Ulvac HPS-600N, Руководство по эксплуатации

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ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
4
．
Description of Each Part
21
1) INPUT receptacle
This is a receptacle for connecting the supplied INPUT cable (three-core) (Tables 3.1 and 3.2).
2) EARTH GUN GND terminal
This is a terminal for connecting the supplied EARTH GUN GND cable (14 mm 2 ) (Tables 3.1 and 3.2).
Be sure to connect the EARTH GUN GND cable.
If the EARTH GUN GND cable is not connected, it is extremely danger because the power supply
enclosure is in a floating condition.
Before turning on the power to the EB power supply, always make sure that the EARTH GUN GND
cable is connected and then turn on the MAIN circuit breaker.
Be sure to connect the EARTH GUN GND cable. If not connected, the power supply may be
damaged.
Be sure to connect between the earth terminal of the loading equipment and the EARTH GUN GND
terminal (EB power supply main unit) using the EARTH GUN GND cable. Never do wiring which goes
through the relay terminal.
3) POWER 1 receptacle
This is a receptacle for connecting the supplied POWER cable (Tables 3.1 and 3.2).
4) CONTROL 1 receptacle
This is a receptacle for connecting the supplied CONTROL cable (Tables 3.1 and 3.2).
Do not bundle signal-based cables (CONTROL cable) and power-based cables (OUTPUT cable and
EARTH GUN GND cable) together. Otherwise a malfunction due to noise may be caused.
5) SOURCE 1 junction shell
This is a junction shell for fixing the supplied OUTPUT cable (Tables 3.1 and 3.2).
The OUTPUT cable is attached to the power supply main unit with shipping.
6) EXT
．
SWEEP connector
（
Option
）
If the gun controller is S-TYPE setting, this is used for controlling the HV SWEEP function by external
signals.
7) HV MONITOR connector
This is a BNC connector for external output of the high voltage setting. (For the output part, see Fig.
4.3.)
For the signal level, see Table 2.5.)
8) EMISSION MONITOR connector
This is a BNC connector for external output of the beam current. (For the output part, see Fig. 4.3.)
For the signal level, see Table 2.5.)
CAUTION
WARNING
DANGER