78
Corrections
7.1 fix
leakage.
7.2
replace faulty vacuum pump/
7.3
fix leaking piping.
7.4
replace stuck non-return valve
7.5.1
Replace faulty coil and/or plunger.
7.5.2 Fix
disconnection.
7.5.3
Replace faulty board.
7.5.4
Replace faulty board.
7.5.5
See item 10.4.8.
7.5.6
See item 10.4.35.
7.5.7
See item 10.4.30.
7.5.8
See item 10.4.29
Possible cause check-up and tests
7.1
Chamber is leaking.
7.2
Faulty vacuum pump.
7.3
Vacuum piping is leaking.
7.4
Non-return valve is stuck.
7.5
Vacuum valve (52) does not open during vacuum
stage due to:
7.5.1
Faulty coil or plunger.
7.5.2 Pump
disconnected.
7.5.3
Faulty digital board DIG-T2 (located in
the electronic box).
7.5.4
Faulty analogue board ANL-T2 (located
in the electronic box).
7.5.5
Air inlet valve (43) leaks or is stuck open.
7.5.6
Fast exhaust valve (73) leaks or is stuck
open.
7.5.7
Slow exhaust valve (74) leaks or is stuck
open.
7.5.8
Steam valve (93) leaks or is stuck open.
10. TROUBLESHOOTING
(cont.)
10.2 Preliminary
Troubleshooting
(cont.)
Symptom
7.
“Low vacuum” is
displayed.
\
Содержание 2540 EHS
Страница 10: ...9 REAR VIEW...
Страница 17: ...16 Layout diagram of the ANL T2 is provided below ANL T2 BOARD Top View Bottom View...
Страница 19: ...18 AC T1 BOARD Top View Bottom View...
Страница 30: ...29 6 4 Input Output Graph...
Страница 31: ...30...
Страница 32: ...31...
Страница 33: ...32...
Страница 34: ...33...
Страница 35: ...34...
Страница 66: ...65...
Страница 68: ...67...
Страница 120: ...119 VESSEL ASSEMBLY Model 2540 EHS Model 3870 EHS...
Страница 121: ...120 OUTER CABINET ASSEMBLY Model 2540 EHS Model 3870 EHS...
Страница 122: ...121 TRAY HOLDER For model 2540 TRH254 0009 For model 3870 TRH387 0001...
Страница 123: ...122 TRAY TRAY HANDLE CMT240 0001 MODEL SIZE CAT No 2540 TRY240 0001 Big TRY387 0001 3870 Small TRY387 0003...
Страница 126: ...125 PIPING DRAWING FOR 2540 EHS...
Страница 127: ...126 PIPING DRAWING FOR 3870 EHS...
Страница 128: ...127 ELECTRICAL DRAWING FOR 2540 EHS...
Страница 129: ...128 ELECTRICAL DRAWING FOR 3870 EHS TILL S N 2307039...
Страница 130: ...129 ELECTRICAL DRAWING FOR 3870 EHS AFTER S N 2307040...