MKS 946 Series, Руководство по эксплуатации и обслуживанию, Страница: 102 / 130

946 Controller Instruction Manual pg. 102
Example 1: To query the proportional gain Kp for recipe 3: @001RKP?3;FF)
Example 2: To set control setpoint pressure to 50 Torr for recipe 1: @005RPSP!1:5.0E+1;FF)
The n: argument in both query and set command may be omitted (@254RPSP!2.5E+2;FF) if
you query or set parameters within current active recipe.
9.12 Ratio Recipe Setting Commands
Command Parameter Response Function
RRCP n
(n=1 to 4)
n
(n=1 to 4)
Set or query the active ratio recipe number.
RRQm?n
RRQm!n:
d.dd E  ee
(d,e=0 to 9)
n:d.dd E  ee
(n=1 to 4)
(m=1 to 6)
(d,e=0 to 9)
Set or query the flow rate for ratio control channel m
associated with ratio recipe n.
The ratio channel is disabled if the flow rate is set to zero.
Table 9-12 Ratio Recipe Serial Setting Commands
Ratio recipe serial commands can only query or set parameters within current active recipe. It
is recommended to run @254RRCP!n;FF first to set the active recipe before modifying recipe
parameters.
9.13 PID/Ratio Control Activation Command
PID ON, OFF ON, OFF, NAK Start or stop the PID pressure control using current
active recipe.
RM ON, OFF ON, OFF, NAK Start or stop the manual pressure control using current
active recipe.
RF ddd
(0 to 200)
ddd
(0 to 200)
Set or query the ratio control factor. The RF! Command
will also switch the auto ratio to manual ratio control.
RCP n
(n=1 to 8)
n
(n=1 to 8)
Set or query the active recipe number.
RRCP n
(n=1 to 4)
n
(n=1 to 4)
Set or query the active ratio recipe number.
Table 9-13 PID and Ratio Control Activation Commands