STP-H803/H1303 Series Instruction Manual
13 Specifications
13.1
Specifications for the STP Pump
Table 13.1 Specifications for the STP Pump
Item
H803 Series
H1303 Series
Inlet port flange
VG150/ISO160
VG200/ISO200
Flange size
Outlet port flange
KF40
KF40
N
2
L/s
800
1300
Pumping speed
H
2
L/s
600
1000
N
2
>10
8
Compression ratio
H
2
10
4
Ultimate pressure
Pa (Torr)
10
-7
(10
-9
) order (after baking)
Maximum working pressure
13.3 (0.1): Water cooling
Allowable backing pressure
*1
Pa (Torr)
270 (2): Water cooling
Rated speed
rpm
32,500
Starting time
min
7
Stopping time
min
8
Noise
dB
<50 (at 32,500 rpm)
Baking temperature
°
C <120
Lubricating oil
Not necessary
Installation position
Free
Cooling method
Water cooling
Standard backing pump
L/min
>1,300
Mass
*2
kg
39
Dimensions mm
Φ
270
×
H343(VG150)
Φ
270
×
H350(ISO160F)
Φ
270
×
H312
Ambient temperature range
°
C
0 to 40
Storage temperature range
°
C
- 25 to + 55
The values shown in the table are typical.; They are not guaranteed.
Specification
∗
1
: The pressure is applicable under conditions that N
2
or other similar gas is vacuumed and the backing pump
(pumping speed: 1,300 L/min) is used.
*2
: Mass is a value of state that the only standard accessory was installed (except the optional accessory).
13-1
