84
Corrections
1.1
Close the door more tightly or readjust
the door switch to activate earlier.
2.1
Check the valve as per para 10.4 sections
35 & 36. Replace either the fast exhaust
valve (73), no return valve or clean the
drain line as needed.
2.2
Clean clogged strainer.
Possible cause check-up and tests
1.1
As the pressure in the chamber rises
during the heat up stage it presses
outward on the door. This can cause the
door switch to be released and cause the
system to think the door is opened.
2.1
Fast exhaust valve (73) is faulty or the
discharge line from the chamber to drain
is clogged or the no return valve is faulty.
2.2
Strainer is clogged
10. TROUBLESHOOTING (cont.)
10.4
In Process Malfunction
Symptom
1.
Message DOOR UNLOCK
is displayed during the
heating stage, although the
door is closed.
2.
The fast exhaust
operation is too slow
Содержание 2540 EHS
Страница 10: ...9 REAR VIEW...
Страница 17: ...16 Layout diagram of the ANL T2 is provided below ANL T2 BOARD Top View Bottom View...
Страница 19: ...18 AC T1 BOARD Top View Bottom View...
Страница 30: ...29 6 4 Input Output Graph...
Страница 31: ...30...
Страница 32: ...31...
Страница 33: ...32...
Страница 34: ...33...
Страница 35: ...34...
Страница 66: ...65...
Страница 68: ...67...
Страница 120: ...119 VESSEL ASSEMBLY Model 2540 EHS Model 3870 EHS...
Страница 121: ...120 OUTER CABINET ASSEMBLY Model 2540 EHS Model 3870 EHS...
Страница 122: ...121 TRAY HOLDER For model 2540 TRH254 0009 For model 3870 TRH387 0001...
Страница 123: ...122 TRAY TRAY HANDLE CMT240 0001 MODEL SIZE CAT No 2540 TRY240 0001 Big TRY387 0001 3870 Small TRY387 0003...
Страница 126: ...125 PIPING DRAWING FOR 2540 EHS...
Страница 127: ...126 PIPING DRAWING FOR 3870 EHS...
Страница 128: ...127 ELECTRICAL DRAWING FOR 2540 EHS...
Страница 129: ...128 ELECTRICAL DRAWING FOR 3870 EHS TILL S N 2307039...
Страница 130: ...129 ELECTRICAL DRAWING FOR 3870 EHS AFTER S N 2307040...