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Ulvac HPS-600N Скачать руководство пользователя страница 5

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～

Introduction

iii

2. Safety symbol marks

In this operation manual and the warning display of the product main body, the symbol marks about
the safety in order to understand the matters to be observed are being put up.
The words using the symbol mark are used separately as follows.

Failure to comply with DANGER will lead to serious
personal injury or loss of life.

Works ignoring this note can lead to serious personal injury or loss of
life and/or serious damage the facilities of the plant (including this
system) at a high probability.

Failure to comply with WARNING can lead to dangerous
situations including serious injury or loss of life.

Works ignoring this note can lead to serious personal injury or loss of
life and/or serious damage to the facilities of the plant (including this
system)

Failure to comply with CAUTION can lead to dangerous
situations including slight personal injury or medium
scale of damage to the facility.

Works ignoring this note can lead to slight personal injury and/or can
bring the system into the situation that requires readjustment.

There is no direct danger, but we describe the contents which we
want you know in order to your use the system correctly on safety of
the work.

・

Danger of the operation, inspection and service in all environments can not be predicted.

・

Warning being described on the warning labels in this operation manual and on the product is not
necessarily all satisfied.

・

In handling the product, pay a careful attention by the persons who control, operate and perform
maintenance as to other than this operation manual description matters, and keep in mind for
securement of the safety so that the significant injury such as physical injury and the damage to the
product do not occur.

・

When the operation/inspection/service other than being described in this operation manual are
performed, perform the necessary consideration related to the safety on the all workers’
responsibility.

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Содержание HPS-600N

Страница 1: ...Supply Electron Beam Gun Controller Model Power Supply Main Unit HPS 600N HPS 1000N Gun Controller EGC 10GS 10th edition july 14 2022 ULVAC Inc Components Division Before using this product be sure to...

Страница 2: ...ELECTRON BEAM POWER GENERATOR HPS 600N 1000N Introduction...

Страница 3: ...derstanding it Keep this operation manual always at hand with care When changing the installation place of this product be sure to attach this operation manual to the product Due to the unit improveme...

Страница 4: ...and inappropriate inspection service work Well read the contents of the operation and the inspection service work and never operate this product until you understand it 3 The warning and the caution a...

Страница 5: ...ous situations including slight personal injury or medium scale of damage to the facility Works ignoring this note can lead to slight personal injury and or can bring the system into the situation tha...

Страница 6: ...1 Power Supply Main Unit Fig 0 2 Gun Controller Check all of these warning labels are legible and always keep them clean Use cloths and water for cleaning the warning labels Do not use gasoline and o...

Страница 7: ...product with expired guaranteed period 2 A malfunction or trouble occurred by inevitable accidents including fire wind flood lightning or war 3 A malfunction or trouble occurred by careless or imprope...

Страница 8: ...e expenses related to disposal you are kindly requested to burden it on the customer s side 7 About Service Parts To use the power supply for a longer period of time you are recommended to periodicall...

Страница 9: ...ared 12 3 4 1 Power Receiving Equipment 12 3 5 Cable Connection 14 4 Description of Each Part 18 4 1 Front panel of power supply main unit 18 4 2 Back panel of power supply main unit 20 4 3 Alarm Fuse...

Страница 10: ...primary switch of the power supply you use and leave it for 5 minutes or more before opening the cover Maintenance shall be performed by or under the instructions of an expert operator for handling hi...

Страница 11: ...kW 10 kW 4 In the event of an unusual electrical discharge of an electron gun the high voltage supply is fast stopped This limits the unusual electrical discharge and enables auto recovery 5 The circu...

Страница 12: ...able 2 1 Equipment Configuration List Type Power Supply Main Unit HPS 600N HPS 1000N Gun controller EGC 10GS 1 source type 1 unit 1 1 unit 2 source type 1 unit 2 2 units 1 A 1 source type has 100 afte...

Страница 13: ...GND CABLE DEF XY OUT CABLE OUTPUT CABLE LOCAL CONTROL BOX Front Panel Connecter OUTPUT SHIELD CABLE OUTPUT CABLE LOCAL CONTROL BOX Front Panel Connecter OUTPUT SHIELD CABLE DEF XY OUT CABLE CONTROL PO...

Страница 14: ...ection Operation method Switching method by semiconductor device High voltage breaking time 1 ms or less High voltage OFF in about 1 sec for in the case of a mechanical short circuit Downtime 10ms Hig...

Страница 15: ...ps of 1 Hz Waveform Triangular wave Sine wave Triangular wave Sine wave Deflection coil output Deflection coil G TYPE Gun only Variable range 0 4A 3 5A Voltage 24V Fluctuation ratio 2 or less Frequenc...

Страница 16: ...x 50A 1V 50Amax Waveform output EMISSION MONITOR 0 1 0A 0 5V 0 1 0A 0 5V DC output HV MONITOR 2 6kV 2 5V 4 10kV 2 5V Waveform output Gun controller G TYPE Monitor output DEF CUR MONITOR 1A 1V Max 3 5A...

Страница 17: ...ltage with the same pin number 2 Common ports high voltage beam current and magnet coil common ports of each program connector and each monitor terminal need to be in a floating condition at a withsta...

Страница 18: ...ies list check the number of parts See Table 3 1 Table 3 1 Standard Accessories List G TYPE Accessories Name Specifications Quantity 1 source 2 source EARTH GUN GND Cable 14mm2 1 6m 1 1 INPUT Cable 14...

Страница 19: ...12 20 4 4 1 Attached to the power supply main unit 2 Spare The required number of the parts is attached to the actual unit 3 One is used for the actual unit and the other is a spare 4 Optional functio...

Страница 20: ...th a rack mount needs to provide sufficient ventilation so that the temperature in the rack does not exceed the specification temperature Provide sufficient ventilation so that the ambient temperature...

Страница 21: ...the gun controller may be caused 3 4 Things to be Prepared Do not use any parts that does not satisfy the electrical and mechanical specifications described on this operations manual 3 4 1 Power Rece...

Страница 22: ...EB power supply main unit using the EARTH GUN GND cable Never do wiring which goes through the relay terminal In addition sufficiently tighten the nuts so that there is no looseness If an earth conne...

Страница 23: ...g method Be sure to connect the EARTH GUN GND cable If the EARTH GUN GND cable is not connected it is extremely danger because the power supply enclosure is in a floating condition Before turning on t...

Страница 24: ...he EB gun The shielding and earthing of a high voltage cable is very important process as a measure against noise occurrence and safety Any operation without this process may cause damage to the power...

Страница 25: ...4 shows the correspondence between connector pins and output For connection on the side of the EB gun loading see the operations manual of the EB gun Table 3 4 DEF XY OUT Cable Connection G TYPE gun...

Страница 26: ...g 4 10 in Section 4 Explanatory Drawing and connect it to the PROGRAM receptacle on the back of the gun controller 6 Three phase input power supply Insert the plug side of the supplied INPUT cable thr...

Страница 27: ...ion of Each Part This section describes the name of each part of this product In addition how to connect each unit is described here For the external dimension drawing of each unit see the attached da...

Страница 28: ...Remember the position of the EMO button to avoid pressing by mistake during the operation but enable one to press immediately in an emergency 5 HV ON indicator Red This lights up when a high voltage i...

Страница 29: ...ELECTRON BEAM POWER GENERATOR HPS 600N 1000N 4 Description of Each Part 20 4 2 Back panel of power supply main unit Figure 4 2 Back view of HPS 600N 1000N...

Страница 30: ...wiring which goes through the relay terminal 3 POWER 1 receptacle This is a receptacle for connecting the supplied POWER cable Tables 3 1 and 3 2 4 CONTROL 1 receptacle This is a receptacle for conne...

Страница 31: ...or external output of the filament current For the output part see Fig 4 3 For the signal level see Table 2 3 Figure 4 3 Monitor Terminal Output Drawing GUN GND 15 V BNC terminal GUN GND 499 2k 1k 1 k...

Страница 32: ...his enables one to turn on off the power supply and to turn off trip the MAIN circuit breaker by external contacts For a self holding type make connections following Fig 4 4 For a single contact type...

Страница 33: ...or for the 2nd source for a 2 source type 16 EMISSION MONITOR connector This is a BNC connector for external output of the beam current For the output part see Fig 4 3 This is the connector for the 2n...

Страница 34: ...he EB power supply and your main breaker for the EB power supply and leave them for 5 minutes or more Shutting off only the MAIN circuit breaker for the EB power supply is not enough because under tha...

Страница 35: ...the power circuit of the 1 source gun controller T phase FUSE_BOX in the front of the power supply F 14 5A 1 Protection of the power circuit of the 1 source filament S phase FUSE_BOX in the front of t...

Страница 36: ...switched to ON by the external signal of the INTERLOCKS connector The gun controller ON switch is disabled 3 HIGH VOLTAGE ON switch This is used to switch the high voltage to ON under the conditions w...

Страница 37: ...nd 3 2 This is the power supply part for the gun controller 2 INTERLOCKS receptacle This is a receptacle for connecting the supplied INTERLOCKS connector Tables 3 1 and 3 2 Connect the INTERLOCKS conn...

Страница 38: ...filament This function enables the installation check at the time of replacement of a filament of the EB gun and the degassing of the filament You can use the DEGAS function by setting the degassing...

Страница 39: ...supply POWER When the state whether the main power is supplied to the EB power supply is monitored and it is supplied properly INTERLOCK is OK COOLING Monitors whether the temperature in the EB power...

Страница 40: ...to ensure human safety and prevent damage to the EB gun Therefore be sure to avoid any wiring which may short circuit the interlocks and operation with the interlocks short circuited because they are...

Страница 41: ...ge common High voltage sweep control Beam current common High voltage control Beam current control Y axis position control Y axis sweep control X axis position control X axis sweep control Magnet comm...

Страница 42: ...500 VAC or more above the earth and the portions between the common ports need to be insulated 7 DEF CUR X CUR MONITOR connector This is the connector for monitoring the current passing through the DE...

Страница 43: ...nal command the contact closes 4 EMI_EXT When the EMISSION output can be controlled by an external command the contact closes 5 SP_EXT When the XY output can be controlled by an external command the c...

Страница 44: ...to HEARTH 4 Pin No Pin name Description 1 HEARTH 1 Hearth 1 signal input port 2 HEARTH 2 Hearth 2 signal input port 3 HEARTH 3 Hearth 3 signal input port 4 HEARTH 4 Hearth 4 signal input port 5 COMMO...

Страница 45: ...ocal Control Box 0 10 20 30 40 50 60 70 80 90 100 EMISSION LOCAL CONTROL BOX SWEEP POSITION X AXIS 0 1 2 3 4 5 6 7 8 9 10 5 4 3 2 1 0 1 2 3 4 5 SWEEP POSITION Y AXIS 0 1 2 3 4 5 6 7 8 9 10 5 4 3 2 1 0...

Страница 46: ...in the XY SCAN menu of DISPLAY 4 X AXIS SWEEP knob This is for adding a triangular wave in the form superposed on the direct current passing through the X axis of the XY sweep coil This enables a bea...

Страница 47: ...e done by LOCAL CONTROL BOX 0 10 20 30 40 50 60 70 80 90 100 EMISSION LOCAL CONTROL BOX SWEEP POSITION X AXIS 0 1 2 3 4 5 6 7 8 9 10 SWEEP POSITION Y AXIS 0 1 2 3 4 5 6 7 8 9 10 5 4 3 2 1 0 1 2 3 4 5...

Страница 48: ...he Y axis direction by changing the current The variable range is the Y CURRENT MAX value set in the XY SCAN menu of DISPLAY 5 Y AXIS SWEEP knob This is for adding a triangular wave in the form superp...

Страница 49: ...r supply without looseness Check whether the current capacity of your fuse box or circuit breaker is 50 A or more 3 Earth check Check that the system earth terminal of the equipment on the loading sid...

Страница 50: ...currence and safety Any operation without this process may cause damage to the power supply and very dangerous So make sure that it is checked Do wiring following Fig 2 1 At this time never coil or pl...

Страница 51: ...RAM connector are securely connected and whether the connections of the connectors are correctly made See Figs 4 9 and 4 10 Each interlock is provided to ensure human safety and prevent damage to the...

Страница 52: ...you use For the setting values see the instructions manul of the EB gun 2 EB power supply ON When the MAIN circuit breaker of the EB power supply is switched to ON each indicator lights up and the DEF...

Страница 53: ...Output current upper limit setting 1 2A Y CURRENT CENTER Output current OFFSET position setting 0A INTLK HIGH MAGNET coil resistance value upper limit setting 4 5 INTLK LOW MAGNET coil resistance valu...

Страница 54: ...ELECTRON BEAM POWER GENERATOR HPS 600N 1000N 5 Operation 45...

Страница 55: ...is switched from INTLK NG Red to INTLK OK Green If there is any interlocks that are not released it does not indicate INTLK OK even when Key is switched Check the points that are not released in the I...

Страница 56: ...d the DEFLECTION current at this point too When adjusting the beam center position do not adjust the position with X POSITION of the XY sweep coil Basic beam deflection is done by the DEFLECTION coil...

Страница 57: ...In the same way make adjustments for both the X axis and Y axis When the limit indication warning bar lights up no more current passes It always need to be used within the range in which the limit ind...

Страница 58: ...arge For HPS 1000N if an unusual electrical discharge occurs and a large current passes the overcurrent protection circuit is activated and the beam current and the high voltage are shut down After th...

Страница 59: ...llowance and the lower limit almost without allowance If the current of the deflection coil or the X axis coil is changed MAG INTLK may be activated Check the resistance value of the coil and adjust t...

Страница 60: ...SION knob is turned the cause would be a short circuit between the right and left terminals of the filament In reference to the operations manual of the EB gun check the EB gun If no current passes th...

Страница 61: ...the X Y menu In the same way make adjustments for both the X axis and Y axis When the limit indication warning bar lights up no more current passes It always need to be used within the range in which...

Страница 62: ...in the range from 4 to 10 kV and therefore this is not an error Therefore use the high voltage sweep size within the range shown in Fig 5 1 Figure 5 1 Allowable Range of HV SWEEP Settings HV SWEEP ado...

Страница 63: ...rent passes the overcurrent protection circuit is activated and the beam current and the high voltage are shut down After that it automatically recovers to a steady state Also for a lasting vacuum dis...

Страница 64: ...s are in a floating condition 4 Beam current common ports connect to the system ground of the EB gun via GUN GND 5 The magnet common port is introduced into the vacuum device via the current feedthrou...

Страница 65: ...amaged 2 High voltage ON by external contact The high voltage is switched to ON by external contact signals For high voltage ON by external contact signals do the wiring following Fig 4 9 3 Start of v...

Страница 66: ...appears when other errors occur in the gun controller When this occurs the GUNCONT READY part turns from green to red in the INTLK menu on the gun controller screen 1 OVER LOAD This appears when an a...

Страница 67: ...by pressing the RESET button on the gun controller after the internal temperature is reduced sufficiently If OVER TEMP frequently occurs check whether the temperature around the gun controller is with...

Страница 68: ...Incomplete earth is very dangerous to the human body Thoroughly check that the cable connections are not loose or insufficiently long Do the wiring following Fig 3 1 4 Never use in a wet environment A...

Страница 69: ...en the DEF XY OUT cable or the XY cable the current introduction terminal and the magnet coil loose In addition is there any dissolution of coating of the wiring or film entirely deposited NOTE 5 6 Is...

Страница 70: ...igh voltage introduction terminals produce heat and are burned In addition due to deposited film on the cable and isolation insulator the magnet coil current does not pass through the magnet coil and...

Страница 71: ...ing Class A with a ground resistance of 10 or less Is there looseness at the connections NOTE 10 3 Clean the inside of the power supply Wipe out with cloths impregnated with alcohol or blow off the du...

Страница 72: ...connections are not loose or insufficiently long For provisions on the earth see Fig 3 2 NOTE 11 The EB power supply produces a high voltage inside and dust builds up on the part where the high voltag...

Страница 73: ...7 years 8 MAIN circuit breaker 7 years 9 High voltage detection resistor 7 years 1 The recommended replacement period of years does not guarantee the parts lifetime The consumption rates of these par...

Страница 74: ...ions on the earth see Fig 3 1 3 Never use in a wet environment An electric shock may occur even at a low voltage If water leakage or the like occurs be sure to wipe out water and dry before use 4 Use...

Страница 75: ...ELECTRON BEAM POWER GENERATOR HPS 600N 1000N 7 Troubleshooting 66...

Страница 76: ...crucible by turning the deflection knob Breakdown of the power supply Contact us 1 Switch failure 2 Meter failure Wiring of INTERLOCKS connector 1 See Fig 4 5 High voltage ground fault 1 EB gun emitte...

Страница 77: ...upply main unit is turned off Check which fuse is blown following Fig 4 1 For the correspondence see Section 6 below C The fan is stopped Check the fan rotation If a foreign substance stops it remove...

Страница 78: ...the high voltage introduction terminal Replace it if there is extreme dirt on the insulator due to deposited film D Occurrence of glow electric discharge Check the pressure Set the pressure to 5 x 10...

Страница 79: ...mmand signal are 0 B Glow discharge occurs Check whether a glow discharge occurs in the vacuum chamber Check that the pressure is 5 x 10 3 Pa or less C Unusual electrical discharge occurs Check whethe...

Страница 80: ...tor is conducting by deposited film replace it E Dirt on magnet lead wire Check the magnet lead wire in the vacuum chamber Replace with new one if there is extreme deposited film on the cable F DEF MI...

Страница 81: ...und fault of the XY SWEEP coil cable Check the XY scan coil cable If there is a break point or a ground fault point repair it 7 The beam position moves during the vapor deposition A Charging up of vap...

Страница 82: ...low is attached Figure 8 1 Power Supply Main Unit External View of HPS 1000N Figure 8 2 Gun Controller External View of EGC 10GS Figure 8 3 G TYPE Local Control Box External View Figure 8 4 S TYPE Loc...

Страница 83: ...ELECTRON BEAM POWER GENERATOR HPS 600N 1000N 8 Attached Data 74 Figure 8 1 Power Supply Main Unit External View of HPS 1000N 2 source type...

Страница 84: ...ELECTRON BEAM POWER GENERATOR HPS 600N 1000N 8 Attached Data 75 Figure 8 2 Gun Controller External View of EGC 10GS...

Страница 85: ...Local Control Box for G TYPE External View 0 10 20 30 40 50 60 70 80 90 100 EMISSION LOCAL CONTROL BOX SWEEP POSITION X AXIS 0 1 2 3 4 5 6 7 8 9 10 5 4 3 2 1 0 1 2 3 4 5 SWEEP POSITION Y AXIS 0 1 2 3...

Страница 86: ...20 30 40 50 60 70 80 90 100 EMISSION LOCAL CONTROL BOX SWEEP POSITION X AXIS 0 1 2 3 4 5 6 7 8 9 10 SWEEP POSITION Y AXIS 0 1 2 3 4 5 6 7 8 9 10 5 4 3 2 1 0 1 2 3 4 5 0 1 2 3 4 5 6 7 8 9 10 82 00 156...

Страница 87: ...Lead Hg Mercury Cd Cadmium Cr6 Hexavalent chromium PBB Polybrominated biphenyl PBDE Polybrominated diphenyl ether SJ T11364 This table is prepared according to the provisions of SJ T 11364 2014 GB T 2...

Страница 88: ...ELECTRON BEAM POWER GENERATOR HPS 600N 1000N 8 Attached Data 79 Attachment 8 2 CE Delaration of Conformity...

Страница 89: ...ELECTRON BEAM POWER GENERATOR HPS 600N 1000N 80...

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