946 Controller Instruction Manual
pg. 19
4
Typical Applications for the Series 946 Controller
•
Wide pressure measurement range in vacuum chambers.
•
Integrated vacuum process control with simultaneous flow, pressure, and valve control.
•
Pressure control in vacuum systems and process sequencing using relay set points.
•
Sensing abnormal pressure events and initiating and controlling appropriate security
measures using the relay set points.
•
Controlling system pressure by using the analog output as the input to an automatic pressure
controller.
•
Starting or stopping system processes using relay set points.
•
Measuring backfill pressures.
•
Controlling accelerator and light source vacuum systems.
•
Displaying the flow rates from MFCs and providing an interface for MFC setup.
•
Control of gas flow into vacuum/process chamber.
•
Maintaining accurate system pressure by controlling an upstream solenoid valve.
•
Maintaining accurate system pressure by controlling a downstream throttle valve.
•
Maintaining accurate system pressure by regulating a single MFC flow rate (single MFC PID
control), or multiple MFC flow rates with fixed ratio (ratio control).
•
Maintaining smooth control of a wide range of pressures through the use of the combined
analog outputs of up to 3 sensors.
•
Using averaged analog output from up to 3 Capacitance Manometers with the same range for
critical process control.
•
Fast relay control by a Cold Cathode sensor for high vacuum protection.