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YK18-0012-AI-101-02
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Disclaimer
(a) A product with expired warranty period
(b) Failures and defects caused by natural disasters including fire, wind and flood, earthquake
and thunderbolt, and unavoidable disasters including war.
(c) Failures and defects caused by careless handling or misuse.
(d) Products modified/disassembled/repaired without our permission.
(e) Failures and defects under an abnormal environment (strong electromagnetic field, radiation
environment, high temperature, high humidity, inflammable gas atmosphere, corrosive gas
atmosphere, dust).
(f) Failures and defects due to noise.
(g) Product failure or indirect damage to your company in the event of a claim by a third party to
us on violation of patents.
(h) When our engineers judge that the failures or defects are caused under the conditions of use
inappropriate to this product.
(i) Consumable articles
(j) A case in which a security seal is peeled off or a trace of peel-off is found.
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Others
（
Warranty Clause
）
(a) If there are individual contracts and memorandum related to specifications in addition to this
document, the contents in those documents prevail.
(b) Please let us know if you export this machine from Japan and take necessary procedures
according to the provisions of export-related laws and regulations, such as foreign exchange
laws and foreign trade laws.
(c) For any questions and consultation on this machine, check the model/serial number and then
contact the nearest sales office or agency.
https://www.ulvac.co.jp/support_info/
(d) Note that the contents in this document is subject to change without prior notice.
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In order for you to use this machine as long as possible, before working on the installment,
operation, inspection or maintenance, read this manual carefully to fully understand the
safety considerations, specifications, and operation of the machine.
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Acknowledge in advance that, for improvement reason, the specification or price described
herein may be subject to change without notice. When a change is made in this manual, the
manual will be issued as a revised edition with the document number on the upper right of
the cover page updated.
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Never fail to hand over this manual to the end user who actually uses the product.
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Without our permission, any part in this manual cannot be duplicated for a third-party.
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This manual is designed for a Japanese speaking user. When allowing a non-Japanese
speaking user to work on the machine, provide a thorough safety education and handling
instruction under the responsibility of the customer.
About this manual
Before Using the Machine
