124
12
VALVES NUMBERING
The valves in the drawing and the manual are numbered according to their
function. The following list includes all the valve numbers that are in use in
this manual
Size mm
2540 3870
1.
FEED WATER
13. Feed water – cool fast exhaust
14. Feed water – to reservoir
15. Feed water – to vacuum pump
3
2.4
4.5
3
4.5
4.5
2.
MINERAL
FREE
WATER
21. Mineral free water - inlet
3
4.5
4.
AIR
43. Filtered air - inlet
3
3
5.
VACUUM
52. Vacuum - to pump
4.5
4.5
7.
EXHAUST
73. Fast exhaust
74. Slow exhaust
4.5
3
4.5
3
9.
STEAM
93. Steam – to chamber
ASCO 1/4"
12VDC
ASCO 1/4"
12VDC
Содержание 2540 EHS
Страница 10: ...9 REAR VIEW...
Страница 17: ...16 Layout diagram of the ANL T2 is provided below ANL T2 BOARD Top View Bottom View...
Страница 19: ...18 AC T1 BOARD Top View Bottom View...
Страница 30: ...29 6 4 Input Output Graph...
Страница 31: ...30...
Страница 32: ...31...
Страница 33: ...32...
Страница 34: ...33...
Страница 35: ...34...
Страница 66: ...65...
Страница 68: ...67...
Страница 120: ...119 VESSEL ASSEMBLY Model 2540 EHS Model 3870 EHS...
Страница 121: ...120 OUTER CABINET ASSEMBLY Model 2540 EHS Model 3870 EHS...
Страница 122: ...121 TRAY HOLDER For model 2540 TRH254 0009 For model 3870 TRH387 0001...
Страница 123: ...122 TRAY TRAY HANDLE CMT240 0001 MODEL SIZE CAT No 2540 TRY240 0001 Big TRY387 0001 3870 Small TRY387 0003...
Страница 126: ...125 PIPING DRAWING FOR 2540 EHS...
Страница 127: ...126 PIPING DRAWING FOR 3870 EHS...
Страница 128: ...127 ELECTRICAL DRAWING FOR 2540 EHS...
Страница 129: ...128 ELECTRICAL DRAWING FOR 3870 EHS TILL S N 2307039...
Страница 130: ...129 ELECTRICAL DRAWING FOR 3870 EHS AFTER S N 2307040...