946 Controller Instruction Manual
pg. 14
Mini BA
1.12X2.37 in (
28
60 mm) with 2-3/4” CF flange
LPN
3.3X1.0 in (
83 mm
25) with 2-3/4 CF flange, can insert into
NW40 tube.
Pirani
1.3X4.4 in (
34
112 mm)
CP
1.6X4.4 in (
41
112 mm)
CM
Types 622A, 623A and 626A -
2.6
4.8 in. (
66
121 mm)
Type 722A-
1.5
3.9 in (
38
99 mm)
FC (H
W
L)
1179A -<5.5
<1.5
3 in (<14.0
<3.8
7.6 mm)
Typical Weight
CC (with 2-3/4” CF flange)
Series 431 and 422 - 2.4 lb (1.1 kg)
Series423 - 1.8 lb (0.8 kg)
LPN
0.9 lb (0.40 kg) with CF flange
Mini BA
0.816 lb (0.36 kg) with CF flange
Pirani
0.5 lb (0.2 kg)
CP (w/ KF Flange)
0.5 lb (0.2 kg)
FC
<1.9 lb (0.86 kg)
2.3
Controller Display
2.3.1 Display Message
X.X0E
ee
Normal pressure for the Pirani, CP, CC, and HC
X.XXXE
e
Normal pressure for the Baratron, flow rate for MFC
OVER
The pressure is over upper limit (for CC and HC when p > 1x10
-2
Torr)
ATM
Atmospheric pressure for the Pirani sensor
>1.100E
e
CM pressure is over 10% of the full scale
LO<E-11
The CC pressure is below its lower limit, or no CC sensor is connected
LO<E-10
The HC pressure is below its lower limit
LO<E-04
The Pirani pressure is below its lower limit
LO<E-03
The CP pressure is below its lower limit
OFF
Power is OFF to HC/CC/CP/PR sensor.
WAIT
CC and HC startup delay
Low EMIS
The HC OFF due to low emission current
CTRL OFF
The HC or CC are turned OFF by the control channel
PROT OFF
The HC or CC are in a protected state