Ulvac HPS-600N, Руководство по эксплуатации

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ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
7. Troubleshooting
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7.
Troubleshooting
In this chapter, we describe how to handle when the trouble occurred
7.1. Troubleshooting
If any trouble occurs, initial diagnosis needs to be performed following Fig. 7.1.
Details on each trouble are described in Tables 7.1 to 7.4.
The symptoms of troubles described in this section are limited to those that have been experienced or
may occur in the future. If a trouble occurs together with trouble of the EB gun, its symptom may differ
from which is described here.
Also in reference to the details on the troubleshooting described in the operations manual of the EB gun,
take measures.
1. The EB power supply generates a voltage that is enough to pose a danger to human life. If
you need to touch the EB power supply and its surroundings (including the EB gun) for
inspection etc, shut off (OFF) the MAIN circuit breaker of the EB power supply and your main
breaker for the EB power supply and then leave them for 5 minutes or more.
2. Incomplete earth is very dangerous to the human body. Thoroughly check that the cable
connections are not loose or insufficiently long. For provisions on the earth, see Fig. 3.1.
3. Never use in a wet environment. An electric shock may occur even at a low voltage. If water
leakage or the like occurs, be sure to wipe out water and dry before use.
4. Use a lead wire for connection that is not damaged and with a withstand voltage of at least
two or more times the circuit voltage. In addition, when switching the power supply MAIN
circuit breaker to ON, be careful that these does not contact the charging part.
1. Do not use the EB gun with interlocks short-circuited.
2. Maintenance shall be performed by or under the instructions of an expert operator for
handling high voltage.
3. Do not place measurement equipment in an unstable position.
4. For capacitors of a withstand voltage of 50V or more, short-circuit the portion between the
terminals and check that the electrical charge is discharged before touching it.
1. Immediately after the operation, the EB gun (especially around the emitter assembly), evaporation
material, filament lead wire, and high-voltage introduction terminal are at a high temperature. Take
care not to get burned.
2. There are many protrusions in the power supply. In cleaning of the inside, take care not to get
injured.
3. In operation in a narrow or complicated site, take extreme care not to get injured.
4. In reference to the operations manual of the EB gun, take measures.
DANGER
WARNING
WARNING