STP-H803/H1303 Series Instruction Manual
4.2
Precautions Before Installation
Installation
4.2.1 Operating
Environment
◇
Check the properties of the gas to be used, referring to the Material
Safety Data Sheet (MSDS) you obtain from the gas supplier. And,
keep MSDS and a safety advice of gas supplier.
Take measures according to MSDS to prevent an accident when
using toxic, reactive or combustible gases. Dilute the gas to be
used with the inert gas controlled if necessary. And, take measures
according to MSDS to prevent an accident caused by exhaust gas.
◇
The STP series models are chemical specific pumps: chlorine or
fluorine system gases can be used with these models. When you
use gases including alkaline metals, but excluding Li, gases
including Ga, Hg, In, or Sn, or HBr, contact BOC Edwards (See
Section 1.1, "Usable Gases").
◇
If the STP pump is used in an area with radiation, contact BOC
Edwards.
Install the STP pump in a place meeting the following requirements:
Ambient Temperature
0 to 40 °C
Ambient Relative Humidity 30 to 95 % (no dew condensing)
Environment
•
A place free of externally-applied mechanical
shock.
•
A place free of a heat source
(Keep clear of the heat source or attach a thermal
shield plate).
•
A place free of a strong magnetic field
(Range: up to 15 mT (150 G) in the axial
direction, and up to 3 mT (30 G) in the radial
direction with respect to the rotational axis of the
STP pump).
•
A place free of a strong electric field.
•
A place free of exposure to radiation.
•
No discharge of high voltage (more than 500 V)
(If more than 500 V is discharged, contact BOC
Edwards).
STP Pump Installation
Equipment Conditions
•
Install the STP pump securely so that foreign
materials will easily fall into the STP pump (Ex.:
Si wafers or samples are positioned above the
STP pump) (To prevent foreign materials from
falling into the STP pump, design a shield plate
with large conductance).
4-3
