Ulvac HPS-600N, Руководство по эксплуатации

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ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
5
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Operation
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5.4. Power supply error state
The error states detected by the power supply and the controller and the descriptions are as follows.
In addition, how to take measures against each ALARM is described. See this list in reference to 7.
Troubleshooting.
Table 5.5: ALARM List of Power Supply Main Unit and Gun Controller
Unit ALARM name Content
Power supply
OVER LOAD
This appears at unusual electrical discharge.
The OVER LOAD indicator on the front panel of the power supply lights up.
When OVER LOAD is appearing, the number displayed in the monitor in the
gun controller screen is red. When the OVER LOAD state continues for a
given period of time, OVER LOAD appears on the gun controller screen.
FUSE
This appears when a blowout of any one of FUSE in the power supply
occurs.
The FUSE indicator on the front panel of the power supply is turned off.
When this occurs, the FUSE INTLK part turns from green to red in the
INTLK menu on the gun controller screen.
THERMAL
This appears when temperature anomaly in the power supply occurs.
When this occurs, the FUSE INTLK part turns from green to red in the
COOLING INTLK menu on the gun controller screen.
Gun controller
OVER CURRENT
This appears when a output current error to the gun coil is detected.
When this occurs, OVER CURRENT appears on the gun controller screen.
OVER TEMP
This appears when a output current error to the gun coil is detected.
When this occurs, OVER CURRENT appears on the gun controller screen.
GUNCONT READY
This appears when other errors occur in the gun controller.
When this occurs, the GUNCONT READY part turns from green to red in
the INTLK menu on the gun controller screen.
1) OVER LOAD
This appears when an abnormal electric discharge by loading is detected. When it is detected, the HV
output is shut off for 10 msec.
A momentary abnormal electric discharge is self-recovered but, if an EMISSION current of 1,000 mA
or more passes for 1 second or more, the output is stopped. The state continues until the breaker is
turned off. Do the breaker cycle and check that the current is output again. If the output is stopped
repeatedly by OVER LOAD, it would be an error in loading.
2) FUSE
This appears when FUSE in the power supply is blown. While FUSE ALARM is activated, the HV
output cannot be used in a INTLK state.
Read through "4.2 Alarm Fuse" and replace FUSE. If it is not recovered even after the process, the
internal circuit would be broken. Contact our plant.
3) THERMAL
This appears when temperature anomaly in the power supply is detected. While TEHRMAL ALARM
is activated, the HV output is not available in an INTLK state. After the output is stopped and the
internal temperature decreases sufficiently, it automatically recovers and the HV output becomes
available again. THERMAL ALARM does not occur under normal conditions. If it frequently occurs,
check whether the temperature around the power supply is within the range of the specification value,
whether the clearance around the power supply follows "3.3 Setup and Installation," and whether FAN
of the power supply normally operates. If there is no problem with the environment around the power
supply and THERMAL ALARM frequently occurs, internal elements would be broken. Contact our
plant.