Ulvac HPS-600N, Руководство по эксплуатации

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ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
5
．
Operation
51
The EB power supply generates a voltage that is enough to pose a danger to human life. Take
more than enough care in such a way as to attach a metallic cover to the high-voltage introduction
terminal so that the operator will never contact the high-voltage. For details, see
the
operations
manual of the EB gun.
6) Beam check
Slowly turn the EMISSION knob of LOCAL CONTROL BOX clockwise (CW direction). When the
EMISSION knob is at 10 or so on the scale, the filament lights up and a beam current passes. At 30
to 50 mA on the EMISSION monitor of DISPLAY, you see the beam position on the crucible.
If a beam current passes but you do not see the beam spot on the crucible, the connection of the X
coil would be wrong. In reference to the operations manual of the EB gun, check the wiring.
If the filament does not light up and no beam current passes, the cause would be a blowout of the
filament or a break or disconnection of the wiring on the loading side. Check the loading side. In
addition, if the fuses F14 and F15 on the front of the power supply main unit are blown at the instant
when the EMISSION knob is turned, the cause would be a short circuit between the right and left
terminals of the filament. In reference to the operations manual of the EB gun, check the EB gun.
If no current passes, the cause would be a break of the filament or a break, disconnection,
looseness of the cables on the loading side. Check the loading side and, if the filament is blown,
replace it or, if any error is found on the wiring, replace the wiring etc.
7) Beam center position adjustment
After checking a beam, adjust the beam position to the center of the crucible. At this time, set
Y_Current Center to 0 on the X/Y setting menu screen of DISPLAY.
For S-TYPE, turn the X-POS knob to adjust the beam position to the center of the crucible in the X-
axis direction.
In addition, the beam center position is also changed when the acceleration voltage is changed. Also
for adjustment of the center position when the acceleration voltage is changed, turn the X-POS knob
to adjust the coil current for positioning.
Basic beam deflection is done by the X coil.
The move of the beam is decided by the following two factors.
①
Acceleration voltage of power supply (High voltage)
②
Current of the XY axis coil.
(indicated on XY MONITOR)
In combination with these factors, the electron beam reaches the desired position. If any
one of these changes, the beam position moves.
DANGER
CAUTION
CAUTION