MKS 946 Series, Руководство по эксплуатации и обслуживанию, Страница: 2 / 130

946 Controller Instruction Manual pg. 2
Table of Contents
1 Safety Information ......................................................................................... 6
1.1 Symbols Used in this Manual and their definitions ............................................... 6
1.2 Safety Precautions ............................................................................................... 6
1.2.1 Safety Procedures and Precautions ............................................................................................. 6
2 Specifications ................................................................................................ 8
2.1 Controller ............................................................................................................. 8
2.2 Pressure, Flow Sensors, & Valves ..................................................................... 10
2.3 Controller Display .............................................................................................. 14
2.3.1 Display Message ........................................................................................................................ 14
2.3.2 Display Resolutions .................................................................................................................... 15
2.3.3 Serial Communication Response Format ................................................................................... 16
3 Feature, Control Locations and Dimensions ............................................ 17
4 Typical Applications for the Series 946 Controller ................................... 19
5 MKS Series 946 Vacuum System Controller ............................................. 20
6 Operating the Series 946 Controller .......................................................... 22
6.1 Power ................................................................................................................ 22
6.2 Front Panel Control Lock ................................................................................... 22
6.3 Front Panel Display ........................................................................................... 22
6.3.1 Standard Front Panel Display .................................................................................................... 22
6.3.2 Large Font Display ..................................................................................................................... 24
6.4 System Setup .................................................................................................... 24
6.4.1 Overview of 946 System Setup .................................................................................................. 24
6.4.2 Display System Setup Parameters ............................................................................................. 25
6.4.3 Change and Save a Parameter Value ........................................................................................ 26
6.4.4 Description of the System Setup Parameters ............................................................................. 26
6.5 Channel Setup for Pressure Measurement ........................................................ 30
6.5.1 Overview of 946 Channel Setup ................................................................................................. 30
6.5.2 Setup for a Capacitance Manometer .......................................................................................... 32
6.5.3 Setup for a CP (Convection Pirani), Convectron, or PR Sensor ................................................. 35
6.5.4 Setup a Cold Cathode Sensor .................................................................................................... 38
6.5.5 Setup a Hot Cathode Sensor ..................................................................................................... 41
6.6 Power Control of a Pressure Sensor .................................................................. 45
6.6.1 Power (including degas) Control of a Sensor using Front Panel Control Button ........................ 45
6.6.2 Power (including degas) Control of a Sensor via 37 pin AIO D-sub Connector .......................... 46
6.6.3 Power (including degas) Control of a Sensor using Serial Communication Commands ............ 46
6.7 Channel Setup for Flow Measurement and MFC Based Pressure Control ......... 47
6.7.1 Simple Operation of a Mass Flow Controller .............................................................................. 47
6.7.2 Setup MFC Controlling Parameters for Flow Control ................................................................. 48
6.7.3 Set MFC(s) for Dynamically Controlling System Pressure ......................................................... 50
6.8 Pressure Control using a Control Valve ............................................................. 60
6.8.1 Valve Type Selection .................................................................................................................. 61
6.8.2 Valve Control Recipe Setup ....................................................................................................... 62
6.8.3 Activate a Pressure Control with a Valve ................................................................................... 63
6.8.4 Terminate a PID Pressure Control using a Valve ....................................................................... 64
7 Installing Vacuum Sensors ......................................................................... 66
7.1 Installing Cold Cathode Sensors ........................................................................ 66
7.1.1 Locating a Cold Cathode Sensor................................................................................................ 66
7.1.2 Orienting a Cold Cathode Sensor............................................................................................... 66
7.1.3 Managing Contamination in a Cold Cathode Sensor.................................................................. 66
7.1.4 Connecting the Series 431/422 Sensor ...................................................................................... 66
7.1.5 Connecting the 423 I-Mag Sensor .............................................................................................. 67