PolosSpin150i/200i
rev.: 1.0
Operating instruction
Welcome to the POLOS spin processing system!
The
Polos
is a top quality spin processor engineered for ease of use, low
maintenance, and long lifetime. Designed, Engineered, and Assembled in our state-
of-the-art facility in Germany, the
Polos
is constructed of high purity semiconductor
grade plastics to ensure the ultimate cleanliness. No metal components are in
contact with process chemicals, or fumes. This ensures the
Polos
can
accommodate a wide range of process chemicals, with no risk of metals
contamination, or system damage.
The aerodynamic design of the lid interior ensures "splash back-free" processing
and a direct drain path, while the smooth curved natural polypropylene surfaces of
the lid and process chamber directly assist the easy cleaning of the unit. The
touchscreen display are chemically resistant.
The system is built using industry-proven quality components ensuring precise
repeatable performance, a long lifetime, and zero maintenance. The
Polos
will
perform for you whether your needs are infrequent, with simple programs,
continuous processing, or frequent changes using complex programming steps.
Operation is intuitive; programming is simple, and up to 10000 separate programs
can be stored in the system memory. (each program can have up to 999 steps!)
This is a highly flexible system, and we offer a range of chucks, adapters, and other
options to support your future requirements.
Safety features include Secure lock of Lid Latch, Lid-Open and No-Vacuum
interlocks, Dynamic Braking and in-built programming safety interlocks.
Please take the time to read this manual to familiarize with the method of operation,
and the installation requirements of your
Polos
system.
