Series 613
TROUBLE SHOOTING
984360EC
Edition 12.08.2022
125/149
7.3
Troubleshooting List
Failure
Check
Action
Display does not light up
-
24 V power supply
-
Connect valve to power supply according to
‘Power, ground and sensor connection’ and make
sure that power supply is working.
Remote operation does not work
-
Local operation via service port
active
-
Switch to remote or locked operation
Refer to ‘Remote and local operation’
-
Safety mode active
Check for S on display
-
Check ‘Drive Power Enable Switch’
Refer to ‘Power, ground and sensor connection’
-
Interlock mode active
Check for I on display
-
Check Digital Input
Refer to ‘Power connector IO’
‘Digital Input’
POSITION CONTROL does not work
-
Safety mode active
Check for S on display
-
Check ‘Drive Power Enable Switch’
Refer to ‘Power, ground and sensor connection’
-
Interlock mode active
Check for I on display
-
Check Digital Input
Refer to ‘Power connector IO’
‘Digital Input’
-
POSITION CONTROL selected,
check for A on display?
-
Select POSITION CONTROL mode.
Refer to ‘Control Mode’ in ‘EtherCAT’ interface
Pressure reading is wrong
Pressure reading is negative
-
Sensor connection
-
Refer to ‘Power, ground and sensor connection’
-
ZERO done?
-
Perform ZERO when base pressure is reached.
Refer to ‘Pressure Sensor’
‘Zero Adjust’
-
Does sensor power supply
provide enough power for
sensor(s)?
-
Verify sensor supply voltage.
ZERO does not work
-
ZERO disabled?
-
Enable ZERO.
Refer to ‘Pressure Sensor’
‘Zero Adjust’
-
Sensor voltage shifting?
-
Wait until sensor does not shift any more before
Performing ZERO.
Pressure is not ‘0’ after ZERO
-
System pumped to base
pressure?
-
OPEN VALVE and bring chamber to base pressure
before performing ZERO.
-
Sensor offset voltage exceeds
±1.4V
-
Adjust the offset direct at the sensor
-
Check function of the sensor.
PRESSURE CONTROL does not
work
-
PRESSURE CONTROL
selected, check for P on
display?
-
Select PRESSURE CONTROL mode.
Refer to ‘Control Mode’ in ‘EtherCAT’ interface
-
LEARN done?
-
Perform LEARN. Refer to
‘Pressure control’
‘Adaptive algorithm’
‘Learn’
-
Sensor signal ok?
-
Refer to ‘Pressure Sensor’
-
Pressure control setup done
-
Refer to ‘Pressure control’
PRESSURE CONTROL not optimal
-
LEARN successfully done?
-
Perform LEARN. Check ‘Status’ and ‘Warning Info’ in
‘Pressure control’
‘Adaptive algorithm’
‘Learn’
-
ZERO performed before
LEARN?
-
Perform ZERO then repeat LEARN.
Refer to ‘Pressure Sensor’
‘Zero Adjust’
-
Was gas flow stable during
LEARN?
-
Repeat LEARN with stable gas flow. Refer to
‘Pressure control’
‘Adaptive algorithm’
‘Learn’
-
Tuning done?
-
Tune valve for application.
Refer to the tuning sections in ‘Pressure Control’
-
Is sensor range suited for
application?
-
Use a sensor with suitable range (controlled pressure
should be >3% and < 98% of sensor full scale).
-
Noise on sensor signal?
-
Make sure a shielded sensor cable is used.
