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RF Power Supply and Matching Box

7. Troubleshooting

7-1-2. Troubleshooting related to the matching box

No.

Trouble symptom

Cause

Corrective action

1 Matching cannot be achieved

at the usual matching point
after the power is turned on.

Load conditions differ from
previous conditions.

Check the gas pressure, substrate,
etc.

Wiring in matching box is
disconnected.

Check the wiring.

Wiring from matching box to load is
grounded.

Check for traces of discharge on
the variable capacitor and the
wiring in matching box.

2 Reflected power (REF:Pr)

does not decrease.

Insufficient matching adjustment

See "5-3 Matching adjustment"
and adjust matching.

Not discharging.

Check the discharge conditions like
gas pressure, etc.

3 Variable capacitors not

operating in manual mode.

Auto matching controller problems Contact ULVAC.

Mechanical problems

Check the coupling connecting the
variable capacitors and motor to
see if it slides.

Electrical problems

Contact ULVAC.

Cable break or poor connector
contact

Retighten the connector screws.
Purchase a new cable if broken.

4 Matching does not start in

auto mode. (Does not
operate.)

Configuration mistake

For local operation, set to AUTO.

For remote operation, open pins
1-9.

Auto matching controller problems Contact ULVAC.

Table 7-2. Matching box related troubleshooting list

Содержание RFS-1305L

Страница 1: ...S 1350LH RFS 13100L RFS 2750L RFS 2775L Control Panel RFP L Matching Box MBX 1305L MBX 1305Lu MBX 1310L MBX 1330L MBX 1330Lu MBX 1350L MBX 13100L MBX 2750L MBX 2775L Matching Controller AMC 8L AMC 9L AMC 8LT AMC 9LT Revised 17th edition 08 29 2023 ULVAC Inc Read this manual before using the system Store this manual carefully so that it can be used at anytime ...

Страница 2: ... and 1 For Safe Operation page 1 Carefully read and understand these sections before using the system Carefully store this manual nearby so it can be used at anytime When the system s installation location is changed always include this manual with the system The content of this manual may differ from the system being used due to system improvements If you have any questions and items of concern c...

Страница 3: ...roneous operation or inadequate maintenance and inspection work Never try to operate the system before carefully reading and understanding the operation inspection and maintenance sections 3 Warnings and precautions about safety are listed in this manual and on the system s warning labels Ignoring these warnings and precautions may lead to injury or loss of life so use caution 4 Supervisors operat...

Страница 4: ...ork that ignores this warning carries the risk of minor injury to the operator damage to the system or necessary adjustment of the system There is no direct danger but this symbol notes content you should know to work safely and to use the system correctly It is not possible to precisely anticipate all potential dangers in operation inspection or maintenance in all operating environments The warni...

Страница 5: ...ing and others or disasters from force majeure events such as war 3 Malfunction or failure caused by inattention during handling or mistaken usage 4 A system modified disassembled or repaired without ULVAC s approval 5 Malfunction or failure from abnormal environments strong magnetic fields radiation environments high temperatures high humidity flammable gas atmospheres corrosive gas atmospheres d...

Страница 6: ...y perform repairs please work to ensure the accuracy of the information If you have determined there is a malfunction or if you have any questions contact one of the locations listed below When contacting ULVAC please inform us of the product names model numbers serial numbers and about the symptoms of the problem in as much detail as possible 5 Disposal When disposing of the system please follow ...

Страница 7: ...ons 29 4 1 2 Control panel functions and explanations 30 4 1 3 Measurement display 31 4 1 4 Protective functions 31 4 1 5 External control terminal pin assignments 32 4 1 6 Caution when using the external control terminal INTERFACE 35 4 1 7 RF power supply parameters 36 4 2 Automatic matching controller functions 38 4 2 1 Automatic matching controller part names and functions 38 4 2 2 Control pane...

Страница 8: ... 3 2 Matching adjustment 59 5 3 3 Increasing and decreasing the number of coil short circuits 60 5 3 4 Adding a fixed capacitor 61 6 Maintenance 62 6 1 RF power supply maintenance and inspection 62 6 2 Matching box maintenance and inspection 63 7 Troubleshooting 65 7 1 Troubleshooting 65 7 1 1 Troubleshooting related to the RF power supply 65 7 1 2 Troubleshooting related to the matching box 66 8 ...

Страница 9: ...h to pose a danger to human life The utmost care must be taken when handling the system If by some chance a person touches this high voltage current it will lead to a serious accident Take great care not to come into contact with high voltage current Danger Never energize the power supply with the cover removed Danger This power supply internally handles high voltages When inspecting inside the po...

Страница 10: ... ULVAC or an exclusive dealer A nameplate is also affixed to the top surface of the power supply Take special care to ensure the nameplate is always legible 1 3 Contact information To order parts ask questions about the system and to make inquires related to system malfunctions first verify the system information and then contact ULVAC Especially when you have determined the system has malfunction...

Страница 11: ...f 13 56 27 12 MHz for high frequency loads This system also has a control terminal that makes external control by a PLC possible 2 2 Features The solid state design eliminates consumables with short life spans like vacuum tubes and has increased reliability A stabilized oscillation frequency can be obtained by quartz crystal oscillation Reduced size and weight have improved maintainability signifi...

Страница 12: ... configuration is shown in Figure 2 1 System configuration The basic configuration requires the devices below RF power supply 1 RF power supply control panel 1 On RF power supply unit for 13 MHz 10 kW or higher 27 MHz 5 kW or higher Matching box 1 Matching controller 1 1 The matching controller changes according to the supported matching box See Table 2 1 2 The control panel is buit into the RF po...

Страница 13: ...le 2 1 Matching system Matching controller Comments MBX 1305L MBX 1305Lu MBX 1310L MBX 1330L MBX 1350L MBX 13100L MBX 2750L MBX 2775L MBX 1330Lu AMC 8LT AMC 9LT For inverted T matching network Matching box AMC 8L AMC 9L For inverted L matching network ...

Страница 14: ...t 2 mA or less Output Oscillation frequency 13 56 MHz 0 05 Rated traveling wave power 500 W at 50 Ω load Maximum reflected wave power 100 W Output impedance 50 Ω Harmonic distortion 45 dB or less Power stability 3 or less of rated output 10 to 100 of rated output Rise time Minimum approx 50 ms Linearity 2 or less of rated output 10 to 100 of rated output Output connector HN connector Cooling Cooli...

Страница 15: ...imum approx 30 ms Linearity 2 or less of rated output 10 to 100 of rated output Output connector HN connector Cooling Cooling method Water cooled Water temperature 5 C to 25 C no condensation Water volume 4 L min or more When using the optional flow meter the alarm operates at a cooling water volume of 3 5 L min or lower however alarm does not operate when RF OFF Differential pressure Approx 0 05 ...

Страница 16: ... 3 or less of rated output 10 to 100 of rated output Rise time Minimum approx 30 ms Linearity 2 or less of rated output 10 to 100 of rated output Output connector DIN 7 16 Cooling Cooling method Water cooling Water temperature 5 C to 25 C no condensation Water volume 6 L min or higher Alarm operates at cooling water volume 5 5 L min or lower However the alarm does not operate when RF OFF Different...

Страница 17: ...ted output Rise time Minimum approx 200 ms Linearity 2 or less of rated output 10 to 100 of rated output Output connector EIA 7 8 Cooling Cooling method Water cooling forced air cooling Water temperature 5 C to 25 C no condensation Water volume 8 L min or higher Alarm operates at cooling water volume 7 5 L min or lower However the alarm does not operate when RF OFF Differential pressure Approx 0 1...

Страница 18: ...tput Rise time Minimum approx 30 ms Linearity 2 or less of rated output 10 to 100 of rated output Output connector DIN 7 16 connector Cooling Cooling method Water cooling forced air cooling Water temperature 5 C to 25 C no condensation Water volume 7 L min or higher Alarm operates at cooling water volume 6 5 L min or lower However the alarm does not operate when RF OFF Differential pressure Approx...

Страница 19: ...tput Rise time Minimum approx 30 ms Linearity 2 or less of rated output 10 to 100 of rated output Output connector DIN 7 16 connector Cooling Cooling method Water cooling forced air cooling Water temperature 5 C to 25 C no condensation Water volume 7 L min or higher Alarm operates at cooling water volume 6 5 L min or lower However the alarm does not operate when RF OFF Differential pressure Approx...

Страница 20: ... operated Stops RF output Recovers to the standby state if cleared RF OFF ALARM Overheat fan air volume decrease cooling water volume decrease RF amplifier output unbalanced cover open main fuse blown DC portion malfunction Stops RF output RF OFF Operation mode Controllable by the operation panel and external command signal Insulation resistance 50 MΩ or more with a 500 VDC insulation tester betwe...

Страница 21: ... traveling wave power or 10 W or less whichever is greater Cooling Cooling method Forced air cooling by a ventilation fan Alarm output Alarm output as MB FAIL on the RF power supply The following alarms are detected with OR NORMAL OPEN 1 Panel open contact maintenance side 2 FAN sensor alarm is also output when the matching controller is off 3 RF connector plugged in validation contact 4 Panel ope...

Страница 22: ... 2 L min or more Water quality See Table 2 17 RF system cooling water Water quality Differential pressure Approx 0 15 MPa at 2 L min Withstand pressure 0 96 MPa Internal hose diameter 1 4 inch Joint PT 1 4 Alarm output Alarm output as MB FAIL on the RF power supply The following alarms are detected with OR NORMAL OPEN 1 Panel open contact maintenance side 2 FAN sensor alarm is also output when the...

Страница 23: ...e 1 or lower of input traveling wave power or 10 W or less whichever is greater Alarm output Alarm output as MB FAIL on the RF power supply The following alarms are detected with OR NORMAL OPEN 1 Panel open contact maintenance side 2 FAN sensor alarm is also output when the matching controller is off 3 RF connector plugged in validation contact Ambient temperature during operation 5 C to 40 C Howe...

Страница 24: ...ing Cooling method Water cooling and air cooling fan 90 mm x 90 mm Water temperature 5 C to 25 C Water volume 2 L min or more Water quality See Table 2 17 RF system cooling water Water quality Differential pressure Approx 0 15 MPa at 2 L min Withstand pressure 0 96 MPa Internal hose diameter 1 4 inch Joint PT 3 8 Alarm output Alarm output as MB FAIL on the RF power supply The following alarms are ...

Страница 25: ...r volume 2 L min or more Water quality See Table 2 17 RF system cooling water Water quality Differential pressure Approx 0 15 MPa at 2 L min Withstand pressure 0 96 MPa Internal hose diameter 1 4 inch Joint PT 3 8 Alarm output Alarm output as MB FAIL on the RF power supply The following alarms are detected with OR NORMAL OPEN 1 Panel open contact maintenance side 2 Panel open contact electrode acc...

Страница 26: ...re 5 C to 25 C Water volume 2 L min or more Water quality See Table 2 17 RF system cooling water Water quality Differential pressure Approx 0 15 MPa at 2 L min Withstand pressure 0 96 MPa Internal hose diameter 1 4 inch Joint PT 3 8 Alarm output Alarm output as MB FAIL on the RF power supply The following alarms are detected with OR NORMAL OPEN 1 Panel open contact maintenance side 2 FAN sensor al...

Страница 27: ...ion 15 to 85 RH no condensation Operating environment Avoid direct sunlight heat dust vibration Not containing corrosive gas Exterior Exterior dimensions AMC 8L T 480 W x 350 D x 50 H not including protrusions AMC 9L T 480 W x 300 D x 50 H not including protrusions Weight Approx 5 kg RF system VPP rating VDC rating RFS 1305L MBX 1305L LV 50 1000 V 50V 1000 V RFS 1310L MBX 1310L LV RFS 1330L MBX 13...

Страница 28: ...t Using cooling water outside of these conditions will shorten the lifespan of the power supply and cause malfunctions Avoid using pure water If pure water is open to the atmosphere it absorbs carbon dioxide in the atmosphere which becomes free carbonic acid in the water and lowers its pH When the pH is low if the water temperature is high and the flow rate is high erosion 1 and corrosion 2 may oc...

Страница 29: ... phase 200 V to R S red white 2 GND cable RF power supply GND cable User terminal untreated wire size 13 MHz 1 kW to 5 kW 5 5 sq 13 MHz 10 kW 14 sq 27 MHz 5 kW 14 sq 27 MHz 7 5 kW 14 sq 1 set 4 External control connector D sub 25 male 1 set Connector model HDBB 25P Hirose Electric Co Ltd 5 Flow connector contact 13 MHz 1 kW 13 MHz 3 kW 13 MHz 5 kW only 1 set Name Comments Quantity 1 AC input cable...

Страница 30: ...unting the RF power supply ensure that undue force is not exerted on the front panel See Figure 3 1 Rack mount type RF power supply installation example Also provide ample clearance in the area around the power supply for air intake When using the power supply in a rack mount ensure there can be ample ventilation so the temperature inside the rack does not exceed the specified temperature If the p...

Страница 31: ...mum length There is also an interlock switch on the output surface panel If the interlock switch on the output surface panel is not pressed tightly because the RF access port is too large be aware that the interlock will not be released 3 3 2 Installation Mount the matching box on an intermediate box or on the chamber using the matching box taps See Figure 3 2 Matching box installation 3 4 Automat...

Страница 32: ...es between each unit then see Figure 3 3 System wiring and connect the cables See Table 3 3 Cable list for the cables used Please prepare the wiring between the matching box and the chamber and the GND wiring yourself 1 The matching controller changes according to the supported matching box See Table 2 1 2 The control panel is buit into the RF power supply unit for 13 MHz 10 kW or higher 27 MHz 5 ...

Страница 33: ...q 27 MHz 7 5 kW 14 sq RF3 RF cable HN connector 13 MHz 500 W to 13 MHz 3 kW RF5 2V DIN 7 16 connector 13 MHz 5 kW RF7 D 2V DIN 7 16 connector 27 MHz 5 kW 27 MHz 7 5 kW RF10 2V EIA 7 8 connector 10 kW MB SIG MB SIGNAL cable The wiring between the matching box and the RF power supply INTERFACE For RF power supply external control P CONT Control panel cable Required when using RFP L AC POW 100 VAC ca...

Страница 34: ...ut power supplies wire the incoming power for the 1st unit R phase S phase the second unit S phase T phase and so on being careful so that the three phase power does not become unbalanced Figure 3 4 Power supply input terminal wiring 3 phase Wire the pins for the RF power supply input connector as shown below ３ RF Power Supply GND １３２ R phase S phase T phase Single phase Wire the pins for the RF...

Страница 35: ...3 5 Grounding the system and securely connect the system to ground Warning High voltages several kilovolts are generated by resonance in the matching box You may get an electric shock if the system is not properly grounded Always ground the system Wire the ground so that the matching box s ground resistance is 10 Ω or less According to Japanese standards Class A grounding in Article 18 of the Elec...

Страница 36: ...15 V 2 Collector 1 3 COM 4 Collector 2 The clear alarm signal uses Collector 1 Short pins 2 3 to clear the alarm When not using the optional flow meter control the alarm so that it is cleared only when maintaining the specified flow volume Select the RF power supply s water cooling connector and the matching box s water cooling connector according to the water cooling tube you will use In order to...

Страница 37: ...AC INPUT connector Connect the power input cable 3 RF OUT connector The connector to output RF power 4 MB SIG connector Connect the matching box with the MB SIG cable 5 OSC connector Connect when using external OSC 6 INTERFACE connector Wire for external control When not performing external control short pins 1 14 7 Cooling water IN The connector for cooling water input Not present on 500 W models...

Страница 38: ... decrease in setting values Up key down key Can select menus and change the digit of setting values During operation the measurement value can be displayed by pushing the arrow keys ESC key Can return to the previous menu ENT key Can select confirm settings and send you to the next screen 3 Buzzer Short sound approx 100 ms When selecting the menu entering setting values Long sound approx 1 s When ...

Страница 39: ... the RF amplifier s applied voltage exceeds the rated value VPP Pf droop Controls traveling wave power if the matching box s output terminal voltage exceeds the rated value ARC Pf shut off Shuts off traveling wave power if the reflected wave power momentarily exceeds the rated value then after pausing for a fixed time automatically recovers INTLOCK RF OFF Stops traveling wave power when the extern...

Страница 40: ...e input differs OVER REF PROTECT When excessive reflected wave power REF has continued for a set time OVER VPP RROTECT When excessive VPP voltage VPP has continued for a set time ARCING COUNT When ARC has exceeded the set number of times CONTROL ABORT When there is a loss of control caused by abnormal output droop no output LIMIT PROTECTION When a droop function FWD REF OC 0V has continued for the...

Страница 41: ...d power 10 23 VDC monitor VDC monitor output Output 0 V to 10 V 0 V to rated VDC 11 24 VPP monitor VPP monitor output Output 0 V to 10 V 0 V to rated VPP 12 25 Interlock Response When you release MB FAIL INTERLOCK CLOSE 12 13 RESERVE System reserved OSC BNC connector External oscillator input 13 56 MHz 0 05 27 12 MHz 0 05 Input 13 dBm 3 dB INTERFACE connector pins 20 21 22 23 24and 25 are GND Inpu...

Страница 42: ...of the external control terminal insert a diode or use a relay with a surge absorbing element so that counter electromotive force is not generated Figure 4 3 RF power supply INTERFACE connector pin assignments 3 16 RF ON command 10V 8 7 Pf Monitor Ext Control Device 20 1 14 EXT Interlock Input 2 15 RESET 5 18 ALARM 4 17 RF ON Answer 6 19 ＡＲＣ POWER SET 21 9 Pｒ Monitor 22 10 VDC Monitor 23 11 VPP Mo...

Страница 43: ...E If connecting an inductive load relay or coil to the output of the external control terminal insert a diode or use a relay with a surge absorbing element so that counter electromotive force is not generated Figure 4 4 Overvoltage protection circuit for transistor output section Counter EMF prevention diode 12V ...

Страница 44: ...signal count when the high speed arcing signal makes the transition to internal arcing shut off If 0 CNT does not transition to internal arcing SIGNAL MASK TIME SET 0 0 s The ARC external signal is not sent during the period of set time from RF ON SIGNAL MASK TIME SET DELAY 0 0 s During RF ON the ARC signal is not sent within the set time SIGNAL OUTPUT TIME DELAY 0 0 s The set time delay when send...

Страница 45: ...g frequency 200 μs High speed arcing shut off Hardware detection When the reflected wave feedback s voltage becomes higher than the set value it is shut off by the logic Operates within 10 µs 1 The initial value of RFS 2750L 2775L is set to 3CNT Please use without changing the settings 2 The initial value of RFS 2750L 2775L is set to 301ms Please use without changing the settings ...

Страница 46: ...peration via the external analog signal 4 2 1 Automatic matching controller part names and functions NP GND AC 100V FLASH RS 232C DET IN AMC OUT AMC EXT PRESET 7 2 3 6 4 1 5 AUTO ESC ENT MATCH TUNE MATCH CCW CW MANUAL RESET MATCHING CONTROLLER TUNE CW CCW ALARM Figure 4 5 Parts layout drawing AMC POWER RESET ALARM ENT ESC CCW TUNE CW TUNE CCW MATCH CW MATCH AMC 9L AMC 9L AMC 8L AMC OUT DET IN AC 1...

Страница 47: ...tic control mode When selected green LED on MANUAL Selects manual control mode When selected green LED off MATCH CCW Decreases the capacity of the MATCH variable capacitor select menu change set value digits MATCH CW Increases the capacity of the MATCH variable capacitor select menu change set value digits TUNE CCW Decreases the capacity of the TUNE variable capacitor select menu increase set valu...

Страница 48: ...atching state Does not follow the TUNE MATCH analog preset input voltage Input 2 10 BUSY output Closes by motor operation regardless of automatic manual mode Output 7 15 MANUAL response Closes when specifying manual mode with an external command Output 3 11 TUNE analog preset 0 1 to 9 9 V 1 to 99 5 Input However does not operate for voltages 0 1 V or lower 4 12 MATCH analog preset 0 1 to 9 9 V 1 t...

Страница 49: ... the current position number as a preset value to the selected number 2 10 RECALL Close to load the selected number s preset value 3 11 SELECT1 Selects the preset number see Table 4 4 12 SELECT2 Selects the preset number see Table 4 5 13 SELECT3 Selects the preset number see Table 4 6 14 SELECT4 Selects the preset number see Table 4 The external control terminal PRESET function is an AMC 9L AMC 9L...

Страница 50: ...with a leakage current 0 1 mA or lower Caution when using the external control terminal If connecting an inductive load relay or coil to the output of the external control terminal insert a diode or use a relay with a surge absorbing element so that counter electromotive force is not generated Figure 4 8 Automatic matching controller PRESET pin assignments AMC 9L AMC 9LT ...

Страница 51: ...1 12 13 14 7 8 1 2 3 4 1 2 3 4 5 6 OPEN CLOSE Table 4 10 Preset number selection AMC 9L AMC 9LT Figure 4 9 Timing chart during external preset saving AMC 9L AMC 9LT AUTO MANUAL select AMC EXT 1 9 Open Close Open Close SELECT1 SELECT 3 11 SELECT2 SELECT 4 12 SELECT3 SELECT 5 13 SELECT4 SELECT 6 14 PRESET SELECT 1 9 Close Open 100 ms or more 50 ms or more ...

Страница 52: ...elay with a surge absorbing element so that counter electromotive force is not generated Figure 4 10 Timing chart during external recall operation loading AMC 9L AMC 9LT Figure 4 11 Overvoltage protection circuit for transistor output section AUTO MANUAL switch AMC EXT 1 9 Open Close Open Close SELECT1 SELECT 3 11 SELECT2 SELECT 4 12 SELECT3 SELECT 5 13 SELECT4 SELECT 6 14 RECALL SELECT 2 10 Close...

Страница 53: ...capacitors RECALL COUNT INIT Do not execute Displays and resets number of recalls Initialize with 0 CNT SYSYEM CONSTANT MATCHING COMPLETE REF LEVEL 12 LSB The reflected wave feedback level to judge matching complete When lowered residual reflections decrease but hunting happens easily SPEED TEBLE PROCEED REF LEVEL 40 LSB The reflected wave feedback level to start decelerating the motor s operation...

Страница 54: ...r volume is the specified rate When the cooling water flow stabilizes turn on the automatic matching controller s AMC 9L main switch The automatic matching controller s self diagnostic starts If there are no problems the standby screen appears Screen example during self diagnostic Standby screen when normal Next turn on the RF power supply s main breaker The RF power supply s self diagnostic start...

Страница 55: ...keys and press the ENT key Operation mode selection screen Select normal operation NORM and press the ENT key Next the control mode selection screen is displayed Operation mode selection screen Normal operation control mode selection screen When the setting is complete the power settings screen is displayed Operation mode selection screen 2 Output settings Power settings screen RF OPERATION SELECT...

Страница 56: ...usly pressed the value goes 900 800 100 90 10 9 1 0 in that order The lower limit of the set value is 0 The upper limit is the rated value If the value exceeds the limit the buzzer long sound sounds and the value is ignored Press the RESET key while configuring to set the value to 0 W Press the ENT key to confirm the set value and RF output operation will become possible Press the ENT key once aga...

Страница 57: ...play the configuration screen then select the ANALG operation mode with the left and right keys and press the ENT key Operation mode selection screen When the setting is complete the power display screen is displayed Power display screen 2 Output settings Input external command voltage via the RF power supply s INTERFACE connector Afterward the set power is output by inputting the RF ON command Fo...

Страница 58: ...the pressed state See Table 5 1 for the RF output rise time Minimum value Model 30 ms RFS 1310L RFS 1330L RFS 1350LH RFS 2750L RFS 2775L 50 ms RFS 1305L 200 ms RFS 13100L Can be changed with the user soft start function If the OFF key is pressed during RF operation RF output stops in all situations Figure 5 1 RF output timing chart Table 5 1 Rise time by model ON key Soft recognition Press RF outp...

Страница 59: ...en in normal operation the selected oscillator is shown but only while pressed Operating by internal oscillator Operating by external oscillator 3 Operation time display menu If the left key is pressed while displaying the measurement screen in normal operation the operating time and number of arcing occurrences is shown but only while pressed Power settings screen The maximum cumulative value is ...

Страница 60: ...n display screen is displayed Position display screen 2 Automatic matching operation Press the AUTO button The green LED turns on The variable capacitor position operation buttons are now disabled The matching operation automatically starts in conjunction with the RF power supply s RF ON command 3 Manual matching operation Press the MANUAL button The green LED turns off Operate the positions of th...

Страница 61: ...LT function selection screen Point the cursor to REC and press the ENT key to display the preset selection screen Preset load screen Select the preset number and press the ENT key to move the positions of the variable capacitors 3 2 Preset configuration In manual mode move the variable capacitors to the positions you wish to register Afterward press the ENT key on the variable capacitor position d...

Страница 62: ...o register 1 to 16 and press the ENT key to display the set preset name screen Set preset name screen You can change the string with the arrow keys After determining the name confirm the preset name by pressing the ENT key and the variable capacitor position display screen is displayed Position display screen Please insert an AMC cable before starting AMC 9L When started without the above method p...

Страница 63: ...atic mode by opening AMC EXT pins 1 9 on the automatic matching controller Automatic matching starts with RF ON For the AMC EXT connector s pin assignments see Figure 4 7 3 Manual matching operation Switch between automatic and manual with the automatic matching controller s AMC EXT connector Select manual mode by shorting AMC EXT pins 1 9 on the automatic matching controller The positions of the ...

Страница 64: ...n 2 Automatic matching operation Switch between automatic and manual with the automatic matching controller s AMC EXT connector Select automatic mode by opening AMC EXT pins 1 9 on the automatic matching controller Automatic matching starts with RF ON For the AMC EXT and PRESETconnectors pin assignments see Figure 4 7 and 4 8 The positions of the variable capacitors cannot be changed by external c...

Страница 65: ...saved to the specified PRESET number by closing PRESET connector pins 1 9 Figure 5 3 Timing chart during external preset saving AUTO MANUAL switch AMC EXT 1 9 Open Close Open Close SELECT1 SELECT 3 11 SELECT2 SELECT 4 12 SELECT3 SELECT 5 13 SELECT4 SELECT 6 14 PRESET SELECT 1 9 Close Open 100 ms or more 50 ms or more ...

Страница 66: ...he TUNE variable capacitor serves to terminate at 50 Ω and the MATCH variable capacitor serves for phase correction The load impedance is matched to the RF power supply s output impedance by these variable capacitors thereby becoming able to efficiently supply power to the load TUNE C1 MATCH C2 RF IN RF OUT L Figure 5 4 Timing chart during external recall operation loading AUTO MANUAL switch AMC E...

Страница 67: ...d increase or decrease the number of coil short circuits or add a fixed capacitor Reference The air core coil and variable capacitors will oxidize if touched with bare hands Wear gloves when you must touch them Symptom Cause Corrective action Can match at the minimum value of the MATCH variable capacitor Insufficient coil L short circuits L is too large Short coil across 2 or 3 more turns Can matc...

Страница 68: ...ent matching adjustment Try greatly changing the number of coil short circuits Short all turns or short 5 3 3 Increasing and decreasing the number of coil short circuits To increase or decrease the number of coil turns open the matching box s maintenance side and short as shown in Figure 5 6 Coil shorting method After changing the number of coil short circuits make sure not to forget to tighten th...

Страница 69: ...ypes may be changed without prior notice because of the end of production or other reasons Shocks from falls or excessive stress may damage the fixed capacitor Excessive tightening torque may also damage it Please tighten to a tightening torque of 147 N cm or lower About the MATCH value Adjust the MATCH variable capacitor by increasing or decreasing the coil s short circuits so that the capacity i...

Страница 70: ...g fan 4 to 5 years 2 Electrolytic capacitor 4 to 5 years 3 DC DC converter 4 to 5 years 4 Switching power supply 4 to 5 years Power supply for internal device control 5 Fuse 4 to 5 years 6 Flow meter 4 to 5 years 7 Cooling plate 5 to 7 years The cooling plate may clog because of the water quality Basically handle by internal cleaning Note The recommended replacement period is not a guarantee of a ...

Страница 71: ...eriodic maintenance Recommended replacement period Comments 1 Cooling fan 4 to 5 years 2 Vacuum variable capacitor 3 to 4 years 1 million cycles at 50 variability bellows lifespan 4 million cycles at 30 variability 3 Cooling pipe 5 to 7 years Basically handle by internal cleaning The cooling pipe may clog because of the water quality 4 Motor 5 to 7 years 5 Potentiometer 3 to 4 years 6 Gear 3 to 4 ...

Страница 72: ... control The recommended replacement period is not a guarantee of a product s lifespan The rate of consumption of these products may also greatly differ according to the frequency of system usage In order to use this system for many years to come please ask ULVAC to periodically overhaul the system using the above table as a reference Table 6 3 Matching controller recommended replacement parts ...

Страница 73: ...pins 1 14 are not jumpered shorted The interlock on the matching box output side panel is not released Refer to item 3 3 in the matching box installation and ensure the output surface panel is firmly making contact For the interlock when the cover is open press the control panel s off button or close external control connector INTERFACE pins 2 15 to clear 4 INTERLOCK ALARM is not displayed on the ...

Страница 74: ... decrease Insufficient matching adjustment See 5 3 Matching adjustment and adjust matching Not discharging Check the discharge conditions like gas pressure etc 3 Variable capacitors not operating in manual mode Auto matching controller problems Contact ULVAC Mechanical problems Check the coupling connecting the variable capacitors and motor to see if it slides Electrical problems Contact ULVAC Cab...

Страница 75: ...External view RFS 1350L External view RFS 13100L External view RFS 2750L External view RFS 2775L External view MBX 1305L MBX 1305Lu External view MBX 1310L External view MBX 1330L External view MBX 1330Lu External view MBX 1350L External view MBX 13100L External view MBX 2750L External view MBX 2775L External view AMC 8L AMC 8LT External view AMC 9L AMC 9LT External view ...

Страница 76: ...ernal view ＭＡＤＥＩＮＪＡＰＡＮＲＳ２３２ＣＭＢＳＩＧＮＡＬＯＳＣＩＮＩＮＴＥＲＦＡＣＥＣＯＮＴＲＯＬＩＮＰＵＴＭ４ＧＮＤＯＵＴＰＵＴＳＴＡＮＤＢＹＩＮＴＥＲＬＯＣＫＲＦＯＮＡＬＡＲＭＲＦＳ１３０５Ｌ１３ＭＨｚ５００ＷＲＦＧＥＮＥＲＡＴＯＲＯＵＴＰＵＴＭＡＩＮＯＮＯＦＦＯＳＣＩＮＲＳ２３２ＣＣＯＮＴＲＯＬＩＮＴＥＲＦＡＣＥ２００２２０Ｖ５０６０ＨｚＩＮＰＵＴＭＢＳＩＧＮＡＬＮＰＡＩＲＩＮＡＩＲＯＵＴＡＩＲＩＮ ...

Страница 77: ...ＲＦＧＥＮＥＲＡＴＯＲＲＦＳ１３１０ＬＡＬＡＲＭＲＦＯＮＳＴＡＮＤＢＹＭＡＤＥＩＮＪＡＰＡＮＩＮＰＵＴＯＮＯＦＦＯＵＴＰＵＴＯＵＴＬＥＴＩＮＬＥＴＩＮＴＥＲＦＡＣＥＯＳＣＩＮＲＳ２３２ＣＣＯＮＴＲＯＬ２００２２０Ｖ５０６０ＨｚＭＢＳＩＧＮＡＬＮＰＲＳ２３２ＣＣＯＮＴＲＯＬＯＳＣＩＮＭＢＳＩＧＮＡＬＦＬＯＷＩＮＴＥＲＦＡＣＥＩＮＰＵＴＯＵＴＰＵＴＭ４ＧＮＤＩＮＬＥＴＰＴ１４ＯＵＴＬＥＴＰＴ１４ The flow meter is an optional accessory ...

Страница 78: ...ＯＷＯＳＣＩＮＭＢＳＩＧＮＡＬＩＮＰＵＴＯＵＴＰＵＴＭ４ＧＮＤＩＮＬＥＴＰＴ３８ＯＵＴＬＥＴＰＴ３８ＲＦＳ１３３０Ｌ１３ＭＨｚ３ｋＷＲＦＧＥＮＥＲＡＴＯＲＯＵＴＬＥＴＩＮＬＥＴＦＬＯＷＶＲ２ＶＲ１ＶＣ１１ＶＣ１２ＶＣ２２ＶＣ２１ＶＣ３ＯＳＣＩＮＩＮＴＥＲＦＡＣＥＣＯＮＴＲＯＬＲＳ２３２ＣＭＡＩＮＯＦＦＯＮＲＦＯＮＡＬＡＲＭＩＮＴＥＲＬＯＣＫＳＴＡＮＤＢＹ５０６０ＨｚＩＮＰＵＴＯＵＴＰＵＴ３２００２２０ＶＭＢＳＩＧＮＡＬＮＰ The flow meter is an optional accessory ...

Страница 79: ...l view RFS 1350LH 13MHz 5kW RF GENERATOR ＯＳＣＩＮＦＬＯＷＦＬＯＷＣＯＮＴＲＯＬＩＮＴＥＲＦＡＣＥＲＳ２３２ＣＭＢＳＩＧＮＡＬＭＡＩＮＩＮＰＵＴＯＵＴＰＵＴ５０６０ＨｚＯＵＴＬＥＴＩＮＬＥＴＯＮＯＦＦ３２００２２０ＶＭＡＤＥＩＮＪＡＰＡＮＯＳＣＩＮＭＢＳＩＧＮＡＬＣＯＮＴＲＯＬＦＬＯＷＩＮＰＵＴＭＡＩＮＭ４ＧＮＤＲＳ２３２ＣＩＮＴＥＲＦＡＣＥＯＵＴＰＵＴＩＮＬＥＴＰＴ３８ＯＵＴＬＥＴＰＴ３８ＮＰ ...

Страница 80: ...RF Power Supply and Matching Box 72 N P MADE IN JAPAN ALARM ESC ENT OUTPUT RF POWER CONTROLLER TARGET OSC Vdc OP TIME LIFE Vpp ON RESET OFF Figure 8 5 RFP L external view ...

Страница 81: ...RF Power Supply and Matching Box 73 Figure 8 6 RFS 13100L external view ...

Страница 82: ...ng Box 74 Figure 8 7 RFS 2750L external view I NTERFACE OSC I N MB SI G MAIN 27MHz 7 5kW RF GENERATOR RFS 2775L RS 2 32 C 55 kg NP GND I NPUT I N LET OUTLET RFOUT OUTLET 3 8 INPUT GND MB SIGNAL OSC IN INTERFACE RF OUT INLET 3 8 ...

Страница 83: ...ng Box 75 Figure 8 8 RFS 2775L exterinal view I NTERFACE OSC I N MB SI G MAIN 27MHz 7 5kW RF GENERATOR RFS 2775L RS 2 32 C 55 kg NP GND I NPUT I N LET OUTLET RFOUT OUTLET 3 8 INPUT GND MB SIGNAL OSC IN INTERFACE RF OUT INLET 3 8 ...

Страница 84: ...RF Power Supply and Matching Box 76 Figure 8 9 MBX 1305L MBX 1305Lu external view N P MB SIGNAL AMC IN DETOUT RF IN ＧＮＤＲＦＩＮＭＢＳＩＧＮＡＬＤＥＴＯＵＴＡＭＣＩＮ４Ｍ４２０ φ６１０Ｍ６ INTERLOCK ＡＩＲＩＮＡＩＲＯＵＴ３Ｍ６ ...

Страница 85: ...gure 8 10 MBX 1310L external view N P DET OUT ＭＢＳＩＧＮＡＬ MADE I N JAPAN ３Ｍ６ＧＮＤ１０Ｍ６２０ φ６ＲＦＩＮＭＢＳＩＧＮＡＬＦＡＮＩＮＬＥＴＰＴ１４４Ｍ４ＡＭＣＩＮＯＵＴＬＥＴＰＴ１４ INTERLOCK ＤＥＴＯＵＴ AMC I N ＩＮＬＥＴＯＵＴＬＥＴＲＦＩＮＭＢＸ１３１０ＬＡＩＲＩＮＡＩＲＯＵＴＡＩＲＯＵＴ ...

Страница 86: ...ox 78 Figure 8 11 MBX 1330L external view N P DET OUT ＭＢＳＩＧＮＡＬ MADE IN JAPAN ３Ｍ６ＧＮＤ１０Ｍ６２０ φ６ＲＦＩＮＭＢＳＩＧＮＡＬＩＮＬＥＴＰＴ１４４Ｍ４ＡＭＣＩＮＯＵＴＬＥＴＰＴ１４ INTERLOCK ＤＥＴＯＵＴ AMC IN ＩＮＬＥＴＯＵＴＬＥＴＲＦＩＮＭＢＸ１３３０ＬＡＩＲＩＮＡＩＲＯＵＴＡＩＲＯＵＴ ...

Страница 87: ...RF Power Supply and Matching Box 79 Figure 8 12 MBX 1330Lu external view AMC IN MB SIGNAL RF IN DET OUT N P MBX 1330Lu INTERLOCK AIR ...

Страница 88: ... Box 80 Figure 8 13 MBX 1350L external view ＡＭＣＩＮＭＢＳＩＧＮＡＬＶＤＣＯＵＴＯＵＴＬＥＴＩＮＬＥＴ MADE IN ＤＥＴＯＵＴＲＦＩＮ MBX 1350L N P ２５ｋｇ３６２Ｍ６ＧＮＤＲＦＩＮＡＭＣＩＮＭＢＳＩＧＮＡＬＶＤＣＯＵＴＯＵＴＬＥＴＰＴ３８ＩＮＬＥＴＰＴ３８ＤＥＴＯＵＴ INTERLOCK １６６ＡＩＲＩＮＡＩＲＯＵＴ ...

Страница 89: ...ir RF IN MB SIGNAL Bottom interlock Has hole on rear surface to install a capacitor 25Kg 危険 DANGER 121 5 200 70 160 ELECTRIC SHOCK 感電注意 DANGER 危険 CAUTION 注意タップ位置の変更後はネジがしっかり締っていることを確認してください Confirm whether a screw is firmly tight after you change tap position MADE IN JAPAN N P MBX 13100L2 DET OUT OUT LET INLET 25 ...

Страница 90: ... and Matching Box 82 Figure 8 15 MBX 2750L external view RF IN DET OUT MB SIGNAL AMC IN MBX 2750L N P MADE IN JAPAN 25Kg 2 PT1 4 φ8 10 M4 AIR 9 M6 DIN 7 16 connector GND OUTLET INLET INTERLOCK GND M4 20mm M4 3 M4 AIR ...

Страница 91: ... Box 83 Figure 8 16 MBX 2775L exterinal view N P MADE IN J A PA N MB X 2 7 7 5 L MB SIGNAL AM C IN DETOUT RF IN OUTLET PT 3 8 INLET PT 3 8 INTERLOCK 3 M 6 1 4 M 6 FAN M 6 GND IN LET OUTL ET MB S IGNAL DE TOUT RF IN AM C IN AIR IN ...

Страница 92: ...RF Power Supply and Matching Box 84 Figure 8 17 AMC 8L AMC 8LT external view ...

Страница 93: ... Supply and Matching Box 85 Figure 8 18 AMC 9L AMC 9LT external view AUTO ALM ESC ENT MATCH TUNE MATCH 0 99 MANUAL RESET MATCHING CONTROLLER TUNE 99 0 NP GND AC 100V FLASH RS 232C DET IN AMC OUT AMC EXT PRESET ...

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