Keysight Technologies B1505A, Руководство по настройке

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5-18 Keysight B1505A Configuration and Connection Guide
Connection Guide for Wafer Prober and Your Own Test Fixture
To Connect HCSMU Adapter
The following connection example uses one HCSMU module and the 16493S-010 adapter
for making the Kelvin connection. In this example, the GNDU path is prepared as a
separate path. This GNDU connection is also effective for the connection using the
16493S-011 non-Kelvin adapter.
To simplify the GNDU connection, change the connection as shown in Figure 5-4 . This
connection can save one manipulator.
Figure 5-3 Typical Connection to Use One HCSMU, Kelvin connection
Figure 5-4 To Simplify GNDU Connection, Kelvin connection
Figure 5-5 To Simplify GNDU Connection, non-Kelvin connection
Shielding box
B 1505A
DUT interface
GNDU adapter (N1261A-002)
16493S-010
Interlock circuit
16493S
16493L
Sense
Force
Low
High
Sense
Force
*2
*1
*2
*1: 1252-1419
*2: N1254A-503 or other cable, 5 ea.
*3: N1254A-516, 1 ea. and 16493U-001, 2 ea.
*3
*2
16493J
Low
High
16493S-010
Low Force
Low Sense
*2
*1
*1: N1254A-503 or other cable, 2 ea.
*2: 1250-2405, 2 ea. and 8120-1838 or 1839, 2 ea.
Force
Sense
GNDU adapter (N1261A-002)
To DUT interface
16493S-011
Low Force
*2
*1
*1: N1254A-503 or other cable, 1 ea.
*2: 1250-2405, 2 ea. and 8120-1838 or 1839, 2 ea.
Force
Sense
GNDU adapter (N1261A-002)
To DUT interface