PolosSpin150i/200i
rev.: 1.0
Operating instruction
SPS-Europe B.V.
page
13
JH131115
o
disturbance / malfunction of control system
o
leaking of hoses or pipes
o
combination of atmospheres or vapors
o
fire hazard
o
natural hazards caused by lightning, environmental catastrophes etc.
Mechanical hazards:
DANGER!
By applying components of other manufacturers additional and unknown hazards
may arise. No liability will be taken in this case.
Use only genuine parts provided by the manufacturer of the system.
Genuine parts are constructed conforming to applicable safety regulations.
DANGER!
Moving parts may cause squeezing or cutting of extremities.
Do not touch any moving parts of the system while in operation.
DANGER!
Spin speed is to be adjusted to substrate size, thickness, shape, weight and chuck
used.
Depending on substrate to be used the maximum spin speed of your system must
be limited. Please consult the system specific datasheet or contact manufacturer for
detailed spin speed recommendation.
DANGER!
Operation of the system by several persons may cause hazards based on
misconduct or missing mutual understanding.
In case that operation of the system by two or more persons would be required, is
recommended to keep a daily logbook containing usage note such as chemical
applied, error encounter, etc.
DANGER!
The system may only be operated while all doors and safety covers are closed and
locked (where applicable) and any protection systems are properly positioned.
Function of safety covers or doors has to be assured at any time.
In case of any safety deficiencies the system has to be switched off and the service
personnel has to be informed accordingly.
DANGER!
Safety covers or doors may not be removed (unless for service purposes).
The system may not be opened during processing or after power failures.
