11
YK18-0012-AI-101-02
Table 5 Explanation of main screen display
Name
Description
5
Indication of
operation status
Indicates the status of the machine
Rough VAC/Low-vacuum Pumping by FP is running (flickering VAC switch
by 0.5 sec)
TMP:ACC / TMP is accelerating (flickering VAC switch by 0.5 sec)
TMP:NOR / TMP rated operation is running (turning on the VAC switch light)
Waitto STOP / Stop operation is running(flickering VAC switch by 0.5 sec)
STOP / Completion of stopping (turning off the VAC switch light)
6
Indication of P1
pressure
Output operation value of the device is indicated when the P1 is specified
(for high -vacuum)
P1: Nothing is indicated when "NO USE" is specified
7
Indication of P2
pressure
Output operation value of the device is indicated when the P2 is specified
(for low -vacuum)
P2: Nothing is indicated when "NO USE" is specified
2.4.3 VAC screen
It is a screen to be displayed by pressing the VAC switch, used for the startup and stopping
operations of the device
.
Figure 6 VAC screen
Table 6 Explanation of VAC screen switch
Name
Description
1
START
FP starts up simultaneously with the START operation and the TMP starts
up if the time specified with the delay timer elapses.
2
STOP
FP stops and the TMP decelerates. It indicates stopping status after four
minutes.
3
Return switch
Returns to the Main screen.
▶
Product summary
②
①
③
