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YK18-0012-AI-101-02
4.3 Startup and stop operation method
4.3.1 Startup and stop
FP may not start up when the machine is started with vacuum inside.
When the inside of this machine is started in a vacuum state, the FP diaphragm
may stick and may not start. In such a case, please restart after restoring the
unit to atmospheric pressure.
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How to startup
Press VAC switch on the Main screen.
Press the START switch to begin startup operation and blink the VAC switch.
If the delay time is specified, a rough pumping operation is carried out until elapsing the
specified time.
"Rough VAC" is indicated on the operational status display.
*Before the factory shipment, the delay timer is set to "0" sec.
TMP starts up when the time specified in the delay timer elapses.
"TMP:ACC" is indicated on the operational status display.
When the startup operation of the TMP completes, the VAC switch turns into lighting from
blinking.
"TMP:NOR" is indicated on the operational status display.
When "TMP:NOR" is indicated on the operational status panel, the startup operation of this
machine is completed.
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How to stop
Press VAC switch on the Main screen.
Press the STOP switch to begin stop operation and blink the VAC switch.
"Wait to STOP" is indicated on the operational status display.
During the period from stopping the FP until adequately reducing the TMP rotation, the
timer counts four minutes.
*In spite of device operation status, "Wait to STOP" operation status always transits into
"STOP" operation status after the timer counts four minutes.
When "STOP" is indicated on the operational status display, the stop operation of this
machine is finished.
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