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946 Controller Instruction Manual

pg. 56

Torr

399.3

10.01

300.5

1.300

10.07

250.0

4.0E+2

SCCM

PID

SCCM

Figure 6-18 Front Panel Display during PID Control using Single MFC

•

During PID control process, the active MFC flow reading and corresponding

controlling pressure gauge reading are displayed in blue color to identify these

channels. PID will be displayed as well to indicate the MFC channel under the PID

control (C1 in Figure 6-18).

•

The color of the flow rate will turn into red as a warning if the real flow rate is >2% of

full scale and 20% off the PID set point value. This might happen, for example, if the

gas supply for the MFC is turned OFF accidently during the PID control process.

6.7.3.1.3 Terminate Single MFC PID Control

PID based pressure control with a single MFC can be terminated to any of the following

conditions:

1. Close the MFC:

To close the MFC completely, move the green LED indicator to the MFC in use for
the PID, press the

button on the front panel, and

Enter

key to confirm.

2. Open the MFC fully:

To Open the MFC completely, move the green LED indicator to the MFC in use for
the PID and press the

Open

button on the front panel, and

Enter

key to confirm.

3. Set the MFC to fixed set point defined by the Flowrate SP in Channel setup screen:

To switch the flow rate to that defined in the channel setup screen, move the green
LED indicator to the PID Channel (active MFC channel), and press the

Setpoint

button

on the front panel, and

Enter

key to confirm the action.

4. Set the MFC to the set point defined in the recipe (Preset)

•

Press the

Pressure

Control

to display the PID Control dialog box

•

Switch the PID Control parameter from ON to OFF as shown in Figure 6-17. Once

the PID control is turned OFF, the flow rate for the MFC will be changed to the Preset

set point as defined in the recipe (refer to Figure 6-14).

6.7.3.1.4 Effect of PID Recipe Change While Control is Running

Some of the parameters associated with the active PID control can be changed (via either front

panel or serial communication) while the PID control is running. They are pressure set point (P

Set point), proportional (Prop-Kp), integral (Integral-Ti), and derivative (Derivative-Td). This

allows adjusting and optimizing these parameters without turning ON/OFF the PID control. The

remaining PID recipe parameters cannot be changed while the control is running.

When any of these 4 parameters in a PID control recipe is modified while PID control is operating,

the new setting will take effect immediately in the running pressure control process. However, the

Содержание 946 Series

Страница 1: ...Series 946 Vacuum System Controller Operation and Maintenance Manual Instruction Manual p n 100018121 Rev A June 2020...

Страница 2: ...a Capacitance Manometer 32 6 5 3 Setup for a CP Convection Pirani Convectron or PR Sensor 35 6 5 4 Setup a Cold Cathode Sensor 38 6 5 5 Setup a Hot Cathode Sensor 41 6 6 Power Control of a Pressure S...

Страница 3: ...3 7 6 3 Setup 74 7 6 4 Gas Line Connections 74 7 7 Installing a Pressure Control Valve 74 7 7 1 Installing an Upstream Solenoid Valve 74 7 7 2 Installing a Downstream MKS 153 or T3B Throttle Valve 75...

Страница 4: ...115 11 2 1 Disassemble the I Mag Sensor 115 11 2 2 Clean the I Mag Sensor 117 11 2 3 Assemble the I Mag Sensor 117 11 2 4 Preparing the Sensor for Bakeout 118 11 3 Maintenance of Low Power Nude and Mi...

Страница 5: ...advise you if the hazardous materials document is required When returning products to MKS be sure to package the products to prevent shipping damage Shipping damage on returned products due to inadeq...

Страница 6: ...e requirements Properly Ground the Controller This product is grounded through the grounding conductor of the power cord To avoid electrical shock plug the power cord into a properly wired receptacle...

Страница 7: ...voltages when on High voltage is present in the cable and a Cold Cathode sensor when the Controller is turned on Use the proper power source This product is intended to operate from a power source tha...

Страница 8: ...0 x 10 3 to 1 0 x 10 0 Torr FC Mass Flow Controller 0 2 to 100 of the measurement range of the MFC e g 1000 SCCM MFC is 2 0 x 10 0 to 1 0 x 10 3 SCCM Allowed range within which a control sensor may sw...

Страница 9: ...for each channel up to two 2 wide range combination logarithmic outputs Output impedance 100 ohms Number of channels Up to 6 Front panel controls Power ON OFF switch keypad for setup and operational...

Страница 10: ...nt requirement of operating sensor s must be 1 amp or less FC Mass Flow Controller MKS G I P Series and legacy products with tied internal grounds MFCs requiring 15 VDC or 15 to 24 VDC 0 5 VDC set poi...

Страница 11: ...etween 10 4 and 100 Torr CP Convectron 2 significant digits over the entire range CM FC 4 significant digits from 10 to 100 FS 3 significant digits from 1 to 10 FS 2 significant digits from 0 1 to 1 F...

Страница 12: ...CP 300 series stainless nickel glass platinum Convectron 304 stainless steel borosilicate glass Kovar Alumina NiFe alloy polyimide CM Inconel FC 316 series stainless nickel Elgiloy elastomer seal Int...

Страница 13: ...ved Pirani 50 C 122 F CP 100 C 212 F plastic shell internally coated for RF shielding 250 C 482 F on aluminum housing for RF shielding version Convectron 150 C 302 F CM FC N A Hot cathode sensitivity...

Страница 14: ...3 Controller Display 2 3 1 Display Message X X0E ee Normal pressure for the Pirani CP CC and HC X XXXE e Normal pressure for the Baratron flow rate for MFC OVER The pressure is over upper limit for C...

Страница 15: ...e of measurement In addition three display formats are available Default HighR9 high resolution and PatchZ patch zero and can be selected based on preference PatchZ Default HighR Percentage of Full Sc...

Страница 16: ...X XXE 05 10 6 X X0E 06 X XE 06 X XXE 06 X X0E 06 X XE 06 X XXE 06 10 7 X X0E 07 X XE 07 X XXE 07 X X0E 07 X XE 07 X XXE 07 10 8 X X0E 08 X XE 08 X XXE 08 X X0E 08 X XE 08 X XXE 08 10 9 X X0E 09 X XE 0...

Страница 17: ...ter CP AR 1 00E 10 1 00E 10 1 20E 03 3 50E 02 C2 Ctrl F2 DG C1 Ctrl Torr SP11 SP12 SP9 SP10 SP5 SP6 SP7 SP8 SP1 SP2 SP3 SP4 PR N2 HC N2 CC N2 Remote A1 AZ B1 AZ Channel Setup System Setup Pressure Con...

Страница 18: ...dicating Active Channel 3 Liquid Crystal Display 4 Push Buttons for Menu Navigation 5 Power Switch 6 AIO Module 7 AC Power Inlet 8 RS232 485 Communication Port 9 Relay Output Port 10 Analog Output Por...

Страница 19: ...pressures Controlling accelerator and light source vacuum systems Displaying the flow rates from MFCs and providing an interface for MFC setup Control of gas flow into vacuum process chamber Maintain...

Страница 20: ...KS Low Power Nude gauge or Mini BA Hot Cathode sensors up to 3 MKS Series 317 Convection Pirani sensors up to 6 MKS Series 275 Convectron sensors up to 6 MKS Mass Flow controllers up to 6 Types G I P...

Страница 21: ...buffered analog signals respond immediately to sensor signal changes and can be used in critical fast control applications Logarithmic linear analog outputs for each pressure sensor up to 6 ranging f...

Страница 22: ...k status The front panel can also be locked or unlocked with serial communications commands See RS232 RS485 Communications Commands for more information 6 3 Front Panel Display 6 3 1 Standard Front Pa...

Страница 23: ...G means the HC is degassing For PR CP CM Ax AZ means the PR CP CM will be auto zeroed by the gauge on Channel Ax typically a CC or HC For MFC SCCM SLM indicates the flow units Open Close SP is the MFC...

Страница 24: ...ide of the LCD CP Ar 1 00E 08 2 10E 06 1 0E 04 1 0E 03 C2 Ctrl C1 Ctrl Torr SP11 SP12 SP9 SP10 SP5 SP6 SP7 SP8 SP1 SP2 SP3 SP4 PR N2 CC N2 CC N2 A1 AZ B1 AZ A1 A2 B1 B2 C1 C2 2 10E 06 1 0E 04 B1 A1 A2...

Страница 25: ...DD Figure 6 3 946 System Setup Parameters their Default Values and Ranges 6 4 2 Display System Setup Parameters To display the 946 system setup press the System Setup key the LCD display will switch t...

Страница 26: ...will turn gray Pascal in this example This indicates that the new value has been saved 6 To return to the normal front panel display mode press the ESC key once after the parameter values have been c...

Страница 27: ...This is used to define the recipe for PID pressure control with a single MFC ratio control using multiple MFCs and upstream pressure control using Solenoid Control Valve or downstream pressure contro...

Страница 28: ...one equation is displayed Channel A example in Figure 6 6 Linearized analog output can be used when high analog output resolution is required over a narrow pressure range When a linear equation is us...

Страница 29: ...ed The serial numbers for all detected boards are also displayed as shown in Figure 6 6 Firmware Version and SN Slot A 1102114509 CC 1 00 Slot B 1103104503 CM 1 00 Slot C 1105083309 PR 1 00 Analog IO...

Страница 30: ...default values are shown in the brown boxes while the ranges for setup are shown in the blue boxes The 946 automatically shows the parameters available for the sensor in operation on the channel selec...

Страница 31: ...nel or NA auto detected Gas Type N2 0 1 to 50 1 00 Protect SP Relay Relay n Enable DIR SET SP Hyst OFF BELOW 1 0E 05 1 5E 05 Display 4 Relays Ch auto detected ON OFF BELOW Control SP N2 Ar He 5 0E 03...

Страница 32: ...to 95 of its full scale Operation Voltage 15V Figure 6 7 946 Channel Setup Setting Parameters their Default Values and Ranges 6 5 2 Setup for a Capacitance Manometer A capacitance manometer module wi...

Страница 33: ...O Manual Zero NO Message Box Auto detected Auto detected CM Type Input Voltage 5U V DIFF Operation Voltage 15V Figure 6 8 Capacitance Manometer Setup Information Screen 4 Factory Default When YES is s...

Страница 34: ...at 15 Volts This limits the selection of capacitance manometers to only those requiring 15 Volts operating power 8 Relay Each capacitance manometer channel has two preassigned relays as shown below T...

Страница 35: ...t Do no t attempt to use a Convecti on Pirani or Convectr on gauge calibrat ed for N2 to measure or control the pres sure of othe r gases such as argo n or CO2 unless the gas type setting or accurate...

Страница 36: ...med after manually entering the gauge type 2 Gas Type Select the gas type by moving the cursor to the Gas Type box and pressing Enter key Use the or the keys to select the gas type being used with the...

Страница 37: ...signed relays as shown below The controller auto detects the correct relays corresponding to where the sensor module is installed Module location A1 A2 B1 B2 C1 C2 Relay assigned 1 2 3 4 5 6 7 8 9 10...

Страница 38: ...uld be avoided If the power for a Pirani or Convection Pirani is turned OFF while it is controlling in either AUTO or SAFE a hot or cold cathode sensor the HC or CC will be switched OFF immediately To...

Страница 39: ...ast Relay SP Note FAST relay SP is available only when the special cold cathode module with fast control output CL is installed For fast protection of a vacuum system such as closing a valve rapidly a...

Страница 40: ...int value and direction 8 DIR The DIR Direction for relays actuated by a cold cathode are permanently set to BELOW Thus the relays are closed whenever the pressure is below the set point See Figure 8...

Страница 41: ...high vacuum chamber To set the Control SP first select the control channel in the box under the Dir Ch heading Once an allowed channel has been selected the Control SP can be enabled There are three...

Страница 42: ...t 1 30 EC 20 uA DG Time Sensitivity Figure 6 11 Hot Cathode Setup Information Screen Gas Symbol Relative correction factor to N2 Air 1 00 Argon Ar 1 29 Carbon Dioxide CO2 1 42 Deuterium D2 0 35 Helium...

Страница 43: ...ltages based on its own pressure readings The Protect Setpoint is always enabled on the 946 but can be set within the range 1 0x10 5 Torr to 1 0x10 2 Torr Once the Protect Set Point is triggered and t...

Страница 44: ...vection Pirani or Convectron 5x10 4 to 1x10 2 Torr for a Pirani 0 2 of full scale to 2x10 2 Torr for a Capacitance Manometer 2T full scale The default control set point value is 5x10 3 Torr Extended o...

Страница 45: ...key to switch the sensor 3 The Sensor ON OFF key switches the corresponding sensor ON and OFF When a Hot Cathode is turned ON the filament power may turn OFF automatically if the pressure is higher t...

Страница 46: ...e over ridden by the other For instance front panel ON OFF can control a sensor last turned ON OFF at the rear panel or via serial commands Since a Hot Cathode modules operate a single sensor pins 16...

Страница 47: ...ress Enter key to confirm the operation and the Open indicator will stop blinking When an MFC is set to Open mode the flow rate is often significantly higher than the full scale flow rate of the mass...

Страница 48: ...Range 1 40E 3 Operation Voltage 15 to 24v Figure 6 13 MFC Setup Information Display 1 Scale Factor Scale Factor is the gas correction factor ratio between the operating gas and the factory calibratio...

Страница 49: ...is the actual gas flow range after the Scale Factor is set It is automatically updated once a new Scale Factor or Nominal Range is entered 6 OP Mode There are five control operation modes available f...

Страница 50: ...stem pressure may be controlled by single MFC PID Ctrl or multiple MFCs Ratio Control Several control parameters are involved in dynamic pressure control using MFC s and control recipes must be define...

Страница 51: ...cipe screen shown in Figure 6 14 2 Press or keys to select a desired recipe for editing or displaying highlighted by grey background such as C1 in Figure 6 14 then press the Enter key to begin the set...

Страница 52: ...onal results in less responsive sensitive control The Proportional Kp is pressure unit independent on the 946 due to how the internal calculations are performed Integral Ti This is the integral contro...

Страница 53: ...atically and the set point value is changed to Preset value Base Base sets the lower limit of the control signal output This is expressed as the percent of full scale for a MFC or the percentage of th...

Страница 54: ...zero Direction Direction sets the valve control to either Upstream or Downstream During Upstream control higher set point often leads to higher chamber pressure while it is opposite during Downstream...

Страница 55: ...Ch such as C1 shown in Figure 6 17 will be displayed The flow rate of the MFC connected to this PID channel will be varied automatically to control the system pressure At the same time the pressure s...

Страница 56: ...e front panel and Enter key to confirm 3 Set the MFC to fixed set point defined by the Flowrate SP in Channel setup screen To switch the flow rate to that defined in the channel setup screen move the...

Страница 57: ...scale flow rate of the master channel The flow rates for rest of the slave channels will follow the master channel to maintain the gas ratio unchanged 5 0E 2 Pressure Control Parameter Setting Recipe...

Страница 58: ...are entered The gas concentration displayed in the ratio Recipe screen may not be true gas concentration in the system as it does not include the gas flows for MFCs that are not included in the ratio...

Страница 59: ...to avoid situations such as an MFC reaching maximum flow causing an overshoot in flow and pressure To active either manual or automatic ratio control after PID and ratio recipes are set Press the Pre...

Страница 60: ...olved in the dynamic control of the system pressure using MFCs the PID Ratio control must be terminated first before switching recipes Once the control is stopped all the MFCs will be set to the contr...

Страница 61: ...produce lower chamber pressures MKS 148 154 and 248 These proportional current driven valves are often installed on the delivery line of a process chamber and are also called upstream control valves...

Страница 62: ...e Edit as shown in Figure 6 4 then press Enter key to display the Pressure Control Parameters Setting Recipes screen as shown in Figure 6 25 5 0E 2 Pressure Control Parameter Setting Recipe Prop Kp P...

Страница 63: ...r Open or Close or press the Open or the Close button on the front panel In either case press Enter afterward to confirm 3 For Set Point control of the valve set the valve opening to specific position...

Страница 64: ...l using a Valve A1 A2 B1 B2 C1 C2 SP5 SP6 SP7 SP8 Torr V a l v e P o s N2U HC N2 PR N2U CM CM 100 0 Open B1 Ctrl 11 00 OFF OFF Figure 6 28 Display for PID Control using a Valve Once the PID control is...

Страница 65: ...the valve to fixed position press the Pressure Control key until the display is as shown in Figure 6 26 move the cursor to the box below OP Mode and change the parameter to Set Point or press the Setp...

Страница 66: ...sition does not affect accuracy As with any sensor installation with the vacuum port facing down is preferable since this helps to prevent contaminants from falling into the sensor 7 1 3 Managing Cont...

Страница 67: ...sure from external gas sources to the level that the vacuum system can safely withstand In addition install suitable pressure relief valves or rupture disks that will release pressure at a level consi...

Страница 68: ...body is grounded On sensors with CF flanges a ground lug on a flange bolt could be used to attach a ground if necessary Note Attaching tubulated sensors with compression type quick connect adaptors i...

Страница 69: ...cable use a separate strain relief to prevent damage to the sensor or controller Cables are available in standard lengths of 10 25 50 feet only Tighten the cable jackscrews into the mating screw lock...

Страница 70: ...he Series 317Convection Pirani or Convectron Sensor When measuring pressures greater than 1 Torr the Series 317 or Convectron sensors must be mounted with their axis horizontal Measurements below 1 To...

Страница 71: ...foot cables Pin at sensor Bridge Drive 1 1 1 6 1 Chassis Ground 2 2 No Connect Signal 3 3 3 1 Signal 4 4 4 3 Bridge Drive 5 5 5 9 3 Bridge Drive 6 6 No Connect 1 Bridge Sensor Leg 7 7 7 2 Bridge Ref L...

Страница 72: ...t full scale value may require a specific orientation to meet factory calibration specifications Please consult the information supplied with the Capacitance Manometer However it is recommended that c...

Страница 73: ...g B Operational differential pressure is 10 to 40 psid for 5000 SCCM units 15 to 40 psid for 10 000 to 30 000 SCCM units 3 Allow 2 minutes for warm up time 4 Use high purity gas and filters in line up...

Страница 74: ...l MFC based ratio control is recommended 7 7 1 1 Mounting the Valve Ensure the flow direction arrow on the valve body is pointing towards the vacuum chamber The valve may be installed in any position...

Страница 75: ...with the proper fittings and connectors The unit consists of a 253 exhaust valve with an electronic housing attached to the motor plate Although the unit was designed and tested to operate in the mos...

Страница 76: ...hed to Position Control mode For the T3B connect pin 5 to pin 24 on the Aux I O connector Additionally ensure that the interlock signal is satisfied by connecting pins 22 and 24 on the Aux I O connect...

Страница 77: ...process a pressure signal results in a relay activation time delay of between 50 to 100 msec 8 1 1 Pin Out for the 946 Relay Output Table 8 1 identifies the pins for the 25 pin D connector on the AIO...

Страница 78: ...ormally closed NC roughing by pass valve in a vacuum system If the pressure is above the setpoint value a relay can be activated i e closed so that power is supplied to the solenoid of the NC roughing...

Страница 79: ...ts may interfere with the controller operation or reduce relay contact life In these situations an arc suppression network shown schematically in Figure 8 2 is recommended Figure 8 2 The Relay Arc Sup...

Страница 80: ...rocessing However the buffered output from a hot cathode sensor at pin 1 3 or 5 in the table 8 2 is a microprocessor formed output This is because the hot cathode sensor uses different emission curren...

Страница 81: ...946 Controller Instruction Manual pg 81 Figure 8 3 Buffered Analog Output for Cold Cathode Sensors 431 422 423 in N2...

Страница 82: ...8 1 0E 04 9 3297 4 0E 09 4 6807 1 5E 04 9 4255 6 0E 09 4 8991 2 0E 04 9 4826 8 0E 09 5 0452 3 0E 04 9 5605 1 0E 08 5 1579 4 0E 04 9 6076 1 5E 08 5 3563 6 0E 04 9 6708 2 0E 08 5 4924 8 0E 04 9 7034 3 0...

Страница 83: ...946 Controller Instruction Manual pg 83 Figure 8 4 Buffered Analog Output for Hot Cathode Sensors...

Страница 84: ...946 Controller Instruction Manual pg 84 Figure 8 5 Buffered Analog Output for a 345 Pirani Sensor...

Страница 85: ...1 3751 1 6066 6 0E 02 1 9652 1 6162 1 9148 8 0E 02 2 2254 1 8213 2 1788 1 0E 01 2 4526 2 0015 2 4131 1 5E 01 2 9255 2 3794 2 9143 2 0E 01 3 3095 2 6885 3 3370 3 0E 01 3 9177 3 1815 4 0419 4 0E 01 4 3...

Страница 86: ...V p 9 3 V V 9 72 V 20 p 1 103 Torr 8696 0 3 2 10 34 1 621 9 621 9 4123 V V p Argon 0 63 V 7 79 V 1 10 4 p 20 Torr 1 3961 0 63 63 663 1 2 V p 7 79 V V 8 05 V 30 p 1 103 Torr 729 0 4 2 10 464 5 9386 7...

Страница 87: ...946 Controller Instruction Manual pg 87 Figure 8 6 Buffered Analog Output for the 317 Convection Pirani Sensor or 275 Convectron Sensor...

Страница 88: ...2 1 2884 1 0782 1 1755 8 0E 02 1 4465 1 1985 1 3147 1 0E 01 1 5870 1 3066 1 4398 1 5E 01 1 8866 1 5399 1 7110 2 0E 01 2 1371 1 7370 1 9427 3 0E 01 2 5480 2 0637 2 3341 4 0E 01 2 8825 2 3318 2 6645 6 0...

Страница 89: ...0 372 5 503 8 503 8 5 399 V V p p 300 Torr 9177 0 512 3 exp V p Argon 0 56 V 7 00 V 1 10 4 p 60 Torr 002 1 2 1 3205 0 083 51 6 3 V p 7 00 V V 7 4 V 60 p 300 Torr 3 2 10 789 3 042 7 042 7 2 411 V V p P...

Страница 90: ...Buffered Capacitance Manometer Analog Output Pressure Torr 10 4 10 3 10 2 10 1 100 101 102 103 104 Output Voltage V 0 01 0 1 1 10 0 1 Full Scale Range Torr 1 0 10 100 1000 10 000 Figure 8 7 Buffered A...

Страница 91: ...vailable These can provide a wider pressure range coverage since the combination output combines the measurement ranges of multiple gauges When Capacitance Manometers are used in combination no smooth...

Страница 92: ...ani is used in combination only HC CC can be assigned to the low pressure range sensor Only capacitance manometer can be assigned as the high pressure range sensor If two or more capacitance manometer...

Страница 93: ...g Out Volts Linear Out volts Log Linear Out Volts 946 Power OFF 0 0 0 CP Convectron channel OFF incl gauge OFF via RP 0 10 10 CP Convectron below range See Analog Out Chart for CP Sensor 0 0 2 CP Conv...

Страница 94: ...in 9 3 to 9 14 Response Responses as described in 9 3 to 9 14 For example to query pressure on channel A1 use 003PR1 FF and the corresponding response is 003ACK7 602E 2 FF Here aaa 003 Command PR1 Res...

Страница 95: ...FF or HC PR CP power is OFF RP_OFF HC and CC power is turned OFF from rear panel control WAIT CC or HC startup delay LowEmis HC OFF due to low emission CTRL_OFF CC or HC is OFF in controlled state PRO...

Страница 96: ...the current setting value For CC and HC only BELOW can be selected NAK162 For CC and HC as the relay direction is fixed to BELOW ENm m 1 to 12 SET ENABLE or CLEAR SET ENABLE or CLEAR Query or set stat...

Страница 97: ...s 9 6 Convection Pirani Convectron and Pirani Control Commands Command Parameter Response Function ATMn n 1 to 6 d ddE ee ambient pressure d ddE ee Send an atmospheric pressure to perform ATM calibrat...

Страница 98: ...and 1 2 CSP to 0 03 Torr for Capacitance Manometer Default value is 1 5X the control set point value CSEn n 1 3 5 A1 B1 A2 B2 C1 C2 OFF A1 B1 A2 B2 C1 C2 OFF Query enable disable the control channel s...

Страница 99: ...1 A2 B2 C1 C2 OFF Query enable disable the control channel status for an HC sensor on channel n CTLn n 1 3 5 AUTO SAFE OFF AUTO SAFE OFF AUTO HC CC can be turned ON OFF by the controlling sensor PR CP...

Страница 100: ...is the starting flow rate for the MFC If the channel is set to RatioM or RatioA mode this is the set point for ratio control The maximum set point value is half of the full scale under the ratio cont...

Страница 101: ...BASE to 100 of full scale default setting is 100 RBAS n RBAS n d dd E ee d e 0 to 9 n d dd E ee n 1 to 8 d e 0 to 9 Set or query the BASE parameter for PID pressure control associated with recipe n V...

Страница 102: ...io channel is disabled if the flow rate is set to zero Table 9 12 Ratio Recipe Serial Setting Commands Ratio recipe serial commands can only query or set parameters within current active recipe It is...

Страница 103: ...default Enable MT T1 T2 T3 T4 Display the sensor module type T1 T2 T3 CC HC CM PR FC NC NC no connection T4 NA PF PC STn n A B C S1S2 Display the connected sensor type on the specified module A B or C...

Страница 104: ...C offset parameter B Default value is 7 2 Use n 0 for combination output Valid range is from 20 to 20 when DLT is set to LOG and always equals to zero when DLT is set to LIN IU ON or OFF ON or OFF For...

Страница 105: ...CATHODE 155 NOT_CAPACITANCE_MANOMETER 156 NOT_PIRANI_OR_CTP 157 NOT_PR_OR_CM 158 NOT_MFC 159 NOT_VLV 160 UNRECOGNIZED_MSG 161 SET_CMD_LOCK 162 RLY_DIR_FIX_FOR_ION 163 INVALID_CHANNEL 164 DIFF_CM 165 I...

Страница 106: ...946 Controllers are shipped with customer specified sensor modules The optional Pressure Control PC module for operating valves with the 946 Controller can only be used the slot labeled COM The Pressu...

Страница 107: ...nt in the controller when it is powered Disconnect the power cable before proceeding Suitable ESD handling precautions should be followed while installing configuring or adjusting the instrument or an...

Страница 108: ...uction for Connecting Wire on the Back of the Power Cord Receptor 5 Gently slide the module forward and make sure the internal 48 pin DIN connector is engaged 6 Use a 1 Phillips screwdriver to install...

Страница 109: ...nsure adequate ventilation of the controller Side clearance is not required To accommodate connectors and cables leave open about 3 inches 75mm clearance behind the rear panel Adhesive backed rubber p...

Страница 110: ...able cord set with conductors having a cross sectional area equal to or greater than 0 75 mm2 The power cord should be approved by a qualified agency such as UL VDE Semko or SEV Properly ground the co...

Страница 111: ...current or filament voltage is needed Degassing is not needed Sensor tubes can often be cleaned and reused almost indefinitely The control circuit is simple and reliable having only one current loop...

Страница 112: ...ed throughs for the anode high voltage and the cathode current This configuration has a cylindrical cathode a central wire anode and an external cylindrical magnet which provides an axial field The ca...

Страница 113: ...e Assembly 2 Remove the two 4 40 x button head screws 1 3 Use needle nose pliers to pull the 22 contact 8 carefully off the ion current feed through 17 4 Pull the 20 contact 7 off the 5kV feed through...

Страница 114: ...the guard bolt from the flange 13 There is a small curved spring washer 20 under the head of the guard bolt This spring washer holds the insulating support tight preloads the guard bolt to resist unsc...

Страница 115: ...hed others 250 C Series 422 sensors with high temperature connectors may be operated during bakeout if cables and connectors with appropriate temperature ratings are used Cables or connectors rated to...

Страница 116: ...ng 1 on the ion current feed through pin when assembling or disassembling the sensor Leaf Spring High Voltage Feedthrough Pin Flathead Screw 2 Magnet Ion Current Feedthrough Pin Glass Insulator Locati...

Страница 117: ...sonic cleaning are acceptable Do not damage the leaf spring 1 while cleaning or assembling the sensor Each of the cleaning methods described above should be followed with multiple rinses of deionized...

Страница 118: ...cribed in Disassemble the I Mag sensor 11 3 Maintenance of Low Power Nude and Mini BA Hot Cathode Sensors 11 3 1 Hot Cathode Theory Hot Cathode Ionization sensors use the electrons emitted from a hot...

Страница 119: ...d other fluids that condense and or decompose on surfaces such as the grid and collector contaminate the sensor and can cause calibration shift Degassing of the electrode structure can remove surface...

Страница 120: ...n the vacuum environment A wire sometimes referred to as a filament suspended from supports see Figure 11 7 is heated and maintained at a constant temperature during the measurement process Figure 11...

Страница 121: ...00 Torr 11 4 2 Cleaning the Series 345 Sensor Roughing pump oils and other fluids condensing or decomposing on the heated filament can contaminate the sensor This changes the emissivity of the filamen...

Страница 122: ...caused by physical abuse or sudden venting of the sensor to atmosphere at the inlet port 1 Using a 1 Phillips head screwdriver remove the two screws to separate the connector electronics subassembly f...

Страница 123: ...Base Pinout 11 5 Maintenance of a Capacitance Manometer 11 5 1 Theory of a Capacitance Manometer The MKS Capacitance Manometer head contains a sensor and signal conditioner The sensor is made up of a...

Страница 124: ...pg 124 11 5 2 Repairing the Baratron Capacitance Manometer Repair by the user is not recommended since replacement or movement of PC board components may require complete calibration of the unit Retu...

Страница 125: ...le for Capacitance Manometer Type 722B 10 ft 3 0 m 100016951 25 ft 7 6 m 100016952 50 ft 15 2 m 100016953 Cable for Capacitance Manometer Type 626B 627D 10 ft 3 0 m 100007555 25 ft 7 6 m 100007556 50...

Страница 126: ...w controller 15 pin connector 10 ft 3 0 m 100016744 25 ft 7 6 m 100016745 50 ft 15 2 m 100016746 Cable for Mass flow controller 9 pin connector 10 ft 3 0 m 100019087 25 ft 7 6 m 100019088 50 ft 15 2 m...

Страница 127: ...ifluoromethane Freon 13 CClF3 0 153 4 660 0 38 Cyanogen C2N2 0 2613 2 322 0 61 Deuterium D2 1 722 0 1799 1 00 Diborane B2H6 0 508 1 235 0 44 Dibromodifluoromethane CBr2F2 0 15 9 362 0 19 Dichlorodiflu...

Страница 128: ...0 99 Nitrogen N2 0 2485 1 250 1 00 Nitrogen Dioxide NO2 0 1933 2 052 Nitrogen Trifluoride NF3 0 1797 3 168 0 48 Nitrous Oxide N2O 0 2088 1 964 0 71 Octafluorocyclobutane Freon C318 C4F8 0 1866 8 93 0...

Страница 129: ...946 Controller Instruction Manual pg 129...

Страница 130: ...946 Controller Instruction Manual pg 130 Series 946 Vacuum System Controller Operation and Maintenance Manual Instruction Manual p n 100018121 Rev A June 2020...

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