STP-H803/H1303 Series Instruction Manual
6) Depending upon the type of the backing pump used, oil vapor may
contaminate the inside of the STP pump. Some oil viscosity could cause a
malfunction when there is a strong reverse flow of oil.
Take the following measures to ensure the correct flow of oil:
6) Depending upon the type of the backing pump used, oil vapor may
contaminate the inside of the STP pump. Some oil viscosity could cause a
malfunction when there is a strong reverse flow of oil.
Take the following measures to ensure the correct flow of oil:
In
sta
lla
tio
n
sta
lla
tio
n
•
Attach a vacuum valve to the middle of the piping between the STP pump
outlet port flange and the backing pump.
•
Attach a vacuum valve to the middle of the piping between the STP pump
outlet port flange and the backing pump.
•
Attach an absorption trap adjacent to the vacuum valve.
•
Attach an absorption trap adjacent to the vacuum valve.
Piping at the Inlet Port Flange
Piping at the Inlet Port Flange
Attach the inlet port to the high vacuum side.
Maximum working pressure: 13.3 Pa [0.1 Torr] (for water cooled)
Pressure at the inlet port flange
applicable continuously
Piping at the Outlet Port Flange
Attach the outlet port to the inlet port flange of the backing pump
(primary side pump).
Allowable backing pressure: 270 Pa [2 Torr] (for water cooled)
Pressure at the outlet port flange
applicable continuously
◇
Upper pressure is applicable under the following conditions:
•
The N
2
or other similar gas is vacuumed.
•
The backing pump (pumping speed: 1,300 L/min) is used.
◇
To attain the ultimate pressure shown in Table 13.1, "Specifications
for the STP Pump," set the pressure at the outlet port flange to
1.3 Pa (10
-2
Torr) or less.
4-14
