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Agilent Technologies 969-8888, Instruction Manual

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INSTRUCCIONES DE USO 

 16/107 

87-901-011-01 

Indicaciones de Seguridad 

 

para 

 

Bombas Turbomoleculares 

 
 

Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen 
una elevada cantidad de energía cinética debido a la alta velocidad de rotación en 
combinación a la masa específica de sus rotores. 
 
En el caso de un daño del sistema, por ejemplo por un contacto entre el rotor y el estator o 
por una rotura del rotor, la energía de rotación podría ser liberada. 
 
 

¡PELIGRO! 

Para evitar daños a los equipos y prevenir lesiones a los operadores, es 
necesario seguir atentamente las instrucciones de instalación descritas 
en el presente manual! 

 

Summary of Contents for 969-8888

Page 1: ...NL BEDRIJFSHANDLEIDING DK INSTRUKSTIONSBOG S BRUKSANVISNING N INSTRUKSJON MANUAL FIN OHJEK SIKIRJA GR ODHGIES CRHSEWS H FELHASZN L I K ZIK NYV PL PODRECZNIK INSTRUKCJI CZ N VOD K POU IT SK N VOD NA O...

Page 2: ...Turbo V 3K G...

Page 3: ......

Page 4: ......

Page 5: ...ESCRIPTION OF THE TURBO V 3K G 80 Pump Description 80 Controller Description 81 TECHNICAL SPECIFICATION 81 TURBO V 3K G OUTLINE 84 INTERCONNECTIONS 85 J1 REMOTE I O 85 CONTROLLED VENT PROCEDURE 87 STO...

Page 6: ...operation and state machine 98 Diagnostic management 103 Diagnostic buffer 103 INLET SCREEN INSTALLATION 104 WATER COOLING CONNECTION 104 VENT VALVE INSTALLATION 105 PUMP PURGING AND VENTING 105 Purge...

Page 7: ...alla alta velocit di rotazione in unione alla massa speci fica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore l energia...

Page 8: ...a da 20 C a 70 C umidit relativa da 0 a 95 non condensante il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta il tempo d...

Page 9: ...61010 1 Per l installazione degli accessori opzionali vedere Technical Information USO In questo paragrafo sono riportate le principali procedure ope rative Prima di usare il sistema effettuare tutti...

Page 10: ...di frenata o di Stop o di Wai ting for interlock lampeggiante velocemente periodo di circa 200 ms con dizione di errore Come arrestare la Turbo V 3K G Per arrestare la pompa si pu usare uno dei segue...

Page 11: ...Comunit Eu ropea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata S...

Page 12: ...ndung mit dem spezifischen Ge wicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k...

Page 13: ...n 20 C bis 70 C Relative Feuchtigkeit von 0 bis 95 nicht kondensie rend Der Kunde hat die Turbomolekularpumpen nach dem Emp fang bei Erstinbetriebnahme stets im Modus Soft Start in gangzusetzen Die La...

Page 14: ...n soda kein Teil unter Spannung zug nglich ist Sicherstellen da die Isolierung der an den Turbo V 3K G angeschlossenen Vorrichtung auch bei einer Einzelst rung ausreichend isoliert wie es von der Rich...

Page 15: ...erf r vorgesehenen Schelle zu befestigen siehe nachstehen de Abbildung Dieses Kabel und Stecker zusammen mit einer korrekt an der Erde angeschlossenen Steckdose verwenden um Stromst e zu vermeiden und...

Page 16: ...Vorschriften zu erfolgen ENTSORGUNG Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebrach...

Page 17: ...grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation...

Page 18: ...voir lieu dans les conditions am biantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 non condensante A la premi re utilisation les pompes turbomol culaires doivent toujours tre mises e...

Page 19: ...1 Pour l installation des accessoires en option se reporter Technical Information UTILIZATION Ce paragraphe pr sente les principales proc dures op ration nelles Avant d utiliser le syst me effectuer t...

Page 20: ...e allum e fixe la pompe est en rotation normale clignote lentement p riode d environ 400 ms le syst me est en tat de rampe de freinage de stop ou d attente in terlock clignote rapidement p diode d env...

Page 21: ...naut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s...

Page 22: ...debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del...

Page 23: ...funcionamiento por primera vez el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente ATENCI N En caso de superarse por cualquier mot...

Page 24: ...opcionales v ase Technical Information USO En este apartado se citan los procedimientos operativos principales Antes de usar el sistema realizar todas las conexiones el ctricas y neum ticas Durante e...

Page 25: ...0 ms aproximadamente el sistema est en estado de rampa o de frenado o de stop o de waiting for iterlock parpadea r pidamente periodo de 200 ms aproximadamente condici n de error C mo detener la Turbo...

Page 26: ...obre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenc...

Page 27: ...energia cin tica devida alta velocidade de rota o unida massa espec fica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do ro...

Page 28: ...temperatura de 20 C a 70 C umidade relativa de 0 a 95 n o condensante ao acionar as bombas turbomoleculares pela primeira vez o cliente deve ativ las sempre em modalidade Soft Start o tempo m ximo de...

Page 29: ...instala o dos acess rios opcionais consultar Technical Information UTILIZA O Neste par grafo s o descritos os principais procedimentos operacionais Antes de usar o sistema efectuar todas as liga es el...

Page 30: ...operacionais do sistema acesa fixa a bomba funciona normalmente intermit ncia lenta per odo de aprox 400 ms o sistema est em estado de acelera o ou de paragem ou de Stop ou de waiting for interlock in...

Page 31: ...de Europeia indica que o produto no qual est aplicado N O deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Port...

Page 32: ...e energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de ro...

Page 33: ...van 20 C tot 70 C relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer i...

Page 34: ...g toegankelijk is Controleer of de inrichting verbonden met de Turbo V 3K G goed ge soleerd is ook in geval van een enkele storing zoals voorzien door de norm EN 61010 1 Zie Technical Information voor...

Page 35: ...zijn knipperen de werkcondities van het systeem aan brandt onafgebroken de pomp draait normaal knippert langzaam periode van circa 400 ms het systeem is in de status oploop of remmen of stop of waitin...

Page 36: ...aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht cont...

Page 37: ...n h je omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan...

Page 38: ...e opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C relativ fugtighed fra 0 til 95 ikke kondenserende Kunden skal altid starte d...

Page 39: ...enkeltfejl som angivet i normen EN 61010 1 Der henvises til bilaget Technical Information for oplysninger vedr rende installation af ekstraudstyret ANVENDELSE Dette afsnit beskriver de vigtigste drif...

Page 40: ...ved hj lp af I O kontakten se afsnittet J1 REMOTE I O i bilaget Technical Information 3 Overf r et fjernstyret stopsignal ved hj lp af den serielle gr nseflade RS232 485 se afsnit RS232 485 Communica...

Page 41: ...rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsener...

Page 42: ...standa och drifts kerhet f r Varian turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomr de 20 C till 70 C Relativ fuktighet...

Page 43: ...IP 54 isoleringen Turbo V 3K G r utrustad med kontaktdon f r ing ngarna utg ngarna och f r den seriella kommunikationen som ska anslutas till de externa kretsarna s att det inte g r att komma t n gon...

Page 44: ...lla EG standardernas krav Systemet r utrustat med en gr n LED f r statussignal Den gr na lysdioden LD1 p underdelen av TURBO V 3K G anger genom frekvensen av dess blinkningar hur systemet fungerar fas...

Page 45: ...odukten p vilken symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rekommende...

Page 46: ...energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller...

Page 47: ...bomolekyl re pumper m f lgende anvisninger f lges Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra 0 til 95 ute...

Page 48: ...r spenning er tilgjengelige Forsikre deg om at isoleringen av anordningen koplet til Turbo V 3K G har en egnet isolering ogs under forhold med en enkel feil i f lge EN 61010 1 standarden For installas...

Page 49: ...lger med 2 Gi et fjernstyrt stoppsignal med I O kontakt se avsnittet J1 REMOTE I O i vedlegget Technical Information 3 Gi et fjernstyrt stoppsignal med seriegrensesnittet RS232 485 se avsnittet RS232...

Page 50: ...eutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa py rimisenergi...

Page 51: ...rian turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C suhteell...

Page 52: ...IP54 eristyksen Turbo V 3K G laitteissa on liittimet sis ntuloille ulostuloille sek sarjakytkenn lle jotka on kytkett v ulkoisiin j rjestelmiin siten ettei mihink n j nnitteen alaisena olevaan osaan...

Page 53: ...1 Poista ohessa toimitettu I O liitin 2 Anna STOP et signaali I O liittimell ks Technical Information liitteen kappale J1 REMOTE I O 3 Anna STOP et signaali RS232 485 sarjaliit nn n kautta ks Technic...

Page 54: ...ODHGIES CRHSHS 48 107 87 901 011 01 KINDUNOS...

Page 55: ...okal soun bl bej sth suskeu SHMEIWSH Oi shmei seij peri coun shmantik j plhrofor ej pou coun apospaste ap to ke meno APOQHKEUSH Gia na egguhqe to M gisto ep pedo leitourgik thtaj kai axiopist aj twn S...

Page 56: ...v tavsh Bebaiwqeivte ovti h movnwsh th sundemevnh diavtaxh ston Turbo V 3K G evcei mia ka tavllhlh movnwsh akovma kai se katavstash monhv blavbh ovpw problevpetai apov ton kanonismov EN 61010 1 Gia th...

Page 57: ...amathvsete se sunqhvke evktakth anavgkh to Turbo V 3K G prevpei na bgavlete to kalwvdio trofodovthsh apov ton controller Profibus SUNTHRHSH To Turbo V 3K G de crei zetai kamm a sunt rhsh Opoiad pote e...

Page 58: ...ODHGIES CRHSHS 52 107 87 901 011 01 logo WEEE WEEE...

Page 59: ...val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor ll r sz rintkez si hib ja vagy ak r a forg r sz sz tt r se eset n a forg si ener...

Page 60: ...at sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni h m rs klettartom ny 20 C 70 C relat v p ratartalom 0 95 nem kondenz l A turbomolekul ris szivatty kat mindig l gyan kell...

Page 61: ...z RN 61010 1 direkt va szerint Opcion lis tartoz kok telep t s hez v lassza a Technical Informationt HASZN LAT Ez a bekezd s r szletezi az alapvet zemeltet si elj r sokat V gezze el az sszes elektromo...

Page 62: ...formation f ggel k J1 REMOTE I O bekezd se 3 t voli stop jel ad sa az RS 232 485 soros interf szen kereszt l l sd Technical Information f ggel k RS 232 485 Communication Description V szle ll t s A Tu...

Page 63: ...n bardzo wysok pr dko ci obrot w razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem lub z powodu p kni cia wirnika energia obrotowa...

Page 64: ...antowania najwy szego poziomu funkcjonalnego i niezawodno ci pomp turbomolekularnych Varian musz by przestrzegane nast puj ce zalecenia podczas transportu przesuni cia i magazynowania pomp nie mog by...

Page 65: ...lacji lub nadnapi cia przewidzianej przez norm EN 61010 1 Dlatego te pod czy urz dzenie do linii zasilania kt ra spe ni te wymogi Wykorzysta znajduj ce si w wyposa eniu kontrokonektory dla zapewnienia...

Page 66: ...ezpieczenia IP 54 nale y u ywa wy cznie konektor w dostarczonych razem z pomp Dla kabla zasilania nale y stosowa tylko PN 969 9957 lub 969 9958 i zamocowa kabel do kontrolera odpowiednim wspornikiem p...

Page 67: ...w meritum sprawy PRZETWORSTWO ODPADOW Objasnienie znajdujacego sie na etykiecie znaczenia logo WEEE Uzyty ponizej symbol jest zgodny z wymogiem zarzadzenia WEEE Unii Europejskiej Symbol ten prawomocn...

Page 68: ...odu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefuk nosti nap kontaktu rotoru anebo statoru nebo p i zhroucen roto...

Page 69: ...C a 70 C Rozp t vlhkosti 0 a 95 bez sr en turbomolekul rn v v vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln skladovatelnost turbomolekul rn v v vy je 10 m s c ode dne doru en VAROV N Pok...

Page 70: ...chy podle sm rnice EN 61010 1 Chcete li informace o dopl kov m p slu enstv viz Technical Information POU IT Tento odstavec popisuje podrobnosti z kladn ch pracovn ch postup P ed pou it m syst mu prove...

Page 71: ...tion 3 p ive te zastavovac sign l ze vzd len ho m sta prost ednictv m s riov ho rozhran RS 232 485 viz odstavec Popis komunikace RS232 RS 485 v p loze Technical Information Nouzov zastaven Chcete li v...

Page 72: ...ve k mno stvo kinetickej energie v aka vysokej ot avej r chlosti v kombin cii s konkretn m objemom ich rotorov V pr pade syst movej poruchy napr pri kontaktu rotora statora alebo pri zr caniu rotora s...

Page 73: ...maxim lny a spo ahliv v kon dodr iavajte nasleduj ce pokyny neprekra ujte nasleduj ce pecifik cie prostredia po as prevozu pren ania a uchov vania v vev rozsah tepl t 20 C a 70 C rozsah relat vnej vl...

Page 74: ...rebn pripoji ku zdroju nap jania ktor vyhovuje uvedenej kateg rii Na zaistenie izol cie pod a IP 54 pou ite protikonektory Zariadenie Turbo V 3K G m konektory pre vstup v stup a konektory s riovej kom...

Page 75: ...1 na z kladnom elnom paneli Turbo V 3K G base ukazuje frekvenciou blikania sp sob innosti syst mu iadne blikanie v veva norm lne rotuje pomal blikanie interval asi 400 ms syst m je v niektorom z t cht...

Page 76: ...WEEE Tento symbol platn iba pre t ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame p...

Page 77: ...no kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko spro...

Page 78: ...vodil Pri po iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih specifikacij temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti 0 do 95 brez kondenza Turbomolekularne rpa...

Page 79: ...ilju ite na napetost ki je v vskladu z zgornjo kategorijo Uporabljajte proti spajala ki so v konfekciji za izolacijo IP 54 Naprava Turbo V 3K G ima vhodne izhodne in serijske priklju ke ki jih je treb...

Page 80: ...anje perioda pribli no 200 ms Napaka Zaustavljanje sistema Za zaustavljanje sistema lahko uporabite eno od naslednjih metod 1 priklju ite prilo en I O priklju ek 2 oddajte oddaljeni signal za zagon pr...

Page 81: ...rgy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational...

Page 82: ...should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 95 non condensing the turbomolecular pumps must be always soft started when received and operated for the first time...

Page 83: ...has Input Output and serial communication connectors that must be connected to external circuits in such a way that no electrical part is accessible Be sure that the insulation of the device connecte...

Page 84: ...l The green LED located on the Turbo V 3K G base front panel indicates with its flashing frequency the system operating condi tions with no flashing the pump is normally rotating slowly flashing perio...

Page 85: ...ountries of the European Com munity indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste coll...

Page 86: ...in an anticlockwise direction when viewed from the high vacuum flange end The turbine rotor is supported by permanently lu bricated high precision ceramic ball bearings in stalled on the forevacuum s...

Page 87: ...ler can be operated by a remote host computer via the serial connection a Windows based software is available as an option or by the remote I O connector At every power up the controller is in Remote...

Page 88: ...fuse 2 x 12 5 A Compliance with EN 55011 Radio disturbance characteristics EN 61000 3 2 Limits for har monic current emissions EN 61000 3 3 Limitation of volt age changes voltage fluctua tions and fl...

Page 89: ...03 1 0E 02 1 0E 01 Inlet Pressure mbar Pumping speed L sec N2 He Ar Typical Pumping Speed curves 1 E 00 1 E 01 1 E 02 1 E 03 1 E 04 1 E 05 1 E 06 1 E 07 1 E 08 1 E 09 1 00E 03 1 00E 02 1 00E 01 1 00E...

Page 90: ...TECHNICAL INFORMATION 84 107 87 901 011 01 TURBO V 3K G OUTLINE The following figure shows the Turbo V 3K G outlines dimensions are in mm inches...

Page 91: ...mp INTERLOCK input signal to confirm the pump ro tation With the supplied cover connector the INTERLOCK signal is connected to the 24 Vdc pin and the INTERLOCK signal to the GROUND pin in this conditi...

Page 92: ...active open More over if the reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of the threshold value to avoid bouncing For example reference quantity f...

Page 93: ...w 167 If activated all the related functions set point out output voltage will follow the frequency read ing ACTIVE STOP This function allows the user to brake the pump without venting This function m...

Page 94: ...the T Plus software 969 9883 is available op tional SERIAL CABLE INSTALLATION In order to maintain the IP 54 protection level please use a certified IP 54 connector or the one provided by Varian RS 2...

Page 95: ...haracter The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same...

Page 96: ...nation PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 0...

Page 97: ...ump life cycle time cycle num ber reset To reset write 1 N Read Write Data Type Description Admitted Values 111 R W L Analog out put type output volt age signal proportional to frequency or power 0 fr...

Page 98: ...o 999999 303 R N High Power Start cycles number 310 to 399 Reserved to Varian service N Read Write Data Type Description Admitted Values 400 R A CRC EPROM QE QE5XXXX where XXXX are variable 402 R A CR...

Page 99: ...ter P N 9699258 and 9699259 which operate as a gate way from 485 to 232 link The controller provides the serial address of the MoniTorr option Every controller must therefore have a different serial a...

Page 100: ...to download the vibra tion files In order to permit a correct analysis a pe riodically an archive file every 1 or 2 weeks downloading is recommended Interconnections The following figure shows the Mon...

Page 101: ...r monitor NOTE It is suggested that you maintain the proposed di rectory and path so as to facilitate the identification of the files generated by the system Click on the figure to continue with the i...

Page 102: ...ers The operator can change the configuration of the Monitorr parameters To change the configurations select one of the Monitorrs connected to the network by positioning the cursor in the row of the M...

Page 103: ...t is reported in the following figure Please in order to obtain best per formance use profibus certified cables CAUTION To maintain the IP 54 protection level use the appropriate connector provided wi...

Page 104: ...Interface set up SRC_ADDR Search for the controller serial address IDENTIFY Identify controller model and protocol DATA_EX Regular data exchange The two machines continuously share I O data with the r...

Page 105: ...not drive the set point out 103 11 2 0 2 s 0 65535 0 inf Vent Valve Opening Delay Set the delay time between the stop command and vent opening Valid only in purge vent auto mode Parameter Buffer byte...

Page 106: ...ctivated by the user after first run up activate this function only if the pump has been stopped for at least 3 months 1 on 100 B4 Active Stop 0 off after a stop command the controller stop driving th...

Page 107: ...Temperature Read the pump body temperature close to the water circuit If 42 C the controller goes in fail and the pump is stopped 216 23 1 C 0 100 Controller Power Section Temperature Read the control...

Page 108: ...on the target speed In Buff byte 8 is low speed Out Buff byte 3 001 B2 Soft Start Status 0 on 1 off this function is active at first pump run up and can t be deactivated by the user after first run up...

Page 109: ...ady for data exchange B2 cfg fault configuration data doesn t match B3 ext diag slave has external diagnostic data B4 not supported slave doesn t support re quested function B5 invalid slave response...

Page 110: ...installed to pre vent thermal radiation heating the high vacuum flange on the pump The maximum temperature allowed for the inlet flange is 80 C WATER COOLING CONNECTION The pumping system is supplied...

Page 111: ...described in the following points 1 Close the process gases flowing into the sys tem before sending the STOP signal to the Turbo V 3K G pump 2 Leaving the Turbo V 3K G pump and the backing pump runnin...

Page 112: ...reaming PUMP USED IN PRESENCE OF MAGNETIC FIELDS Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power...

Page 113: ...ns cable NEMA Plug 3m long 969 9958 Mains cable European Plug 3m long 969 9957 Serial cable and T Plus Software 969 9883 Inlet screen DIN ISO 250 969 9350 Protocol Converter RS 232 RS 485 wire 969 925...

Page 114: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Page 115: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Page 116: ...1263 Toll Free 0120 655 040 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico...

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