ZEBV-5084A
2
Contents
1.
INTRODUCTION ··················································· 3
2.
INSTALLATION CONDITION
S ······························· 4
2.1 Carry-in route ............................................................................ 4
2.2 Example installation ................................................................ 4
2.3 Ambient requirements ............................................................. 6
2.4 Required power supply ........................................................... 6
2.5 Gas .......................................................................................... 7
2.5.1
Nitrogen gas
....................................................................... 7
2.5.2 Argon gas ........................................................................ 9
2.5.3 General precautions ........................................................ 9
2.5.4 Precautions when using high pressure gas cylinder .... 10
2.6 Exhaust ................................................................................. 10
2.7 Other items to be prepared ..................................................... 11
3
.
Customer pre-check list
········································· 14
4
.
Remarks
······························································ 19
4.1
About making your samples for iMScope TRIO
......................................... 19