37
YK18-0012-AI-101-02
6. Troubleshooting
6.1 Problem in basic motion
Table 19 Problem in basic motion
Problems
Cause
Responding method
Reference
The power supply
cannot be turned on.
No electric power is
supplied.
Supply electric power.
4.2.1
Electric leakage occurred
inside the machine
Contact a service center.
End
CP is shut off
Please restore breaker
2.3
Nothing appears on
the touch panel
display.
No electric power is
supplied.
Supply electric power.
4.2.1
Breakdown of instruments
Contact a service center.
End
The machine
cannot be started
up even pressing
the VAC switch.
External interlock is wired.
Release the CNSIL 1-2 PIN.
4.3.2
External interlock is wired.
Short-circuit the CNSIL 3-4 PIN
4.3.2
Breakdown of instruments
Contact a service center.
End
Breakdown of FP
Contact a service center.
End
Abnormal sound
can be heard from
the machine.
The machine is operated
with the transportation jig
kept attached.
Remove the transportation jig.
End
Breakdown of FP
Contact a service center.
End
Breakdown of TMP
Contact a service center.
End
The exhaust side is covered.
Check around the exhaust port.
3.4.1
Leakage of intake side
piping
Inspect the intake side piping and stop
the leakage.
3.4.1
The pressure cannot
be turned down/
The startup operation
cannot be completed
("TMP:NOR" is not
indicated but
"TCC;APP" is
remained)
Clogging in the intake side
mesh
Inspect the intake side piping.
3.4.1
The capacity of exhaust
receiving system is large.
Use the delay timer to delay the TMP
startup time and operate the machine.
2.4.5
Exhaust side piping is
clogged.
Inspect the exhaust side piping.
3.4.1
FP does not start up
Restore the unit to atmospheric pressure
and restart it
4.3.1
Breakdown of TMP
Contact a service center.
End
The display of "0.0 x
100" is remained even
setting P1 and P2.
Connection section is wrong. Connect
it
to
the
corresponding
connection section
4.4.1
The filament is not turned on
(only for P1)
Turn on the filament.
4.4.1
The indicated values
of P1 and P2 are
obviously different.
The model specified is
different.
Select the model of G-TRAN connected.
4.4.1
