Ulvac RFS-1305L, Инструкция по эксплуатации, Страница: 58 / 93

RF Power Supply and Matching Box 5. Operation
50
5-1-4. RF output timing
The timing from pushing the RF ON key and until outputting power is shown below.
RF starts to be output after 10 ms elapses with the RF ON key in the pressed state.
See Table 5-1 for the RF output rise time.
Minimum
value Model
30 ms RFS-1310L RFS-1330L RFS-1350LH
RFS-2750L RFS-2775L
50 ms RFS-1305L
200 ms RFS-13100L
* Can be changed with the user soft start function
* If the OFF key is pressed during RF operation, RF output stops in all situations.
Figure 5-1 RF output timing chart
Table 5-1 Rise time by model
ON key
(Soft recognition)
Press
RF output
10 ms Rise time