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Series 613

INSTALLATION

984360EC

Edition 12.08.2022

57/149

5.12.7.6

Interface RS232/RS485

Sub Group

Parameter

ID [hex]

Data Type Acc

Unit Min

Max Description

Operation Mode

A1010000

SINT8

0:RS232
1:RS485
2:Service Interface Over RS232

Settings

Baud Rate

A1110100

SINT8

0:1200
1:2400
2:4800

3:9600
4:19200
5:38400

6:57600
7:115200

Data Bit Length

A1110200

SINT8

0:7
1:8

Stop Bit

A1110300

SINT8

0:1
1:2

Parity Bit

A1110400

SINT8

0:None
1:Even
2:Odd

Topology

A1110800

SINT8

Only used if Operation Mode = RS485
0:Full Duplex
1:Half Duplex

Network

A1110900

SINT8

Only used if Operation Mode = RS485
0:Multiple Devices
1:Point to Point

Address

A1110A00

UINT8

255 Only used if Operation Mode = RS485

Command Set

A1110500

SINT8

0:IC
1:PM
2:PM V2

3: Tylan
4: Tylan Type 1
5: Tylan Type 2

Command Termination

A1110B00

SINT8

0: Carriage Line
Feed
1: Line Feed
2: Carriage Return

R A Answer

Only for Command Set = IC,PM, PMV2
0: Standard
1: i:76

Second Answer

Only for Command Set = PM, PMV2
0:Off
1:Pos/Prs
2:Pos

Learn Answer

Only for Command Set = PM, PMV2
0:Immediatelly
1:Learn End

Command t Mode

Only for Command Set = PM, PMV2
0:Without Ramp Time
1:With Ramp Time

Tylan M1

Only for Command Set = Tylan, Tylan Type 2
0:None
1:Gain Factor/P-Gain

Tylan X1

Only for Command Set = Tylan, Tylan Type 2
0:None
1:Ramp Time/I-Gain

Tylan J3

Only for Command Set = Tylan, Tylan Type 2
0:None
1:Restart

Tylan V

Only for Command Set = Tylan Type 1, Type 2
0:None
1:Pressure Control Selector

Compound

Commands

1[20]

A10A0100

UINT32

Parameter compilation for set and/or get several
Parameters with one command
Array of 20 Parameters

2[20]

A10A0101

UINT32

3[20]

A10A0102

UINT32

4[20]

A10A0103

UINT32

Содержание 613 Series

Страница 1: ...25 320 mm I D 1 12 This manual is valid for the valve ordering number s 613 GH 2 sensor inputs analog outputs 613 AH 2 sensor inputs analog outputs 15V SPS 613 HH 2 sensor inputs analog outputs PFO 61...

Страница 2: ...duplicated or distributed without written permission from VAT Offenders are liable to pay damages The original VAT firmware and updated state of the art versions of the VAT firmware are intended for u...

Страница 3: ...packing 14 5 3 Installation into the system 15 5 3 1 Installation Hints 16 5 3 2 Installation space condition 16 5 3 3 Admissible forces 17 5 3 4 Admissible forces at controller 18 5 3 5 Tightening to...

Страница 4: ...5 13 4 Zero Adjust 82 5 13 5 Logarithmic Pressure 83 5 14 Power Connector Digital IO 84 5 14 1 Digital Input 84 5 14 2 Digital Output 85 6 Operation 86 6 1 Access Mode 87 6 1 1 Overview 87 6 1 2 Remo...

Страница 5: ...port 141 12 Disposal 142 13 Spare parts 143 13 1 ISO KF for DN 25 50 mm 144 13 1 1 Drawing ISO KF 144 13 1 2 ISO KF valve unit aluminum blank without heating 145 13 1 3 ISO KF valve unit stainless ste...

Страница 6: ...duct is a Butterfly control valve for downstream pressure control in vacuum systems Use product for clean and dry vacuum applications only Other applications are only allowed with the written permissi...

Страница 7: ...Series 613 DESCRIPTION OF PRODUCT 984360EC DOCX Edition 2022 08 12 7 149 1 7 Technical data 1 7 1 Control and actuating unit See product data sheet 1 7 2 Valve unit See product data sheet...

Страница 8: ...ion Operating Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system They must be stored together with the other documentation and acce...

Страница 9: ...ations WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the described work 2 4 Safety labels Label Par...

Страница 10: ...lement and varies the conductance of the valve opening The integrated controller 1 calculates the required plate position to achieve the setpoint pressure See also principle drawing on chapter Connect...

Страница 11: ...re differences Example Downstream control 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable 6 Controller and actuator 7 Cable to remote control unit 8 Cable to power supply 9 HV...

Страница 12: ...s is admitted at the same time the pressure can be controlled in two ways 1 Downstream control standard The pressure is controlled by changing the conductance of a control valve between pump and proce...

Страница 13: ...C Edition 12 08 2022 13 149 5 Installation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the descri...

Страница 14: ...f pedestal Lift valve at valve body out of transport case Make sure that the supplied products are in accordance with your order Inspect the quality of the supplied products visually If it does not me...

Страница 15: ...rect handling Only qualified personal are allowed to install the valve into the vacuum system NOTICE Wrong connection Wrong connection may result in damage of controller or power supply Connect all ca...

Страница 16: ...o the valve than indicated under chapter Admissible forces Make sure that enough space is kept free to do preventive maintenance work The required space is indicated on the dimensional drawing Control...

Страница 17: ...eformation of the valve body and to malfunction of the valve Do not higher force the valve body as specified The following forces are admissible Valve size Axial tensile or compressive force FA Bendin...

Страница 18: ...l could be permanently damaged Do not pushing shocking load or stressing the valve controller Do not deposit anything at valve controller The admissible force at valve controller in regards to the ped...

Страница 19: ...eal manufacturer 5 3 5 1 ISO KF Clamping connections Clamping chain example Valve size ISO KF ISO KF e g 31032 KASA 0001 31034 KASA 0001 recommended tightening torque Nm recommended tightening torque...

Страница 20: ...ISO F ISO F max tightening torque Nm max tightening torque lbs ft DN63 2 8 10 6 8 DN80 3 8 10 6 8 DN100 4 8 10 6 8 hole depth mm hole depth inch DN63 2 12 0 47 DN80 3 12 0 47 DN100 4 12 0 47 5 3 6 3...

Страница 21: ...49 5 4 Connection overview Controller IC2 H3 System 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable s 6 Controller and actuator 7 Cable to remote control unit 8 Cable to power...

Страница 22: ...ions and schematics NOTICE Burned connector pins spark Connector pins or electronic parts could damage if plugged and unplugged under power Do not plug or unplug connectors under power 5 5 1 Connectio...

Страница 23: ...s FE must be blank metal not coated Connection plates of ground strap must be total plane for a good electrical contact The connection point at chassis FE must be blank metal not coated It is also pos...

Страница 24: ...ugh to SENSOR connector Refer to chapter Power and sensor connection 15 VDC sensors without optional SPS module External 24 VDC supplied to POWER connector is converted into 15 VDC by the valve intern...

Страница 25: ...nsor cable s Keep cable as short as possible but locate it away from noise sources Connector Use only screws with 4 40 UNC thread for fastening the connectors Pins 4 and 11 must be bridged for operati...

Страница 26: ...nsor cable s Keep cable as short as possible but locate it away from noise sources Connector Use only screws with 4 40 UNC thread for fastening the connectors Pins 4 and 11 must be bridged for operati...

Страница 27: ...ielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connector Use only screws with 4 40 UNC thread for fastening the connectors Pins 4 and 11 must be bridged fo...

Страница 28: ...lve directly enters the safety mode and is not able to do homing When safety mode is entered from operation i e pressure control mode the unit will automatically switch to safety control mode and rema...

Страница 29: ...uch energy to close or open the valve in the event of a power failure Technical data Charging Time 2 minutes max Durability Up to 10 years 25 C ambient These settings define what the valve is doing in...

Страница 30: ...ftware The Service port is designed for Local operation with the software CPA Control Performance Analyzer Note Detailed help on the CPA is available in the help of the CPA itself 5 8 1 How to start 1...

Страница 31: ...t is interrupted the valve will change to remote operation So when service cable will be disconnected or software will be shut down the valve returns automatically to remote operation This may result...

Страница 32: ...7 0 3rd Firmware generation type e g 01 0C 0 1 0 C 4th Firmware version firmware e g 07 00 0 7 0 0 5th Controller configuration e g 11 00 Controller 1 H1 2 H2 3 H3 4 H4 5 H5 6 H6 7 H7 Interface 1 RS23...

Страница 33: ...control P POSITION control A C 0 100 closed leak tight minimal conductance maximum opened INTERLOCK Valve closed or open by digital input I HOLD position frozen H LEARN L SAFETY Refer to Safety mode...

Страница 34: ...50 Drive Parameter ID ID of the last drive file loaded on the valve Sets the parameters responsible for the movement characteristics of the valve Configuration Parameters ID ID of the last configurati...

Страница 35: ...eviceNet Logic Profibus CCLink EtherNet Option Type none SPS PFO Cluster SPS PFO SPS Cluster PFO Cluster SPS PFO Cluster SPS Sensor Power Supply PFO Power Failure Option 5 10 2 Statistics Location CPA...

Страница 36: ...Refer to Error Number in Troubleshooting Error Code Refer to Error Code in Troubleshooting 5 10 4 Service 5 10 4 1 Restart Error Recovery Location CPA Parameters System Services Parameter Description...

Страница 37: ...erwise it is waiting for a move command Open Command On an open command Move Command On any move command At Startup All the time Homing Command On homing command Move Command Without Close On any move...

Страница 38: ...f the O ring during the closing process Each transition of Isolation State from Not Isolated to Isolated Location CPA Parameters Valve Position Cycle Counter Parameter Description Isolation Cycles The...

Страница 39: ...ble Enables the adaption Mode Mode of the adaption Currently only Offset is available Actual Position Mode Selection of the position which the valve indicates Real Adapted Offset Amount of displacemen...

Страница 40: ...terface RS232 RS485 Settings Parameter Description Operation Mode RS232 2 Wire Point to point Pin RXD and TXD RS485 4 Wire Full Duplex or 2 Wire Half Duplex Point to point multiple devices Pin A B X Y...

Страница 41: ...re marked in bold and might be changed to fit the application by using the CPA software Location CPA Parameters Interface RS232 RS485 Settings Parameter Description Baud Rate 1200 2400 4800 9600 19200...

Страница 42: ...ntax for Commands over Service CPA as over RS232 interface 5 12 4 2 Syntax Service Command Response GET p service parameter index p error service parameter index value SET p service parameter index va...

Страница 43: ...e Description 01 SET a parameter to a value 0B GET a value of a parameter 5 12 4 4 Parameter ID Each parameter is identified by an 8 digit hexadecimal value Parameter ID via CPA Left click on the disp...

Страница 44: ...able set value not allowed 71 parameter not readable get value not allowed 72 set to initial value not possible initial value not allowed 73 wrong parameter index wrong parameter ID index array 74 ini...

Страница 45: ...p 00010F0200000002 service parameter Index value 01 set 0F020000 00 02 error service parameter Index value 00 successfully 01 set 0F020000 00 02 Target Positon to 70 0 p 01110200000070 p 0001110200000...

Страница 46: ...0 1000 10000 user specific Value Closest Position Range if the setting of Position Unit is user specific Value Open Position 5 12 5 2 Pressure Defined unit range is used in all commands with pressure...

Страница 47: ...10A010000 01 Target Position 11020000 p 01A10A01000111020000 p 0BA10A010001 02 Target Pressure 07020000 p 01A10A01000207020000 p 0BA10A010002 03 not used 0 p 01A10A01000300000000 p 0BA10A010003 Note A...

Страница 48: ...indexes must be set to 0 View in the CPA Execute Compound 2 Service 29 GET Syntax Send Receive p service compound parameter ID 00 p error service parameter 00 value value value value Execute Send Rec...

Страница 49: ...osition 10010000 p 01A10A03000610010000 p 0BA10A030006 03 Position State 00100000 p 01A10A03000710100000 p 0BA10A030007 04 Actual Pressure 07010000 p 01A10A03000807010000 p 0BA10A030008 05 Target Pres...

Страница 50: ...cel Abbreviations RS Read Write RO Read Only NV None Volatile V Volatile Acc Access Data Type Info STRING Maximum length 20 characters BOOL Boolean SINT8 Signed Integer 8 bit 1 Byte UINT8 Unsigned Int...

Страница 51: ...3 Firmware version 0F100307 STRING RO V Axis 3 displayed if available Motion Controller 4 Firmware version 0F100308 STRING RO V Axis 4 displayed if available Hardware Controller Type 0F100401 UINT16...

Страница 52: ...state This value can be manipulated by the customer set to 0 after service for example Isolation Cycles Total 10300400 UINT32 RO NV This value is the number of Isolation Cycle in valve lifespan Posit...

Страница 53: ...3 Position Control Sub Group Parameter ID hex Data Type Acc NV Unit Min Max Description Actual Position 11010000 FLOAT RO V pos 0 100 Target Positon 11020000 FLOAT RW V pos 0 100 Position Control Spe...

Страница 54: ...301 BOOL RW NV 0 1 Activate Deactivate pressure target ramp The effective target pressure can be read in Target Pressure Used Time 07xx0302 FLOAT RW NV sec 0 1000000Target reach time Slope 07xx0303 FL...

Страница 55: ...Learn procedure will be executed to the Pressure Limit Pressure Limit 07500800 FLOAT RW NV mbar See Pressure Limit SFS above same functionality but user pressure scaling is used Open Speed 07500400 FL...

Страница 56: ...RW NV 0 1 Offset Value SFS 12xx0402 FLOAT RW NV SFS Value 1 0 means sensor full scale For example for a 0 10 Volt gauge the value 0 1 means 1 Volt Filter Enable 12xx0501 BOOL RW NV 0 1 Time 12xx0502...

Страница 57: ...500 SINT8 RW NV 0 2 0 IC 1 PM 2 PM V2 3 Tylan 4 Tylan Type 1 5 Tylan Type 2 Command Termination A1110B00 SINT8 RW NV 0 2 0 Carriage Return Line Feed 1 Line Feed 2 Carriage Return R A Answer Only for C...

Страница 58: ...A10A0101 UINT32 RW NV 3 20 A10A0102 UINT32 RW NV 4 20 A10A0103 UINT32 RW NV Input Output Digital Input 1 Enable A1200101 BOOL RW NV 0 1 State A1200102 BOOL RO V 0 1 Functionality A1200103 SINT8 RW NV...

Страница 59: ...300 SINT8 RW NV 0 2 0 Open 1 Close 2 Hold Inverted 37030400 BOOL RW NV 0 1 Digital Output 2 Enable 37040100 BOOL RW NV 0 1 Logic IO available on the valve power connector State 37040200 BOOL RO V 0 1...

Страница 60: ...er Description R S Answer Specifies response to R set position and S set pressure commands Standard Response is R or S i 76 Response is same as the i 76 request command see below System Set Resp Get R...

Страница 61: ...e Command 1 c 4303 Command 2 Open Command 3 Move Command 1 At Power Up h Reserved i 50 i 50 aaa Fatal Error Number 20 Limit Stop Not Detected 21 Blocked 22 Blocked 40 Motor Driver c 53 c 53 i 51 i 53...

Страница 62: ...rossover High Disabled 6 Sensor2 High Sensor1 Low Crossover High Disabled 7 Sensor1 High Sensor2 Low Crossover Target Pressure 8 Sensor2 High Sensor1 Low Crossover Target Pressure 9 Sensor1 High Senso...

Страница 63: ...y 0 0 1 0sec a Controller A B C D s 02a01 s 02 i 02a01 i 02 value Ramp Time 0 0 1000000 0sec a Controller A B C D s 02a02 s 02 i 02a02 i 02 value Ramp Mode 0 constant time 1 constant slope a Controlle...

Страница 64: ...1bit 1 2bit e Command Set 0 IC 1 PM f Digital Input 1 0 Interlock Open 1 Interlock Open Inverted 2 Disabled g Digital Input 2 0 Interlock Close 1 Interlock Close Inverted 2 Disabled h Second Answer P...

Страница 65: ...000011 Invalid number of characters between and E 000012 Invalid value E 000023 Value out of range E 000030 Hardware Pressure mode Zero or Learn without Sensor E 000040 Command not applicable for hard...

Страница 66: ...answer Second answer to commands O C R S Second answer to commands O C R Learn Answer Immediately After receiving the L command Standard Learn End Response after end of learning no communication unti...

Страница 67: ...ve 1 0 closed 1 opem 2 intermediate b Valve 2 0 closed 1 opem 2 intermediate not used Pressure Control Set Resp Get Resp Data Set Get Resp Description S S W W aaaaaa Pressure Control a Target Pressure...

Страница 68: ...56 7 0 75 8 1 0 9 1 33 A 1 78 B 2 37 C 3 16 D 4 22 E 5 62 F 7 5 G 0 0001 H 0 0003 I 0 001 J 0 003 K 0 01 L 0 02 M 0 05 e Sensor Type not used f Zero Adjust 0 disabled 1 enabled t 1 t 2 t 1 t 2 i 12 i...

Страница 69: ...sing E 000003 Wrong Letter Code E 000004 Numeric value not given in 6 digits E 000005 Numeric value out of range E 000006 Pressure Mode Zero or Learn have been selected with no sensor connected E 0000...

Страница 70: ...0 0 1000 1 0 2000 2 0 2500 3 0 5000 4 0 10000 5 0 20000 6 0 25000 7 0 50000 8 0 100000 f Gain Factor 0 0 1 1 0 13 2 0 18 3 0 23 4 0 32 5 0 42 6 0 56 7 0 75 8 1 0 9 1 33 A 1 78 B 2 37 C 3 16 D 4 22 E 5...

Страница 71: ...emory n Setpoint Nr 1 5 m Setpoint Request Nr 1 4 10 Tnx Rm Tnx Setpoint Type n Setpoint Nr 1 5 m Request Nr 26 30 0 Position 1 Pressure Mnx x Rm Mnx x Control Gain n Setpoint Nr 1 5 m Request Nr 46 5...

Страница 72: ...Soft start Rate Setpoint Analog 1 R21 I7 Soft start Rate Open 1 R22 I8 Soft start Rate Close 1 R31 Position Indicator Range Output 1 R32 Direct Reverse Control 1 R33 Sensor Range 1 R34 Pressure Units...

Страница 73: ...ngs and commands Command Specific Settings Location CPA Parameters Interface RS232 RS485 Settings Parameter Description Tylan V Use of V command Controller Selector None Pressure Control Selector Comm...

Страница 74: ...get Pressure Px x Position Control with Target Position Z1 Zero Analog set point Z2 Zero Pressure A Go to analog set point level and control B Reset the controller D Same as A Vx Control Mode Controll...

Страница 75: ...may be operated either by switches or by voltage sources Digital inputs on the POWER and INTERFACE connector have the same priority Active digital inputs have higher priority than RS232 RS485 commands...

Страница 76: ...pen 23 25 COMMON COMMON Switches Voltage Source Configuration Parameter Description Enable 1 Enables the input State 0 Not active 1 Active Functionality 0 Interlock Open 1 Interlock Close 2 Hold Inver...

Страница 77: ...if valve has an isolation function 2 HOLD valve is in hold state Inverted Function State Output 0 Not Inverted inactive 0 Off active 1 On 1 Inverted inactive 1 On active 0 Off 5 12 9 5 Analog Output P...

Страница 78: ...response time is not degraded by this connection it needs to meet the following requirements Inner diameter of connection pipe 10 mm Total length L1 L2 300 mm The total conductance value must include...

Страница 79: ...08 2022 79 149 5 13 2 Configuration The CPA window shows a good overview of the sensor settings The valve supports 2 sensors Zero Adjust is for offset compensation of linear sensors Crossover is auto...

Страница 80: ...r Limit Data Value Range Lower Limit Data Value Set the upper limit and lower limit of the gauge in the unit of Range Data Unit Example for a 250mTorr linear sensor Upper Limit 250 0 Lower Limit 0 0 R...

Страница 81: ...ft Switch Between the Threshold Low and Threshold High the controller blends both pressure signals to the actual pressure When to use This is the standard mode Both pressure signals need to match in t...

Страница 82: ...et value After executing value return to 0 Sensor 1 Enable Sensor 2 Enable 0 It is not possible to execute a zero adjust A present offset value is ignored 1 It is possible to execute a zero adjust A p...

Страница 83: ...sure Sensor Sensor X Range Scale is set to Logarithmic Actual Logarithmic Values Shows the logarithmic value Full Scale is Upper Limit Value EXAMPLE Sensor 1 linear 1000Torr Sensor 2 linear 10Torr Wit...

Страница 84: ...Interlock Open 13 INPUT 2 Interlock Close 14 COMMON 5 14 1 2 Configuration Location CPA Navigation Parameters Power Connector IO Digital Input Parameter Description Enable 1 enables the input State 0...

Страница 85: ...cation CPA Navigation Parameters Power Connector IO Digital Output Parameter Description Enable 1 enables the output State 0 Not active 1 Active Functionality 0 OPEN valve is fully open 1 CLOSE valve...

Страница 86: ...use serious injury or property damage Only qualified personnel are allowed to carry out the described work WARNING Valve opening Risk of serious injury Human body parts must be kept out of the valve o...

Страница 87: ...oftware may be used for monitoring during remote control In case Control Performance Analyzer is used make sure Remote button is pushed to enable for remote operation 6 1 3 Local operation Local opera...

Страница 88: ...Mode Close to Hold is not possible Learn The valve performs the system learn Necessary for Adaptive Pressure Control Refer to chapter Pressure Control Adaptive Algorithm Learn Interlock Open The valv...

Страница 89: ...12 08 2022 89 149 Location CPA Parameter System Control Mode 6 2 1 View CPA First digit on display I H C O P A I H L S F E Init Homing Close Open Pressure Control Position Interlock Open or Close Hold...

Страница 90: ...different controller units can be an option for optimization With the four controller units it is possible to use a certain controller unit for a specific pressure set point This controller unit can b...

Страница 91: ...to the vacuum system Note Adaptive control algorithm requires a linear sensor signal If a logarithmic sensor is used the signal has to be linearized or PI algorithm has to be used PI This is a solid...

Страница 92: ...not available Tv 500 sec Tv 500 sec Adaptive PI PI Soft Pump Soft Pump Use the formula below to define the applicable pressure control algorithm qL gasflow for learn mbarl s pSFS sensor full scale pr...

Страница 93: ...r response higher over undershoots of pressure A lower gain results in slower response lower over undershoot of pressure Sensor Delay For compensation of delays during the pressure detection Pipes and...

Страница 94: ...uch as chamber volume conductance and flow regime Therefore it must be performed with a specific gas flow according to instruction below The result of LEARN is a pressure versus valve position data ta...

Страница 95: ...ure Unit Open Speed Define the speed for opening the valve during the learn procedure May be necessary to prevent a pump from crashing 1 0 means full speed Status State of the current learn 0 Not Star...

Страница 96: ...n curve in the CPA Navigation Adaptive Learn Data Available with warnings The data may still be suitable for pressure control Evaluation possible with the pressure position curve in the CPA Navigation...

Страница 97: ...e valve is opened 4 Set a Pressure Limit SFS limit if sensor full scale cannot or should not be reached 5 Set parameter Controller Mode to LEARN 6 Wait until the Controller Mode leaves the LEARN state...

Страница 98: ...w of working point mbar l s pWP pressure of working point mbar CWP required conductance of working point l s qWP gasflow of working point sccm pWP pressure of working point Torr 2 Out of these calcula...

Страница 99: ...aluation and exchange of learn data Location CPA Navigation Adaptive Learn Data The window shows the pressure position curve of the stored data in the learning banks With the menu buttons it is possib...

Страница 100: ...y the default settings will result in good pressure control performance For some applications tuning may be required to improve performance The tuning procedures for each parameter grey boxes and its...

Страница 101: ...connection Sensor Delay adjustment Sensor Delay adjustment effects Stability Adjustment range is from 0 0 to 1 0sec Pipes and orifices for sensor attachment delay response time and so badly impact pr...

Страница 102: ...ressure at Sensor full scale PSTART Pressure at start of controlling a pressure step PEND Certain pressure which should be regulated Adjustment procedure 1 Start with optimal Gain Factor and sensor de...

Страница 103: ...e of advantage to have a slower valve response OPEN and CLOSE are always done with maximum speed Adjustment procedure 1 Use optimal Gain Factor sensor delay time and setpoint ramp according to precedi...

Страница 104: ...l algorithm A higher P Gain results in faster response higher over undershoot of pressure I Gain The I Gain is the integral factor The I Gain helps to reach the target pressure exactly Pressure Scale...

Страница 105: ...performance In PI controller mode the parameters P Gain and I Gain have to be set according to the systems characteristics The best set of parameters can be found by using the empiric method below Pr...

Страница 106: ...ssure is stable Set pressure to SP1 If the transition from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all the P Gain is too high If there is no over shoot an...

Страница 107: ...esults in a slow asymptotical pressure rise and there is still a constant deviation to SP2 the I Gain is too low The optimal value for I Gain is found if the transition from SP2 to SP1 result in just...

Страница 108: ...the type of application if the valve is mounted in downstream or upstream Downstream means the valve is after the chamber and before the pump Upstream valve is mounted before chamber and pump Ramp Onl...

Страница 109: ...I Gain is responsible to reach the setpoint If reaching setpoint is not important e g setpoint is 0 leave the I Gain at 0 Otherwise start with P Gain set to half of the value found when optimizing P...

Страница 110: ...meter Description Enable Activate Deactivate pressure target ramp Mode 0 Use Ramp Time 1 Use Ramp Slope See description below Time Target reach time in seconds Used if Mode 0 Slope Limit the rate of p...

Страница 111: ...C Edition 12 08 2022 111 149 6 3 5 2 Mode Time Unit seconds Time is constant slope varies Example 2 sec Slope Unit Pressure seconds Slope is constant time varies Example 10mTorr second 6 3 5 3 Type Li...

Страница 112: ...Ramp Time 100 sec Ramp Type Linear Target Pressure 0 Minimize pressure over or undershoots New Target Pressure without pressure ramp New Target Pressure with pressure ramp Smoothing a staircase Press...

Страница 113: ...gn a profile the segments pressure ranges must be defined A segment is defined by the pressure Threshold and the Slope It is possible to define up to 10 segments Example Ramp Profile with 3 segments S...

Страница 114: ...hes the Threshold Target Pressure Used Change happens if Target Pressure Used reaches the Threshold Ramp Type Defines the shape of the ramp Linear Logarithmic Exponential Actual Slope Show the actual...

Страница 115: ...the segment The lower limit is defined by the next lower Threshold or the lower limit is 0 if there is no lower Threshold If the value exceeds the top threshold the slope value of the top segment is u...

Страница 116: ...or Up Down Control Mode Pressure Direction Mode Threshold Threshold Condition Lower or Equal Threshold Condition Equal Controller Selector changes when the Target Pressure exceeds or falls below a Thr...

Страница 117: ...er for up control and one for down control Controller 1 Controller 2 Controller 3 Controller 4 6 3 8 Control Position Restriction Location CPA Navigation Parameters Pressure Control General Settings C...

Страница 118: ...caling setting on Interface and CPA Position Control Speed Speed of the valve in Control Mode Position 0 001 1 0 Full speed Ramp See below 6 4 2 Position Ramp 6 4 2 1 Configuration Location CPA Naviga...

Страница 119: ...ring operation Once heating is switched off valve and system await until the valve is cooled down complete before doing any work This valve may be operated in the temperature range mentioned product d...

Страница 120: ...eter Description Warning Bitmap Bit Hex Description 0 1 No learn data available for adaptive control 1 2 Position indicator signal of the external isolation valve incorrect 2 4 No Sensor Active 3 8 PF...

Страница 121: ...rovide enough power for sensor s Verify sensor supply voltage ZERO does not work ZERO disabled Enable ZERO Refer to Pressure Sensor Zero Adjust Sensor voltage shifting Wait until sensor does not shift...

Страница 122: ...website www vatvalve com The following information is required for VAT to analyze the error case Diagnostic File CPA Tools Diagnostic File Load Error Data CPA Tools Trace Log Mode Load Error Data Star...

Страница 123: ...O ring sticking 6 Initialization of interface module failed Fieldbus Valve firmware does not support interface type Update valve firmware Wrong interface firmware version Update interface firmware 7...

Страница 124: ...procedure 1 O ring sticking 97 SFV Position deviation axis1 to axis2 at operating 1 98 Position error during closing procedure 1 99 Position error at operating 1 200 Valve configuration error not pos...

Страница 125: ...wer supply provide enough power for sensor s Verify sensor supply voltage ZERO does not work ZERO disabled Enable ZERO Refer to Pressure Sensor Zero Adjust Sensor voltage shifting Wait until sensor do...

Страница 126: ...is switched off valve and system await until the valve is cooled down complete before doing any work NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always...

Страница 127: ...cess conditions VAT can give the following recommendations for preventive maintenance Replacement of unheated 1 heated 80 C 1 heated 80 C 1 Rotary feedthrough seals 2 000 000 cycles 6 months but max 2...

Страница 128: ...ides of the valve 2 Make sure the valve is in closed position 3 Disconnect electrical POWER connector at valve and remove valve from vacuum system Take care not to damage sealing surface Do not move t...

Страница 129: ...3 mm 7 Unfasten alternately the 2 mounting screws little by little Allen Wrench 3 mm If only one screw is fasten unfasten the mechanical unit will be damaged Max difference should be less than 1 turn...

Страница 130: ...ll the end 15 Deposit 0 0375 ml vacuum grease between the O rings 16 Clean shaft from vacuum grease Vacuum grease Clean room wipes 17 Assemble mechanical unit in reverse order as disassembled steps 6...

Страница 131: ...49 Description Required tool 21 Assemble control and actuating unit to valve unit Tighten mounting screws adequately Allen Wrench 3mm 22 Tighten clamp coupling with steel coupling 2 2 Nm Allen Wrench...

Страница 132: ...or unplug connectors under power The option board may or may not be equipped in your valve depending on the order Refer to page 1 of this manual to check valve version This board includes the optiona...

Страница 133: ...ure of valve body is lower than 150 C the corresponding life time curve will be somewhere in between the upper and the lower curve Therefore please determine the equivalent maintenance period for repl...

Страница 134: ...replacement procedure View on control and actuating unit All boards have a fixed position into control and actuating unit It is not possible to fit a board in other position as shown in picture above...

Страница 135: ...t vacuum system disconnect electrical connections and remove valve from vacuum system If you only replace control and actuating unit the valve can remain in the system Take care not to damage sealing...

Страница 136: ...he Controller and Interface board are fix connected and shall not be dismounted you have to work on an ESD protected working space If you need any further information please contact one of our service...

Страница 137: ...e addresses on our website www vatvalve com 9 1 FPR Service The VAT customer service can refurbish the product or individual components for you Wear sensitive parts are replaced and the guarantee on t...

Страница 138: ...d work 10 1 Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room gloves when handling the valve NOTICE Valve in open position...

Страница 139: ...ve humidity between 10 and 70 temperature between 10 C and 50 C non condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use...

Страница 140: ...opriate packaging Product may get damaged if inappropriate packaging material is used Always use the original packaging material and handle product with care When returning products to VAT please fill...

Страница 141: ...s with a protective foil 2 Pack valve appropriately by using the original packaging material VAT disclaims any liability for damages resulting from inappropriate packaging 11 2 Transport NOTICE Inappr...

Страница 142: ...age in the case of improper handling Observe local regulations in regard to waste disposal without fail Commission an authorized waste disposal company for the professional disposal of your waste NOTI...

Страница 143: ...s are supplied VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff The following table s contain spare parts tha...

Страница 144: ...EN Series 613 144 149 Edition 12 08 2022 984360EC 13 1 ISO KF for DN 25 50 mm 13 1 1 Drawing ISO KF 1 Body with mechanism 2 Shaft kit 3 Valve body 4 Plate kit 5 Shaft feedthrough seals All Items in be...

Страница 145: ...uired 353386 2 pcs required 353386 2 pcs required 13 1 3 ISO KF valve unit stainless steel without heating Item Description Valve size Product ordering number DN 25 1 61328 KE ISO KF DN 40 1 61332 KE...

Страница 146: ...DEN Series 613 146 149 Edition 12 08 2022 984360EC 13 2 ISO F for DN 63 320 mm 13 2 1 Drawing ISO F 1 Body with mechanism 2 Shaft kit 3 Valve body 4 Plate kit 5 Shaft feedthrough seals All Items in be...

Страница 147: ...3386 3 pcs required 353386 3 pcs required 353386 3 pcs required 13 2 3 ISO F valve unit stainless steel without heating Item Description Valve size Product ordering number DN 63 2 61336 PA DN 80 3 613...

Страница 148: ...240 VAC 891528 D Sub15 connector Adapter cable for power supply with D Sub9 connector 735567 D Sub15 to D Sub9 Plug D sub 15 pin female with 4 40UNC screws for the power input and Logic interface plug...

Страница 149: ...Series 613 984360EC Edition 12 08 2022 149 149 This page left blank intentionally 14...

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VAT 613 Series, Инструкции по установке, эксплуатации и обслуживанию

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