Ulvac RFS-1305L, Инструкция по эксплуатации, Страница: 12 / 93

RF Power Supply and Matching Box 2. Overview
4
Chamber
GND
A
M
C
D
E
T
M
B
-S
IG
R
F
*
A
C
IN
P
U
T
3Φ
20
0V
*3
P-CONT
G
N
D
IN
T
E
R
F
A
C
E
G
N
D
A
C
P
O
W
1Φ
10
0V
A
M
C
.E
X
T
RF Power Supply Control Panel
RFP-L
*2
RF Power Supply
RFS-****L
MBX-****L
Matching Controller
AMC-***
*1
P
R
E
S
E
T
*4
2-3. Configuration
This system consists of an RF power supply, an RF power supply control panel, a matching box, and a
matching controller.
The system's configuration is shown in " Figure 2-1. System configuration ". The basic configuration
requires the devices below.
 RF power supply 1

RF power supply control panel 1 (On RF power supply unit for 13 MHz 10 kW or higher/
27 MHz 5 kW or higher)

Matching box 1
 Matching controller 1
*1 The matching controller changes according to the supported matching box. (See Table 2-1)
*2 The control panel is buit into the RF power supply unit for 13 MHz 10 kW or higher/27 MHz 5 kW
or higher.
*3 Power supplies of 1 kW or lower are single-phase 200 V.
*4 Only supported by the AMC-9L./AMC9LT
Figure 2-1 System configuration