MKS 946 Series, Руководство по эксплуатации и обслуживанию, Страница: 4 / 130

946 Controller Instruction Manual pg. 4
9.14 System Commands ......................................................................................... 103
9.15 Error Codes ..................................................................................................... 105
10 Maintenance of Series 946 Controller Modules ...................................... 106
10.1 Removing and Installing a Sensor Module ....................................................... 106
10.2 Removing and Installing AIO Module ............................................................... 107
10.3 Pressure Control (PC) Module ......................................................................... 108
10.4 Mounting the 946 Controller ............................................................................. 109
10.5 AC Power Cord ................................................................................................ 110
11 Maintenance and Service of MKS Vacuum Sensors .............................. 111
11.1 422 and 431 Cold Cathode Sensor .................................................................. 111
11.1.1 Cold Cathode Theory ............................................................................................................... 111
11.1.2 Maintenance of Series 431/422 Cold Cathode Sensor............................................................. 112
11.2 Maintenance of Series 423 I-Mag Cold Cathode Sensor.................................. 115
11.2.1 Disassemble the I-Mag Sensor ................................................................................................ 115
11.2.2 Clean the I-Mag Sensor ........................................................................................................... 117
11.2.3 Assemble the I-Mag Sensor ..................................................................................................... 117
11.2.4 Preparing the Sensor for Bakeout ............................................................................................ 118
11.3 Maintenance of Low Power Nude and Mini BA Hot Cathode Sensors.............. 118
11.3.1 Hot Cathode Theory ................................................................................................................. 118
11.3.2 Cleaning the Hot Cathode Sensor ............................................................................................ 119
11.3.3 Testing the Hot Cathode Sensor .............................................................................................. 119
11.4 Maintenance of a Pirani Sensor ....................................................................... 120
11.4.1 Theory of a Pirani Pressure Sensor ......................................................................................... 120
11.4.2 Cleaning the Series 345 Sensor ............................................................................................... 121
11.4.3 Cleaning the Series 317 Sensor ............................................................................................... 122
11.5 Maintenance of a Capacitance Manometer ...................................................... 123
11.5.1 Theory of a Capacitance Manometer ....................................................................................... 123
11.5.2 Repairing the Baratron Capacitance Manometer ..................................................................... 124
12 Spare Parts and Accessories ................................................................... 125
13 Appendix .................................................................................................... 127
13.1 MFC Gas Conversion Factors for Selected Gases .................................................... 127