Thermo Scientific TSQ Altis, Руководство по оборудованию

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3
Vacuum System
Vacuum Manifold
Thermo Scientific TSQ Altis, Quantis, and Fortis Hardware Manual 11
Table 1 lists the five vacuum regions, the pumps that evacuate them, and the chamber
pressures. The block diagram in Figure 4 shows the vacuum regions.
Table 1. Vacuum regions, evacuation devices, and typical pressures
Region Components Evacuated by Pressure
TSQ Altis TSQ Quantis TSQ Fortis
1 API source N/A Atmosphere Atmosphere Atmosphere
2 RF lens Forepump or forepumps 3–4 Torr 1–2 Torr 1–2 Torr
3 MP00 ion optics Triple-inlet turbomolecular pump
(first inlet [molecular drag])
150
m
Torr 120
m
Torr 120
m
Torr
4 MP0 ion optics Triple-inlet turbomolecular pump
(second inlet [interstage])
2
m
Torr 1
m
Torr 1
m
Torr
5 Mass analyzer Triple-inlet turbomolecular pump
(third inlet [high vacuum])
3–7 ×10
–6
2–4 ×10
–6
9 ×10
–7