Ulvac HPS-600N, Руководство по эксплуатации, Страница: 46 / 89

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
4
．
Description of Each Part
37
1) EMISSION knob
This is for setting beam current. The range is 0 to 100.
Or the range is 0 to 100 / 0 to 1,000 mA (MAX POWER without adjustment).
2) DEFLECTION knob (Only G-TYPE)
This is for setting current passing through the DEFLECTION coil.
This generates a magnetic field for deflecting the electron beam.
Make sure that it is adjusted so that the electron beam hits the center of the crucible with the X-AXIS
POSITION knob and X-AXIS SWEEP knob set to "0."
For the G-TYPE settings, be sure to make the settings with the DEFLECTION coil current to set the
electron beam to the center of the crucible.
The XY sweep coil is a coil only for a move on the
crucible and therefore making the X
－
AXIS POSITION settings is not enough to move the electron
beam to the crucible.
3) X-AXIS POSITION knob
This is for setting the direct current passing through the X-axis of the XY sweep coil.
The beam position can be moved in the X-axis direction by changing the current.
The variable range is the X CURRENT MAX value set in the XY SCAN menu of DISPLAY.
4) X-AXIS SWEEP knob
This is for adding a triangular wave in the form superposed on the direct current passing through the
X-axis of the XY sweep coil.
This enables a beam scan in the X-axis direction.
The variable range is the X CURRENT MAX value set in the XY SCAN menu of DISPLAY.
5) Y-AXIS POSITION knob
This is for setting the direct current passing through the Y-axis of the XY sweep coil.
The beam position can be moved in the Y-axis direction by changing the current.
The variable range is the Y CURRENT MAX value set in the XY SCAN menu of DISPLAY.
6) Y-AXIS SWEEP knob
This is for adding a triangular wave in the form superposed on the direct current passing through the
Y-axis of the XY sweep coil.
This enables a beam scan in the Y-axis direction.
The variable range is the Y CURRENT MAX value set in the XY SCAN menu of DISPLAY.
In the state that LOCAL CONTROL BOX removed or when the connector of LOCAL CONTROL
BOX is removed during the operation, it is dangerous because each output becomes its minimum
value.
In addition, if the high voltage is switched to ON with the EMISSION knob not set to 0, a beam
current suddenly passes. Before switching the high voltage to ON, make sure first that the
EMISSION knob is set to 0.
CAUTION
CAUTION