8
YK18-0012-AI-101-02
2.3 Names and works on each section
Figure 2 Name of each part
Table 1 Name of each part
Name
Description
1
Intake port
Containers or piping for vacuum exhaust are connected.
2
Exhaust port
The piping for discharging the exhausted gasses is connected.
3
Handle
It is a handle for placing your hand to lift up the product.
4
Touch panel
Status of operation, stopping, or alarm is indicated.
5
Connector panel
It is used for power supply connection, switch operation, and external
device connection.
6
Gas purge unit interface
It is an interface with the gas purge unit (option),
7
Transportation jig
It is a jig (bolt) for fixing the FP to protect the device during
transportation.
①
②
③
④
⑤
⑥
⑦
