Ulvac HPS-600N, Руководство по эксплуатации, Страница: 44 / 89

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
4
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Description of Each Part
35
Figure 4.12: PSG Connector Wiring
Table 4.4: Description of PSG Connector Signal
For a 4-point hearth, input the signals from crucibles 1 to 4 to HEARTH1 to HEARTH4, respectively.
For a 6-point hearth (BIT detection type EB gun), input crucibles 1 to 3 and 4 to 6 to HEARTH1 to
HEARTH 3 and input the carry bit signal to HEARTH 4.
Pin No. Pin name Description
1 HEARTH 1
Hearth 1 signal input port
2 HEARTH 2
Hearth 2 signal input port
3 HEARTH 3
Hearth 3 signal input port
4 HEARTH 4
Hearth 4 signal input port
5 COMMON
COMMON for each signal
6 MODE HV
HV line output switching signal input port
7 MODE XY
Sweep line output switching signal input port
8 OPEN
Do not connect to this port. Keep it open.
9 OPEN
Do not connect to this port. Keep it open.
1
2
3
4
5
6
7
8
9
ガンコントローラ側
HEARTH 1
HEARTH 2
HEARTH 3
HEARTH 4
COMMON
MODE HV
MODE XY
N.C
N.C
ガン側ハースポジション接点
装置側接点
On gun controller Hearth position contact of gun
Contact of equipment