RF Power Supply and Matching Box
3. Setup
24
Chamber
GND
A
M
C
D
E
T
M
B
-S
IG
R
F
*
A
C
IN
P
U
T
3Φ
20
0V
*3
P-CONT
G
N
D
IN
T
E
R
F
A
C
E
G
N
D
A
C
P
O
W
1Φ
10
0V
A
M
C
.E
X
T
RF Power Supply Control Panel
RFP-L
*2
RF Power Supply
RFS-****L
MBX-****L
Matching Controller
AMC-***
*1
P
R
E
S
E
T
*4
3-5. System wiring
3-5-1.
Connecting cables
First check the connector names and dedicated cables between each unit, then see "
Figure 3-3
System wiring
" and connect the cables. See "
Table 3-3 Cable list
" for the cables used.
Please
prepare the wiring between the matching box and the chamber and the GND wiring yourself.
*1 The matching controller changes according to the supported matching box. (See Table 2-1)
*2 The control panel is buit into the RF power supply unit for 13 MHz 10 kW or higher/27 MHz 5 kW
or higher.
*3 Power supplies of 1 kW or lower are single-phase 200 V.
*4 Only supported by the AMC-9L./AMC-9LT
Figure 3-3 System wiring