Ulvac HPS-600N, Руководство по эксплуатации

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ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
5
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Operation
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If OVER LOAD appears on DISPLAY, take time until the blink of the OVERLOAD indicator is
reduced without applying power forcedly. This is due to electric discharge by gas generated from
the evaporation material and the blink of the OVER LOAD indication is reduced when the discharge
amount of gas becomes low.
With the sweep function of the X-axis and Y-axis magnet coils, the degassing of the evaporation
material can be done quickly.
In the degassing process of the evaporation material, a local discharge phenomenon appears
(unusual electrical discharge). For HPS-1000N, if an unusual electrical discharge occurs and a large
current passes, the overcurrent protection circuit is activated and the beam current and the high
voltage are shut down. After that, it automatically recovers to a steady state. Also for a lasting
vacuum discharge, the overcurrent protection circuit works to reduce the beam current and an
electric discharge becomes harder to occur.
14) End of vapor deposition
After a given film thickness is obtained, set the beam current to 0 and switch the high voltage to OFF.
EISSION knob: 0
High voltage button: OFF
Key switch: LOCK
The operation is now completed.
15) EB gun cooling
Even after the vapor deposition is finished, it takes approx. 15 to 20 minutes until the temperature of
the evaporation material and the emitter assembly becomes low.
In addition, if the vacuum chamber needs to be at the atmospheric pressure, you are recommended
to introduce inert gas to prevent oxidation.
REFERENCE
REFERENCE