MKS 946 Series, Руководство по эксплуатации и обслуживанию, Страница: 12 / 130

946 Controller Instruction Manual pg. 12
Installation orientation
CC, HC, CM, Pirani, FC Any (port down suggested for pressure sensor)
CP Body horizontal only
Materials exposed to vacuum may include
CC Series 431 and 422 – SS 304, Al 6061, silver-copper brazing
alloy, alumina ceramic, Elgiloy
®
, OFHC
®
copper
Series 423– SS 302, SS 304, glass, Al, Inconel X-750
®
, alumina
ceramic
HC 304 SS, Inconel
®
X750, glass, tungsten, platinum clad
molybdenum, tantalum, nickel, braze alloy, either yttria coated
iridium or tungsten filament
Pirani 300 series stainless, platinum, glass, alumina ceramic, silver
brazing alloy, nickel 200
CP 300 series stainless, nickel, glass, platinum
Convectron 304 stainless steel, borosilicate glass, Kovar®, Alumina,
NiFe alloy, polyimide
CM Inconel
®
FC 316 series stainless, nickel, Elgiloy
®
, elastomer seal.
Internal volume 8
CC Series 431 and 422 - 1.8 in
3
(30 cm
3
)
Series 423 - 0.9 in
3
(15 cm
3
)
HC Low power nude tube - zero
Mini BA - 1.4 in
3
(23 cm
3
)
Pirani 0.5 in
3
(8 cm
3
)
CP 2.0 in
3
(33 cm
3
)
Convectron 304 stainless steel, borosilicate glass, Kovar®, Alumina,
NiFe alloy, polyimide
CM Type 622A/623A/626A - 0.38 in.
3
(6.3 cm
3
)
Type 722A -0.3 in.
3
(4.9 cm
3
)
FC 0.27 in
3
(4.43 cm
3
)
Operating temperature range
CC Series 431 - 0° to 70°C (32° to 158°F)
Series 422--Versions available that operate up to 250°C.
Series 423 - 0° to 70°C (32° to 158°F)
Pirani & HC 0° to 50°C (32° to 122°F)
8 Volume will vary with the type of vacuum connection selected