Agilent Technologies 969-8888, Instruction Manual

Page: 87 / 116

TECHNICAL INFORMATION
81/107 87-901-011-01
0
100
200
300
400
500
600
10 15 20 25 30 35 40 45 50
T body [°C] (Win 216)
P
o
w
e
r Limit Ap
plie
d [W
]
Nitrogen
Argon with Purge Open
Argon with Purge Closed
Fail
"Pump Overtemp"
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01
μ
m.
The pump can operate in any position and must be
supported on the high vacuum flange. The con-
nection of the forevacuum on the side of the pump
is a KF 40 NW flange.
Controller Description
The dedicated controller is a solid-state frequency
converter which is driven by a single chip micro-
computer.
The controller can be operated by a remote host
computer via the serial connection (a Windows-
based software is available as an option), or by the
remote I/O connector.
At every power-up the controller is in “Remote
Mode” of operation and accepts only commands
from J1 remote I/O connector. To put it in “Serial
Mode” of operation please refer to the serial com-
mand table.
TECHNICAL SPECIFICATION
Pumping speed
(without inlet screen)
N
2
:
Ar:
He:
2200 l/s
2050 l/s
1900 l/s
Compression ratio
N
2
:
Ar:
He:
> 10
7
> 10
8
6 x 10
3
Base pressure with
recommended
forepump 10
-8
mbar
10
-8
Torr
(
According to standard DIN 28
428, the base pressure is that
measured in a leak-free test
dome, 48 hours after the comple-
tion of test dome bake-out, with a
Turbopump fitted with a CFF
flange and using the recom-
mended pre-vacuum pump)
Inlet flange ISO 250 F