PolosSpin150i/200i
rev.: 1.0
Operating instruction
SPS-Europe B.V.
page
12
JH131115
3.3 Specific threads to the system
WARNING!
System may never work under condition different to ones indicated in relative
chapter of this manual
WARNING!
System may never be utilized, cleaned or maintained by untrained and
unauthorized personnel.
3.4 System hazards
General hazards:
This system has been designed and manufactured considering all relevant safety
regulations. Improper use or operation by persons not qualified accordingly may
result in danger:
to life and health of the operator
to the system itself
to surroundings of the user
to performance and efficiency of the system.
General hazards of the system, depending on design or type, may arise in the
following ways:
mechanical hazard caused by squeezing, shearing and cutting, catching
and winding, stitching or by freely moving parts
thrust caused by kinetic energy of moving mass
sharp corners and edges
electrical hazard caused by touching live parts (directly or indirectly)
thermal hazard causing burns
chemical hazard causing poisoning, corrosion and explosion
toxic hazard due to inhalation of vapors and gases
gases under pressure
liquids under pressure
combination of hazards caused by
o
faulty installation
o
incorrect loading of substrates / wafers
o
improper usage of chuck
o
breakdown of power or media supply
o
breakdown and/or incorrect arrangement of preventive measures
o
combination of escaping media
hazards caused by
o
human misconduct
o
noise
o
allergies, excitations of mucous membrane, unknown effects caused by
media
o
ejection of parts