Ulvac HPS-600N, Руководство по эксплуатации, Страница: 71 / 89

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
6. Maintenance
62
6.2. Periodical inspection
Be sure to switch the three-phase input power supply of the EB power supply to OFF before inspection.
Table 6.2: Periodical Inspection Check List
Item Inspection and Work Description
Inspection period *1
Remarks
Trans-
ference
3 months 1 Year
1
Is there any looseness at the connections of the INPUT cable with
your fuse box.
○ ○ NOTE 9
2
Is the system earth terminal grounded following Class A with a
ground resistance of 10Ω or less? Is there looseness at the
connections?
○ ○
NOTE 10
3
Clean the inside of the power supply.
Wipe out with cloths impregnated with alcohol or blow off the dust
on the power supply by air outdoors.
○ NOTE 11
4
Is the fuse capacity the same as that in Table 4.1?
○ ○
5
Is any state found that replacement is needed due to dirt on the
surface on the vacuum side of the high voltage introduction
terminal which is caused by the evaporant turning around?
○ ○ NOTE 2
6
Is each cable damaged?
○ ○
7
Is the shield line of the OUT PUT cable connected to the system
earth terminal? In addition, is there any looseness?
○ ○ NOTE 12
For 18 hr/day operation