STP-H803/H1303 Series Instruction Manual
◇
The STP pump is provided with a high-speed rotor. Secure the STP
pump according to the specified method. Failure to do so may lead
to serious personal injury, product and/or peripheral equipment
damage if any abnormality/error occurs in the rotor.
◇
The STP pump operates at high temperatures while the baking heater
or the Temperature Management System (TMS) unit is in operation.
NEVER touch the STP pump and its peripheral equipment while the
baking heater or TMS unit is in operation.
Operators can burn hands.
◇
Execute the following to prevent an accident caused by the gas.
•
Check the properties of the gas to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas
supplier. (explosive
・
combustible
・
toxic
・
corrosive, etc) And, keep
MSDS and a safety advice of gas supplier.
•
Warn of the danger of the gas with the warning label when the use
gas is hazardous chemical materials.
•
Always execute gas purge in the pump with the inert gas, and then
exhaust residual gases thoroughly from the STP pump when
removing the STP pump from the vacuum equipment.
•
Secure safety by wearing personal protective equipment when
using the gas which might influence damage health. In addition,
take appropriate measure for depending upon the properties of the
gas to be used.
◇
Exhaust residual gas thoroughly when disposing of the STP pump.
If the STP pump is used for any toxic or reactive gas, always clean
the STP pump and dispose of it as industrial waste in accordance
with guidelines given by the national and/or local government.
Residual gas in the STP pump may cause an accident which, for
certain gases, may involve serious injury or death.
2
