutes at atmospheric...

Page 104: ...e DISPLAY menu is possible We advise you against stopping the running in procedure The controller displays and the program is stopped Remedy to the problem and start again the running in operation PRO...

Page 105: ...The user will have to perform the regreasings or ball bearing replacement and to increase the maintenance counter Example of operation with a maintenance frequency fixed to 5000h Counter 0 5000 1 1000...

Page 106: ...of the W01 GREASING message and lighting of Fault light W01 message erasing and Fault light extinction Choice of maintenance frequency 1 after 1st lubrication 2 after 2nd lubrication Access to MAINTEN...

Page 107: ...EARINGS counter is automatically reset to 0 after program 1 running in W02 message erasing and Fault light extinction Access to MAINTENANCE menu by pressing on key PREVIOUS to validate ENTER DISPLAY S...

Page 108: ...our Service Centers it is necessary to reset the TIME BEARINGS counter as follows PREVIOUS to validate ENTER DISPLAY SETUP RUNNING IN TIME BEARINGS ACTUAL 45000 TIME BEARINGS ACTUAL 45000 SET ANALOG...

Page 109: ...g has been started up Then do the following cycles STANDBY menu allows speed adjustment It consists of pump operation cycles at different speeds to distribute gradually and regularly the grease throug...

Page 110: ...ment 1st phase 6 cycles START STOP to 6000 RPM and leave running for 4h to 6000 RPM 2nd phase 2 cycles START STOP to 10000 RPM and leave running for 4h to 10000 RPM 3rd phase 2 cycles START STOP to 16...

Page 111: ...er will have to perform the regreasings or ball bearing replacement and to increase the BEARING MAINT and BEARING LIMIT counters Example of operation with a maintenance frequency fixed to 5000h 0 5000...

Page 112: ...STOCK PARAMETERS DATE SPEED START BEARING RS232 AN OUT RESET AIR INLET STOCK BEARING 5000H MAINT 0 LIMIT 5000 BEARING 5000H MAINT 1 LIMIT 5000 Display of the D37 GREASING BEARING message and lighting...

Page 113: ...NLET STOCK PARAMETERS DATE SPEED START BEARING RS232 AN OUT RESET AIR INLET STOCK BEARING 15000H MAINT 2 LIMIT 15000 BEARING 15000H MAINT 0 LIMIT 15000 Display of the D24 message and lighting of Fault...

Page 114: ...GB 00450 Edition 08 February 98 Chapter F Alcatel Vacuum Technology France ATP User s Manual ATP User s Manual Maintenance components 1 1 Maintenance parts F 10...

Page 115: ...e P N ATP 80 100 056993 ATP 150 ATP 400 900 101924 Pump type P N ATP 80 100 ATP 150 101930 ATP 400 900 Pump type P N ATP 80 100 062698 ATP 150 063078 ATP 400 063076 ATP 900 062992 1 Seal kit 2 Tool ki...

Page 116: ...after the pump serial number and in compliance with the table below in order to obtain a correct assembly set Shaft diam reference pumping cell side side opposite the cell 3 Ceramic bearing kit The k...

Page 117: ...V 50 60 HZ 200V 50 60 HZ 115V 50 60 HZ 100V 50 60 HZ 12V DC ACT 600T 6 3A Description Fuse 5 x 20 T 250V Fuse 5 x 20 T 250V Fuse 6 x 32 T 250V F 10 Alcatel Vacuum Technology France ATP User s Manual 3...

Page 118: ...GB 00465 Edition 08 February 98 Chapter G Alcatel Vacuum Technology France ATP User s Manual ATP User s Manual 1 1 Appendix Pumping curves G10...

Page 119: ...ual 0 500 400 300 200 100 1000 900 800 700 600 10 5 10 6 10 4 10 3 10 2 10 1 1 10 3 10 4 10 2 10 1 1 10 10 2 Inlet pressure Pa Inlet pressure mbar Pumping speed l s Pumping speed versus inlet pressure...

Page 120: ...5 10 4 10 3 10 2 10 1 1 10 3 10 6 10 4 10 2 10 1 1 10 102 Pumping speed versus inlet pressure Gas N2 ATP900 C ATP400 C ATP150 C ATP100 C ATP80 C Upper limits for continuous operation Water cooled pump...

Page 121: ...Manual 0 Inlet pressure Pa Inlet pressure mbar Pumping speed l s 0 500 400 300 200 100 1000 900 800 700 600 10 4 10 3 10 2 10 6 10 5 10 1 1 10 3 10 4 10 2 10 1 1 10 10 2 Pumping speed versus inlet pr...

Page 122: ...Vacuum Technology ATP User s Manual Inlet pressure Pa Inlet pressure mbar Flow rate sccm 1 10 10 2 103 104 10 5 10 4 10 3 10 2 10 1 1 101 10 3 10 2 10 1 1 10 10 2 10 3 Flow rate versus inlet pressure...

Page 123: ...l 81 3 6431 7130 Fax 81 45 544 0049 KOREA Alcatel Vacuum Technology Korea 447 Banwol dong Hawsung si 445 330 Kyungki do South Korea Tel 82 031 206 6277 Fax 82 031 204 6279 NETHERLANDS ALCATEL Vacuum T...

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