STP-H803/H1303 Series Instruction Manual
4.3.3
How to Secure the STP Pump
Installation
◇
The STP pump is provided with a high-speed rotor. The worst-case
failure may result in a jump in rotational torque leading to personal
injury or peripheral equipment damage.
The method of securing the STP pump will depend on the installation
requirements. Secure the STP pump to the vacuum equipment as
follows:
◇
Design and secure the mounting for the STP pump so that it can
withstand the maximum rotational torque. Refer to Table 4.2 for
torque in pump abnormality.
Refer to
"3) When installing the
damper in the inlet port flange"
Refer to
"2) When securing the
inlet port flange with claw
clamps"
Refer to
"1) When securing the
inlet port with bolts"
Secure the inlet port
with Claw Clamps
with bolts
No
Yes
Damper
◇
In some cases, the damper and the claw clamper securing cannot be
used depend on the type of the STP pump.
◇
Refer to Table 4.1 for tightening torque of the bolt.
Table 4.1 Tightening torque of bolt
Size of bolt
Tightening torque of bolt (Nm)
M8 12.0
M10 24.1
M12 42.1
◇
When making the leg to secure the base, make them shortened more
than ones attached to the STP pump.
Use a material that has a tensile strength of 600N/mm
2
or more.
◇
When securing the base, use stainless steel securing bolts with a
tensile strength class is 70 or more.
◇
When using any securing method other than that specified in this
manual, contact BOC Edwards.
4-9