Agilent Technologies 969-8888, Instruction Manual

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TECHNICAL INFORMATION
92/107 87-901-011-01
N. Read/
Write
Data
Type
Description Admitted
Values
157 R/W L Gas load
type
0 = Ar
1 = N
2
(default = 1)
167 R/W L Stop Speed
Reading
0 = NO
1 = YES
(default = 0)
200 R N Pump
current
mA
201 R N Pump
voltage
V
202 R N Pump power
consumption
W
203 R N Driving fre-
quency in
Hz
Hz
204 R N Pump tem-
perature
°C
205 R N Pump status Stop = 0
Waiting intlk = 1
Starting = 2
Auto-tuning = 3
Braking = 4
Normal = 5
Fail = 6
206 R N Error code Bit description:
see the following
figure
211 R N Controller
temperature
n. 1
°C
216 R N Pump body
temperature
°C
222 R N Controller
temperature
n. 2
°C
223 R N Flow meter
reading
sccm
300 R N Cycle time
in minutes
(zeroed by
the reset
command)
0 to 999999
301 R N Cycle num-
ber (zeroed
by the reset
command)
0 to 9999
302 R N Pump life in
hours (ze-
roed by the
reset com-
mand) 0 to 999999
303 R N High Power
Start cycles
number
310
to
399
Reserved to Varian service
N. Read/
Write
Data
Type
Description Admitted
Values
400 R A CRC
EPROM
(QE)
QE5XXXX
(where “XXXX”
are variable)
402 R A CRC Pa-
ram. (PA)
PA5XXXX
(where “XXXX”
are variable)
502 Reserved to Varian service
503 R/W N RS 485 ad-
dress 0 to 31
(default = 0)
504 R/W L Serial type
select
0 = RS 232
1 = RS 485
(default = 0)
7 6 5 4 3 2 1 0
TOO HIGH LOAD NO CONNECTION
SHORT CIRCUIT PUMP OVERTEMP.
OVERVOLTAGE CONTROLL. OVERTEMP.
VERIFY LINE SELECT POWER FAIL
Window N. 206 Bit Description
MONITORR
An integrated MoniTorr card is suitable for the
Turbo-V 3K-G. This feature allows the pump’s vi-
bration spectra acquisition and download. The
necessary hardware is totally integrated into the
controller and consists of one PCB card and one
accelerometer fixed on the controller’s side.
The MoniTorr card allows to:
•
perform programmed maintenance on the tur-
bopump
•
continuously monitor the turbopump operating
conditions
•
identify the wear conditions of one or two bear-
ings.