STP-H803/H1303 Series Instruction Manual
INTRODUCTION
Thank you very much for purchasing BOC Edwards’ turbomolecular pump.
The turbomolecular pump is designed to be installed in the vacuum equipment to
exhaust gases from it.
This manual covers all items necessary to ensure safe installation, operation and
maintenance of the following series of the STP-H803/H1303 turbomolecular
pump:
Model
Name
Specification
•
STP-H803C
High-throughput type, chemical specific
•
STP-H803CV
High-throughput type, chemical specific,
TMS
unit
•
STP-H1303C
High-throughput type, chemical specific
•
STP-H1303CV
High-throughput type, chemical specific,
TMS unit attached
For the specifications of other models of the STP-H803/H1303 pump series,
contact BOC Edwards.
In this manual, the above STP-H803/H1303 pump series is collectively referred
to as the "STP pump."
*
1
: Chemical specific: STP pump with anti-corrosive treatment
(responding to chlorine, fluorine or other system gases)
*
2
: TMS: Temperature Management System
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